K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 ( 2009).
[Crossref]
[PubMed]
K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 ( 2009).
[Crossref]
[PubMed]
A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 ( 2005).
[Crossref]
Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 ( 2004).
[Crossref]
[PubMed]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 ( 1994).
[Crossref]
R. A. Soref and B. R. Bennett, “Kramers-Kronig analysis of E-O switching in silicon,” SPIE Integr. Opt. Circuit Eng. 704, 32–37 ( 1986).
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
R. A. Soref and B. R. Bennett, “Kramers-Kronig analysis of E-O switching in silicon,” SPIE Integr. Opt. Circuit Eng. 704, 32–37 ( 1986).
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 ( 2005).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 ( 2005).
[Crossref]
F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 ( 1994).
[Crossref]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 ( 2009).
[Crossref]
[PubMed]
K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 ( 2009).
[Crossref]
[PubMed]
K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15(25), 17283–17290 ( 2007).
[Crossref]
[PubMed]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 ( 2005).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 ( 1994).
[Crossref]
K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 ( 2009).
[Crossref]
[PubMed]
K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 ( 2009).
[Crossref]
[PubMed]
K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15(25), 17283–17290 ( 2007).
[Crossref]
[PubMed]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
R. A. Soref and B. R. Bennett, “Kramers-Kronig analysis of E-O switching in silicon,” SPIE Integr. Opt. Circuit Eng. 704, 32–37 ( 1986).
J. S. Foresi, M. R. Black, A. M. Agarwal, and L. C. Kimerling, “Losses in polycrystalline silicon waveguides,” Appl. Phys. Lett. 68(15), 2052–2054 ( 1996).
[Crossref]
A. Harke, M. Krause, and J. Mueller, “Low-loss single mode amorphous silicon waveguides,” Electron. Lett. 41(25), 1377–1379 ( 2005).
[Crossref]
L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L. C. Kimerling, “Optical transmission losses in polycrystalline silicon strip waveguides: effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength,” J. Electron. Mater. 29(12), 1380–1386 ( 2000).
[Crossref]
A. Säynatjoki, J. Riikonen, H. Lipsanen, and J. Ahopelto, “Optical waveguides on polysilicon-on-insulator,” J. Mater. Sci. Mater. Electron. 14(5/7), 417–420 ( 2003).
[Crossref]
A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, “A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor,” Nature 427(6975), 615–618 ( 2004).
[Crossref]
[PubMed]
Y. A. Vlasov and S. J. McNab, “Losses in single-mode silicon-on-insulator strip waveguides and bends,” Opt. Express 12(8), 1622–1631 ( 2004).
[Crossref]
[PubMed]
K. Preston, B. Schmidt, and M. Lipson, “Polysilicon photonic resonators for large-scale 3D integration of optical networks,” Opt. Express 15(25), 17283–17290 ( 2007).
[Crossref]
[PubMed]
Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low loss (approximately 6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler,” Opt. Express 16(9), 6425–6432 ( 2008).
[Crossref]
[PubMed]
K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Opt. Express 17(3), 1527–1534 ( 2009).
[Crossref]
[PubMed]
K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, and M. Lipson, “Deposited silicon high-speed integrated electro-optic modulator,” Opt. Express 17(7), 5118–5124 ( 2009).
[Crossref]
[PubMed]
F. P. Payne and J. P. R. Lacey, “A theoretical analysis of scattering loss from planar optical waveguides,” Opt. Quantum Electron. 26(10), 977–986 ( 1994).
[Crossref]
R. A. Soref and B. R. Bennett, “Kramers-Kronig analysis of E-O switching in silicon,” SPIE Integr. Opt. Circuit Eng. 704, 32–37 ( 1986).
T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed., (Kluwer, 1998).
A. Saynatjoki, S. Arpiainen, J. Ahopelto, and H. Lipsanen, “High-index-contrast optical waveguides on silicon”, AIP Conf. Proc. 772, 27th Intern. Conf. on the Physics of Semiconductors, 1537–1538 (2005).