Abstract

The optical linear and nonlinear properties of ~340-nm-thick Si membranes were investigated. The investigation included both experiments in which the reflection and transmission from the membranes were measured, and finite differences time domain simulations. The linear optical transmission of the Si membranes can be controlled by changing the thickness of a thermally grown oxide on the membrane. Illumination of the membranes with high levels of irradiation leads to optical modifications that are consistent with the formation of amorphous silicon and dielectric breakdown. When irradiated under conditions where dielectric breakdown occurs, the membranes can be ablated in a well-controlled manner. Laser micro-structuring of the membranes by ablation was carried out to make micrometer-sized holes by focused fs-pulses. Ns-pulses were also used to fabricate arrays of holes by proximity-ablation of a closely-packed pattern of colloidal particles.

© 2009 Optical Society of America

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  1. M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
    [CrossRef] [PubMed]
  2. W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
    [CrossRef]
  3. C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
    [CrossRef] [PubMed]
  4. B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
    [CrossRef]
  5. S. Tomljenovic-Hanic, A. D. Greentree, C. M. de Sterke, and S. Prawer, "Flexible design of ultrahigh-Q microcavities in diamond-based photonic crystal slabs," Opt. Express 17, 6465-6475 (2009).
    [CrossRef] [PubMed]
  6. D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
    [CrossRef]
  7. J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
    [CrossRef] [PubMed]
  8. N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
    [CrossRef]
  9. R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
    [CrossRef]
  10. J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
    [CrossRef] [PubMed]
  11. J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
    [CrossRef]
  12. O. Schecker, "Nano-contacts for ElectroMagnetic NanoSystems (NEMS)," Ph.D. thesis, Institute of Microelectronics, Electromagnetics, and Photonics, Grenoble, France and University of Konstanz, Konstanz, Germany (2008).
  13. O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89, 101117/1-3 (2006).
    [CrossRef]
  14. B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 - 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
    [CrossRef]
  15. S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
    [CrossRef]
  16. Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).
  17. K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
    [CrossRef] [PubMed]
  18. H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
    [CrossRef]
  19. E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
    [CrossRef]
  20. Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
    [CrossRef]
  21. M. J. Birnbaum, "Semiconductor surface damage produced by ruby lasers," J. Appl. Phys. 36, 3688 - 3689 (1965).
    [CrossRef]
  22. D. Bauerle, Laser processing and chemistry (Springer, Berlin, 2000).
  23. H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
    [CrossRef]
  24. H. Iwase, S. Kokubo, S. Juodkazis, and H. Misawa, "Suppression of ripples on Ni surface via a polarization grating," Opt. Express 17, 4388-4396 (2009).
    [CrossRef] [PubMed]
  25. K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
    [CrossRef]
  26. E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
    [CrossRef]
  27. F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
    [CrossRef]

2009 (2)

2008 (4)

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

2007 (2)

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

2006 (3)

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
[CrossRef] [PubMed]

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

2003 (3)

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
[CrossRef]

2001 (1)

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

1999 (1)

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

1965 (2)

B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 - 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
[CrossRef]

M. J. Birnbaum, "Semiconductor surface damage produced by ruby lasers," J. Appl. Phys. 36, 3688 - 3689 (1965).
[CrossRef]

Bertsch, M.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

Birnbaum, M. J.

M. J. Birnbaum, "Semiconductor surface damage produced by ruby lasers," J. Appl. Phys. 36, 3688 - 3689 (1965).
[CrossRef]

Boneberg, J.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

Bruchhausen, A.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Butschke, J.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Celler, G.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Chan, T. Y. M.

O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89, 101117/1-3 (2006).
[CrossRef]

Choi, W. M.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

de Sterke, C. M.

Deal, B.

B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 - 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
[CrossRef]

Dekorsy, T.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Ehrmann, A.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

El-Ali, J.

J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
[CrossRef] [PubMed]

Erbe, A.

N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
[CrossRef]

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Eriksson, M. A.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Fairchild, B. A.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Fauchet, P. M.

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

Friesen, M.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Fujita, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Gaborski, T. R.

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

Gamaly, E. E.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Gibson, B. C.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Girvin, S. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Greentree, A. D.

S. Tomljenovic-Hanic, A. D. Greentree, C. M. de Sterke, and S. Prawer, "Flexible design of ultrahigh-Q microcavities in diamond-based photonic crystal slabs," Opt. Express 17, 6465-6475 (2009).
[CrossRef] [PubMed]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Grove, A. S.

B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 - 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
[CrossRef]

Guhr, D. C.

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

Hallo, L.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Harris, J. G. E.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Hashida, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Haugeneder, E.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Huang, Y. Y.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

Hudert, F.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Huntington, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Huntzinger, J.-R.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Irmscher, M.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Issenmann, D.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Iwase, H.

Izawa, Y.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Jamieson, D. N.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Jayich, A. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Jensen, K. F.

J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
[CrossRef] [PubMed]

Jiang, H.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

John, S.

O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89, 101117/1-3 (2006).
[CrossRef]

Juodkazis, S.

H. Iwase, S. Kokubo, S. Juodkazis, and H. Misawa, "Suppression of ripples on Ni surface via a polarization grating," Opt. Express 17, 4388-4396 (2009).
[CrossRef] [PubMed]

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

K¨asmaier, R.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Kang, N.

N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
[CrossRef]

Khang, D.-Y.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

Klein, L. J.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Kokubo, S.

Kragler, K.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Kudryashov, I.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

L¨oschner, H.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Lagally, M. G.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Leiderer, P.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

Letzkus, F.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Luther-Davies, B.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

M¨unzer, H.-J.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

Marquardt, F.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Mathuni, J.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Matsuo, S.

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

McGrath, J. L.

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

Misawa, H.

H. Iwase, S. Kokubo, S. Juodkazis, and H. Misawa, "Suppression of ripples on Ni surface via a polarization grating," Opt. Express 17, 4388-4396 (2009).
[CrossRef] [PubMed]

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

Mizeikis, V.

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Mlayah, A.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

More, R. M.

H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
[CrossRef]

Morikami, H.

H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
[CrossRef]

Mosbacher, M.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

Nagai, H.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Nicolai, P.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Nishimura, K.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Olivero, P.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Prawer, S.

S. Tomljenovic-Hanic, A. D. Greentree, C. M. de Sterke, and S. Prawer, "Flexible design of ultrahigh-Q microcavities in diamond-based photonic crystal slabs," Opt. Express 17, 6465-6475 (2009).
[CrossRef] [PubMed]

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Rangelow, I. W.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Rettinger, D.

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

Reuter, C.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Roberts, M. M.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Rogers, J. A.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

Rubanov, S.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Sasaki, K.

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

Sasaki, R.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Savage, D. E.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Schecker, O.

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
[CrossRef]

Scheer, E.

R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
[CrossRef]

N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
[CrossRef]

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Setsuhara, Y.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Shi, F.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Shibuya, T.

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Slinker, K. A.

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Smith, B. A.

S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
[CrossRef]

Smith, J. M.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Song, J.

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

Sorger, P. K.

J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
[CrossRef] [PubMed]

Springer, R.

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Striemer, C. C.

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

Taylor, R. A.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Thompson, J. D.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Tikhonchuk, V.

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Toader, O.

O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89, 101117/1-3 (2006).
[CrossRef]

Tomljenovic-Hanic, S.

Tuzhilin, D.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

Ueda, K.-I.

H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
[CrossRef]

Ueno, K.

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

Vanagas, E.

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

Vitale, S. A.

S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
[CrossRef]

Waitz, R.

R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
[CrossRef]

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

Waldermann, F.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Walmsley, I.

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Yamasaki, K.

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

Yokota, Y.

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

Yoneda, H.

H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
[CrossRef]

Yoshida, M.

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

Zimmermann, J.

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

Zwickl, B. M.

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Adv. Mat. (1)

B. A. Fairchild, P. Olivero, S. Rubanov, A. D. Greentree, F. Waldermann, R. A. Taylor, I. Walmsley, J. M. Smith, S. Huntington, B. C. Gibson, D. N. Jamieson, and S. Prawer, "Fabrication of Ultrathin Single-Crystal Diamond Membranes," Adv. Mat. 20, 4793-4798 (2008).
[CrossRef]

Appl. Phys. A (1)

K. Yamasaki, S. Juodkazis, S. Matsuo, and H. Misawa, "Three-dimensional microchannels in polymers: one step fabrication," Appl. Phys. A 77, 371-373 (2003).
[CrossRef]

Appl. Phys. Lett. (1)

E. Vanagas, I. Kudryashov, D. Tuzhilin, S. Juodkazis, S. Matsuo, and H. Misawa, "Surface nanostructuring of borosilicate glass by femtosecond nJ energy pulses," Appl. Phys. Lett. 82, 2901-2903 (2003).
[CrossRef]

J. Am. Chem. Soc. (1)

K. Ueno, S. Juodkazis, T. Shibuya, Y. Yokota, V. Mizeikis, K. Sasaki, and H. Misawa, "Nanoparticle plasmonassisted two-photon photolymerization induced by incoherent excitation source," J. Am. Chem. Soc. 130, 6928- 6929 (2008).
[CrossRef] [PubMed]

J. Appl. Phys. (2)

B. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys. 36, 3770 - 3778 (1965); online calculator at http://ee.byu.edu/cleanroom/OxideThickCalc.phtml.
[CrossRef]

M. J. Birnbaum, "Semiconductor surface damage produced by ruby lasers," J. Appl. Phys. 36, 3688 - 3689 (1965).
[CrossRef]

J. Microscopy (1)

H.-J. M¨unzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, and J. Boneberg, "Local field enhancement effects for nanostructuring of surfaces," J. Microscopy 202, 129-135 (2001).
[CrossRef]

J. Nanophoton. (1)

Y. Yokota, K. Ueno, V. Mizeikis, S. Juodkazis, K. Sasaki, and H. Misawa, "Optical characterization of plasmonic metallic nanostructures fabricated by high-resolution lithography," J. Nanophoton. 1, 594 (2008).

J. Vac. Sci. Technol. B (1)

S. A. Vitale and B. A. Smith, "Reduction of silicon recess caused by plasma oxidation during high-density plasma polysilicon gate etching," J. Vac. Sci. Technol. B 21, 2205-2211 (2003).
[CrossRef]

NanoLetters (1)

W. M. Choi, J. Song, D.-Y. Khang, H. Jiang, Y. Y. Huang, and J. A. Rogers, "Biaxially stretchable "wavy" silicon nanomembranes," NanoLetters 7, 1655-1663 (2007).
[CrossRef]

Nature (3)

C. C. Striemer, T. R. Gaborski, J. L. McGrath, and P. M. Fauchet, "Charge- and size-based separation of macromolecules using ultrathin silicon membranes," Nature 445, 749-753 (2007).
[CrossRef] [PubMed]

J. El-Ali, P. K. Sorger, and K. F. Jensen, "Cells on chips", Nature 442, 403 - 411 (2006).
[CrossRef] [PubMed]

J. D. Thompson, B. M. Zwickl, A. M. Jayich, F. Marquardt, S. M. Girvin, and J. G. E. Harris, "Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane," Nature 452, 72 - 75 (2008).
[CrossRef] [PubMed]

Nature Materials (1)

M. M. Roberts, L. J. Klein, D. E. Savage, K. A. Slinker, M. Friesen, G. Celler, M. A. Eriksson, and M. G. Lagally, "Elastically relaxed free-standing strained-silicon nanomembranes," Nature Materials 5, 388-393 (2006).
[CrossRef] [PubMed]

Opt. Express (2)

Phys. Rev. B (1)

E. E. Gamaly, S. Juodkazis, K. Nishimura, H. Misawa, B. Luther-Davies, L. Hallo, P. Nicolai, and V. Tikhonchuk, "Laser-matter interaction in a bulk of a transparent solid: confined micro-explosion and void formation," Phys. Rev. B 73, 214101 (2006).
[CrossRef]

Proc. SPIE (1)

J. Butschke, A. Ehrmann, E. Haugeneder, M. Irmscher, R. K¨asmaier, K. Kragler, F. Letzkus, H. L¨oschner, J. Mathuni, I. W. Rangelow, C. Reuter, F. Shi, and R. Springer, "PN and SOI wafer flow process for stencil mask fabrication," Proc. SPIE 3665, 20 - 29 (1999).
[CrossRef]

Other (9)

O. Schecker, "Nano-contacts for ElectroMagnetic NanoSystems (NEMS)," Ph.D. thesis, Institute of Microelectronics, Electromagnetics, and Photonics, Grenoble, France and University of Konstanz, Konstanz, Germany (2008).

O. Toader, T. Y. M. Chan, and S. John, "Diamond photonic band gap synthesis by umbrella holographic lithography," Appl. Phys. Lett. 89, 101117/1-3 (2006).
[CrossRef]

D. C. Guhr, D. Rettinger, J. Boneberg, A. Erbe, P. Leiderer, and E. Scheer, "Influence of laser light on electronic transport through atomic-size contacts," Phys. Rev. Lett. 99, 086801/1-4 (2007).
[CrossRef]

H. Morikami, H. Yoneda, K.-I. Ueda, and R. M. More, "Detection of hydrodynamic expansion in ultrashort pulse laser ellipsometric pump-probe experiments," Phys. Rev. E 70, 035401R/1-3 (2004).
[CrossRef]

N. Kang, A. Erbe, and E. Scheer, "Electrical characterization of DNA in mechanically controlled breakjunctions," New J. Phys. 10, 023030/1-9 (2008).
[CrossRef]

R. Waitz, O. Schecker, and E. Scheer, "Nanofabricated adjustable multicontact devices on membranes," Rev. Sci. Instrum. 79, 093901/1 -5 (2008).
[CrossRef]

Y. Izawa, Y. Izawa, Y. Setsuhara, M. Hashida, M. Fujita, R. Sasaki, H. Nagai, and M. Yoshida, "Ultrathin amorphous Si layer formation by femtosecond laser pulse irradiation," Appl. Phys. Lett. 90, 044107/1-2 (2007).
[CrossRef]

D. Bauerle, Laser processing and chemistry (Springer, Berlin, 2000).

F. Hudert, A. Bruchhausen, D. Issenmann, O. Schecker, R. Waitz, A. Erbe, E. Scheer, T. Dekorsy, A. Mlayah, and J.-R. Huntzinger, "Confined longitudinal acoustic phonon modes in free-standing Si membranes coherently excited by femtosecond laser pulses," Phys. Rev. B 79, 201307R/1 - 4 (2009).
[CrossRef]

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Figures (6)

Fig. 1.
Fig. 1.

(a) Schematics of sample (not to scale) and an optical image of a 0.6×0.6 mm2 oxidized Si-membrane. The linear transmission, T, and reflection, R, spectra of the oxidized (b) and as made silicon membranes (b); thicknesses were SiO2/Si/SiO2 of 120/220/120 nm (a) and Si of 340 nm (c), respectively. The spectra (1) and (2) were measured on different membranes. The FDTD calculations were carried out in a plane wave geometry. The experimental FT-IR reflection spectra were normalized to the reflection from gold; the transmission was normalized to that of air. Spectra were measured for an area of 20×20 µm2. Note, the scales on the x-axes of the graphs are logarithmic in order to better resolve transmission oscillations.

Fig. 2.
Fig. 2.

The light intensity distribution across a SiO2/Si/SiO2 (120/220/120 nm; marked by dashed lines) membrane simulated by 3D-FDTD algorithm for a Gaussian beam focused by an objective lens of numerical aperture NA=0.5 (the same NA as in actual FT-IR measurements shown in Fig. 1). The wavelength is approximately 800 nm (374.57 THz). The arrow marks the direction of polarization of the light source E(0,0,1); The propagation direction was along the wavevector k. The contour lines at intensity levels I=0.5;1 are highlighted.

Fig. 3.
Fig. 3.

The transmission, T , and reflection, R , of a SiO2/Si/SiO2 (120/220/120 nm) membrane in single and multi-pulse exposure regimes. The lines are drawn as eye guides; the shadowed regions mark the irradiance range where strong structural modifications occurred. The multi-pulse data at the smallest irradiance have been normalized to the values measured in the case on single-pulse irradiation. The inset shows a combined optical and SEM image of the multiply irradiated region on a membrane above damage threshold.

Fig. 4.
Fig. 4.

SEM images of holes ablated in a Si membrane by 20 pulses. Focusing was carried out by an objective lens of NA=0.9.

Fig. 5.
Fig. 5.

The near-field intensity distribution of a plane wave E(0,0,1) propagating through a 4.3-µm silica sphere on a 350 nm Si-membrane for E 2 z (a) and E 2 y (b) components; simulations were carried out by a 3D-FDTD algorithm and intensity is plotted on a logscale. The wavelength of the plane wave was 532 nm. The outline of the sphere and the Si-membrane are marked; the contour lines at intensity level E 2 z,y =1 are also highlighted.

Fig. 6.
Fig. 6.

(a) SEM images of the ablation patterns on a 340-nm-thick Si-membrane. Ablation was carried out by 532nm/10 ns pulses of different pulse energies using 4.3-µm silica spheres dispersed over membrane. (b) Through-hole punched in the membrane.

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