Abstract

Tuning of the resonant wavelength of a single hole defect cavity in planar photonic crystals was demonstrated using transmission spectroscopy. Local post-production processing of single holes in a planar photonic crystal is carried out after selectively opening a masking layer by focused ion beam milling. The resonance was blue-shifted by enlargement of selected holes using local wet chemical etching and red-shifted by infiltration with liquid crystals. This method can be applied to precisely control the resonant frequency, and can also be used for mode selective tuning.

© 2009 Optical Society of America

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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]

2008 (5)

2007 (6)

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

P. El-Kallassi, R. Ferrini, L. Zuppiroli, N. Le Thomas, R. Houdr’e, A. Berrier, S. Anand, and A. Talneau, "Optical tuning of planar photonic crystals infiltrated with organic molecules," J. Opt. Soc. Am. B 24, 2165 (2007).
[CrossRef]

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

2006 (8)

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006).
[CrossRef]

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006).
[CrossRef] [PubMed]

2005 (6)

D. Freeman, S. Madden, and B. Luther-Davies, "Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam," Opt. Express 13, 3079 (2005).
[CrossRef] [PubMed]

B. Maune, J. Witzens, T. Baehr-Jones, M. Kolodrubetz, H. Atwater, A. Scherer, R. Hagen, and Y. Qiu, "Optically triggered Q-switched photonic crystal laser," Opt. Express 13, 4699 (2005).
[CrossRef] [PubMed]

D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, "Postfabrication fine-tuning of photonic crystal microcavities in InAs/InP quantum dot membranes," Appl. Phys. Lett.  87, 151107 (2005).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

2004 (1)

2003 (5)

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

2002 (1)

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Adibi, A.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Anand, S.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Askari, M.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Atat¨ure, M.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Atwater, H.

Ay, F.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Badolato, A.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Baehr-Jones, T.

Balog, S.

Bastiaansen, C. W. M.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Benotti, P.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Bhattacharya, P.

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

Birner, A.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Bog, U.

Broer, D. J.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Bronnimann, R.

P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006).
[CrossRef]

Bulla, D.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

Busch, K.

S. F. Mingaleev, M. Schillinger, D. Hermann, and K. Busch, "Tunable photonic crystal circuits: concepts and designs based on single-pore infiltration," Opt. Lett. 29, 2858 (2004).
[CrossRef]

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Cabrini, S.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Callegari, V.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006).
[CrossRef]

Carlstrom, C. F.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

Carpentiero, A.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Cingolani, R.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Colocci, M.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Cortaberria Sanz, D.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Cryan, M. J.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Dalacu, D.

D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, "Postfabrication fine-tuning of photonic crystal microcavities in InAs/InP quantum dot membranes," Appl. Phys. Lett.  87, 151107 (2005).
[CrossRef]

de Ridder, R. M.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

De Vittorio, M.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Di Fabrizio, E.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Dreiser, J.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Dunbar, L. A.

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006).
[CrossRef] [PubMed]

Dunham, S. N.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

Eggleton, B. J.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

El-Kallassi, P.

Englund, D.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

Erni, D.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

Faraon, A.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

Ferrini, R.

P. El-Kallassi, R. Ferrini, L. Zuppiroli, N. Le Thomas, R. Houdr’e, A. Berrier, S. Anand, and A. Talneau, "Optical tuning of planar photonic crystals infiltrated with organic molecules," J. Opt. Soc. Am. B 24, 2165 (2007).
[CrossRef]

R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006).
[CrossRef] [PubMed]

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Forchel, A.

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Freeman, D.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

D. Freeman, S. Madden, and B. Luther-Davies, "Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam," Opt. Express 13, 3079 (2005).
[CrossRef] [PubMed]

G¨osele, U.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Gadgil, V. J.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Gaillot, D. P.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

Giessen, H.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Graugnard, E.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

Grillet, C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Hagen, R.

Heard, P. J.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Hennessy, K.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Hermann, D.

Herrmann, R.

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

Hill, M.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Hogerle, C.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

Hopman, W. C. L.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Hotchkiss, P. J.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Houdre, R.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Hu, E.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Hu, W.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Imamo?glu, A.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Imamoglu, A.

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

Intonti, F.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Ivanov, P. S.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Jamois, C.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

John, S.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Jones, S. C.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Kamp, M.

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Karnutsch, C.

Karouta, F.

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Kelly, J. J.

R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008).
[CrossRef]

Kim, J.-Y.

Kim, S.-H.

Kitzerow, H.-S. R.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Kjellander, B. K. C.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Klopf, F.

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

Kolodrubetz, M.

Krauss, T. F.

Kuipers, L.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Le Thomas, N.

Lee, M. W.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Lee, Y.-H.

M.-K. Seo, H.-G. Park, J.-K. Yang, J.-Y. Kim, S.-H. Kim, and Y.-H. Lee, "Controlled sub-nanometer tuning of photonic crystal resonator by carbonaceous nano-dots," Opt. Express 16, 9829 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Lehmann, V.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Leonard, S. W.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Leuenberger, D.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Loffler, A.

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

Lon?car, M.

M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

Luther-Davies, B.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

D. Freeman, S. Madden, and B. Luther-Davies, "Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam," Opt. Express 13, 3079 (2005).
[CrossRef] [PubMed]

Madden, S.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

D. Freeman, S. Madden, and B. Luther-Davies, "Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam," Opt. Express 13, 3079 (2005).
[CrossRef] [PubMed]

Marder, S. R.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Marsmann, H.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Martz, J.

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006).
[CrossRef] [PubMed]

Matthias, H.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Maune, B.

McPhedran, R. C.

Mertens, G.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Mingaleev, S. F.

Momeni, B.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Monat, C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Mondia, J. P.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Moosburger, J.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Mulot, M.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

N¨otzel, R.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Neff, C.W.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

Nellen, P. M.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006).
[CrossRef]

Nesch, F.

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

Neubert, M.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Norwood, R. A.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

O’Faolain, L.

Park, H.-G.

Passaseo, A.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Pavesi, L.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Petroff, P.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

Petroff, P. M.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Peyghambarian, N.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Pollnau, M.

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
[CrossRef]

Qiu, M.

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

Qiu, Y.

Reithmaier, J. P.

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

Robin, F.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

Roder, T.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Rorison, J. M.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Ruan, Y.

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Sabarinathan, J.

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

Salemink, H. W. M.

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Scherer, A.

Schillinger, M.

Schuller, Ch.

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

Schweizer, S. L.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Segerink, F. B.

R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008).
[CrossRef]

Seo, M.-K.

Smith, C. L. C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Snijders, J. A. P.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

Stoltz, N.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

Stomeo, T.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Strasser, P.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

Summersa, C. J.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

Sunner, T.

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
[CrossRef]

T¨urck, V.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Tamboli, A.

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

Tay, S.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Thomas, J.

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

Tian, L.

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Tjerkstra, R. W.

R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008).
[CrossRef]

Toader, O.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Todaro, M. T.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Tomljenovic-Hanic, S.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Topol’ancik, J.

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

van der Drift, E

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

van der Drift, E.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

van der Heijden, R.

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

van der Heijden, R. W.

C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
[CrossRef]

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

van Driel, H. M.

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Vignolini, S.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Visimberga, G.

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

Vos, W. L.

R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008).
[CrossRef]

Vuˆckovi’c, J.

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

W¨uest, R.

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

Wehrspohn, R.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Wehrspohn, R. B.

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

Wiersma, D.

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

Wild, B.

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

R. Ferrini, J. Martz, L. Zuppiroli, B. Wild, V. Zabelin, L. A. Dunbar, R. Houdre, M. Mulot and S. Anand, "Planar photonic crystals infiltrated with liquid crystals: optical characterization of molecule orientation," Opt. Lett. 31, 1238 (2006).
[CrossRef] [PubMed]

Witzens, J.

Wu, D. K. C.

C. L. C. Smith, U. Bog, S. Tomljenovic-Hanic, M. W. Lee, D. K. C. Wu, L. O’Faolain, C. Monat, C. Grillet, T. F. Krauss, C. Karnutsch, R. C. McPhedran, and B. J. Eggleton, "Reconfigurable microfluidic photonic crystal slab cavities," Opt. Express 16, 15887 (2008).
[CrossRef] [PubMed]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

Yamashita, T.

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

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Yu, P.-C.

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

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M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

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Zuppiroli, L.

Appl. Phys. Lett. (13)

Ch. Schuller, F. Klopf, J. P. Reithmaier, M. Kamp, and A. Forchel, "Tunable photonic crystals fabricated in III-V semiconductor slab waveguides using infiltrated liquid crystals," Appl. Phys. Lett. 82, 2767 (2003).
[CrossRef]

G. Mertens, T. Roder, H. Matthias, H. Marsmann, H.-S. R. Kitzerow, S. L. Schweizer, C. Jamois, R. B. Wehrspohn, and M. Neubert, "Two- and three-dimensional photonic crystals made of macroporous silicon and liquid crystals," Appl. Phys. Lett. 83, 3036-3038 (2003).
[CrossRef]

M. Loncar, A. Scherer, and Y. Qiu, "Photonic crystal laser sources for chemical detection," Appl. Phys. Lett. 82, 4648 (2003).
[CrossRef]

S. Tay, J. Thomas, B. Momeni, M. Askari, A. Adibi, P. J. Hotchkiss, S. C. Jones, S. R. Marder, R. A. Norwood, and N. Peyghambarian, "Planar photonic crystals infiltrated with nanoparticle/polymer composites," Appl. Phys. Lett. 91, 221109 (2007).
[CrossRef]

A. Faraon, D. Englund, D. Bulla, B. Luther-Davies, B. J. Eggleton, N. Stoltz, P. Petroff, and J. Vuckovic, "Local tuning of photonic crystal cavities using chalcogenide glasses," Appl. Phys. Lett. 92, 043123 (2008).
[CrossRef]

D. Dalacu, S. Frederick, P. J. Poole, G. C. Aers, and R. L. Williams, "Postfabrication fine-tuning of photonic crystal microcavities in InAs/InP quantum dot membranes," Appl. Phys. Lett.  87, 151107 (2005).
[CrossRef]

K. Hennessy, A. Badolato, A. Tamboli, P. M. Petroff, E. Hu, M. Atature, J. Dreiser, and A. Imamoglu, "Tuning photonic crystal nanocavity modes by wet chemical digital etching," Appl. Phys. Lett. 87, 021108 (2005).
[CrossRef]

F. Intonti, S. Vignolini, V. T¨urck, M. Colocci, P. Benotti, L. Pavesi, S. L. Schweizer, R. Wehrspohn, and D. Wiersma, "Rewritable photonic circuits," Appl. Phys. Lett. 89, 211117 (2006).
[CrossRef]

C. L. C. Smith, D. K. C. Wu, M. W. Lee, C. Monat, S. Tomljenovic-Hanic, C. Grillet, B. J. Eggleton, D. Freeman, Y. Ruan, S. Madden, B. Luther-Davies, H. Giessen, and Y.-H. Lee, "Microfluidic photonic crystal double heterostructures," Appl. Phys. Lett.  91, 121103 (2007).
[CrossRef]

R. van der Heijden, C. F. Carlstrom, J. A. P. Snijders, R. W. van der Heijden, F. Karouta, R. N¨otzel, H. W. M. Salemink, B. K. C. Kjellander, C. W. M. Bastiaansen, D. J. Broer, and E. van der Drift, "InP-based twodimensional photonic crystals filled with polymers," Appl. Phys. Lett. 88, 161112 (2006).
[CrossRef]

K. Hennessy, C. Hogerle, E. Hu, A. Badolato, and A. Imamoglu, "Tuning photonic nanocavities by atomic force microscope nano-oxidation," Appl. Phys. Lett. 89, 041118 (2006).
[CrossRef]

J. Topol’ancik, P. Bhattacharya, J. Sabarinathan, and P.-C. Yu, Fluid detection with photonic crystal-based multichannel waveguides, Appl. Phys. Lett. 82, 1143 (2003).
[CrossRef]

E. Graugnard, D. P. Gaillot, S. N. Dunham, C.W. Neff, T. Yamashita, and C. J. Summersa, Photonic band tuning in two-dimensional photonic crystal slab waveguides by atomic layer deposition, Appl. Phys. Lett. 89, 181108 (2006).
[CrossRef]

J. Appl. Phys. (1)

J. Martz, R. Ferrini, F. Nesch, L. Zuppiroli, B. Wild, L. A. Dunbar, R. Houdre, M. Mulot, and S. Anand, "Liquid crystal infiltration of InP-based planar photonic crystals," J. Appl. Phys. 99, 103105 (2006).
[CrossRef]

J. Opt. Soc. Am. B (2)

J. Quantum Electron. (1)

R. Ferrini, D. Leuenberger, M. Mulot, M. Qiu, J. Moosburger, M. Kamp, A. Forchel, S. Anand and R. Houdre, "Optical study of two-dimensional InP-based photonic crystals by internal light source technique," J. Quantum Electron. 38, 786 (2002).
[CrossRef]

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C. F. Carlstrom, R. van der Heijden, F. Karouta, R. W. van der Heijden and H. W. M. Salemink, and E van der Drift, "Cl2/O2-inductively coupled plasma etching of deep hole-type photonic crystals in InP," J. Vac. Sci. Technol. B 24, L6 (2006).
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R. W. Tjerkstra, F. B. Segerink, J. J. Kelly, W. L. Vos, "Fabrication of three-dimensional nanostructures by focused ion beam milling," J. Vac. Sci. Technol. B 26, 973 (2008).
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Microelectron. Eng. (3)

T. Stomeo, G. Visimberga, M. T. Todaro, A. Passaseo, R. Cingolani, M. De Vittorio, S. Cabrini, A. Carpentiero, and E. Di Fabrizio, "Rapid prototyping of two-dimensional photonic crystal devices by a dual beam focused ion beam system," Microelectron. Eng. 78-79, 417 (2005).
[CrossRef]

P. M. Nellen, P. Strasser, V. Callegari, R. W¨uest, D. Erni, and F. Robin, Focused ion beam modifications of indium phosphide photonic crystals, Microelectron. Eng. 84, 1244 (2007).
[CrossRef]

P. M. Nellen, V. Callegari, and R. Bronnimann, FIB-milling of photonic structures and sputtering simulation, Microelectron. Eng. 83, 1805 (2006).
[CrossRef]

Microeoectron. Eng. (1)

T. Sunner, R. Herrmann, A. Loffler, M. Kamp, and A. Forchel, "Fine-tuning of GaAs photonic crystal cavities by digital etching," Microelectrom. Eng. 84, 1405 (2007).
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Nanotechnol. (1)

W. C. L. Hopman, F. Ay, W. Hu, V. J. Gadgil, L. Kuipers, M. Pollnau, and R. M. de Ridder, "Focused ion beam scan routine, dwell time and dose optimizations for submicrometre period planar photonic crystal components and stamps in silicon," Nanotechnol. 18, 195305 (2007).
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Opt. Express (4)

Opt. Lett. (2)

Phys. Rev. B (1)

S. W. Leonard, J. P. Mondia, H. M. van Driel, O. Toader, S. John, K. Busch, A. Birner, U. Gosele, and V. Lehmann, "Tunable two-dimensional photonic crystals using liquid crystal infiltration," Phys. Rev. B 61, R2389 (2003).
[CrossRef]

Quantum. Electron (1)

M. J. Cryan, M. Hill, D. Cortaberria Sanz, P. S. Ivanov, P. J. Heard, L. Tian, S. Yu, and J. M. Rorison, "Focused ion beam-based fabrication of nanostructured photonic devices," IEEE J. Sel. Top.Quantum. Electron 11, 1266 (2005).
[CrossRef]

Other (1)

J. D. Joannopoulos, S. G. Johnson, R. D. Meade and J. N. Winn, Photonic crystals: molding the flow of light, (Princeton, NJ: Princeton Univ. Press, 2008).

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Figures (3)

Fig. 1.
Fig. 1.

a) SEM picture of a cross-section of a PC covered by a SiN x masking layer. b) SEM picture of an array of individually targeted holes by FIB milling. SEM allows detection of the PC holes through the masking layer. On the right side the alignment markers are visible. The scale in both figures is indicated by the white bar, which has a length of 1 µm in both cases.

Fig. 2.
Fig. 2.

a) 20 kV SEM picture after FIB opening of a hexagonal shape covering the holes adjacent to the H1-defect. The vertical arm of the cross-like structure is the access RWGs used for transmission spectroscopy. b) SEM picture of the hexagonal opening after the wet chemical etching process, showing the six opened PC holes. The four dark squares are the markers used for the alignment procedure. The holes situated below the thicker part of the mask remain closed. The scale in both figures is indicated by the white bar, which has a length of 1 µm in both cases.

Fig. 3.
Fig. 3.

a) Transmission spectrum of the H1 defect resonance. The spectra are shown stacked for clarity. The ”after fabrication” line represents the measurement after fabrication. The ”after etching” line displays the resonance after 15 steps of digital etching increasing the hole diameter from 190 nm to 210 nm, giving rise to a blue-shift of 40 nm (Δ a/λ~0.01). After filling (”LC filled” line) the opened and enlarged holes with LC, the resonance displays a red-shift of 40 nm, approximately returning the resonance frequency to its original position. The change of the shape of the resonance for both ”after etching” and ”LC filled” with respect to the reference is due to the presence of the SiN x layer, which also covers the end-facets and acts as an anti-reflection coating. b) 3D-FDTD calculations of all the steps in the post-processing scheme. A ”completely filled” line was added to indicate the result of a failed experiment, i.e. all the holes of the PC are infiltrated. The calculations use the following parameters: a=380 nm, reference diameter=203 nm, after etch diameter=226 nm, LC filled effective refractive index of the holes=1.41, corresponding to a LC filling efficiency of ~75%.

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