Abstract

We demonstrate high confinement, low-loss silicon nitride ring resonators with intrinsic quality factor (Q) of 3∗106 operating in the telecommunication C-band. We measure the scattering and absorption losses to be below 0.065dB/cm and 0.055dB/cm, respectively.

© 2009 Optical Society of America

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References

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  1. K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
    [Crossref]
  2. J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
    [Crossref]
  3. S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
    [Crossref]
  4. A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001).
    [Crossref]
  5. N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
    [Crossref]
  6. C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
    [Crossref]
  7. K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
    [Crossref]
  8. L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
    [Crossref]
  9. M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
    [Crossref]
  10. J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).
  11. E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).
  12. A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
    [Crossref]
  13. V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
    [Crossref]
  14. M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
    [Crossref]
  15. P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
    [Crossref]

2008 (4)

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

2007 (3)

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref]

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

2005 (3)

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
[Crossref]

2004 (1)

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

2003 (1)

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref]

2001 (1)

A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001).
[Crossref]

Adibi, A.

E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).

Aimez, V.

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

Alic, N.

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

Almeida, V. R.

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref]

Alvarez, J.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Barclay, P.

P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
[Crossref]

Barrios, C. A.

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Bellutti, P.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Borselli, M.

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref]

Bouville, D.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Casquel, R.

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Cassan, E.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Charette, P.

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

Chatelain, F.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Cluzel, B.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Colas, G.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Crivellari, M.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Daldosso, N.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

de Fornel, F.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Delamadeleine, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Dérouard, J.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Esherick, P.

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Fainman, Y.

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

Fedeli, J.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Foubert, K.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Fuchs, A.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Gaugiran, S.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Gétin, S.

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

Gorin, A.

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

Griol, A.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Grondin, E.

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

Guo, J.

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Gylfason, K. B.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Habermehl, S.

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

Hadji, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Hadley, G. R.

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Hill, D.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Holgado, M.

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Hurtado, J.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Ikeda, K.

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

Jaouad, A.

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

Johnson, T. J.

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref]

Knights, A. P.

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

Kompocholis, C.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Lalouat, L.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Lipson, M.

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref]

Lui, A.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Marris-Morini, D.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Mascher, P.

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

Melchiorri, M.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Milgram, J. N.

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

Painter, O.

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref]

P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
[Crossref]

Panepucci, R. R.

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref]

Pavesi, L.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Peyrade, D.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Picard, E.

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

Pucker, G.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Riboli, F.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Sánchez, B.

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Saperstein, R. E.

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

Sbrana, F.

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Serpengüzel, A.

A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001).
[Crossref]

Shah Hosseini, E.

E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).

Shaw, M.

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

Shaw, M. J.

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Sohlström, H.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

Soltani, M.

E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).

Srinivasan, K.

P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
[Crossref]

Sullivan, C.

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

Sullivan, C. T.

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Vawter, A.

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

Vawter, G. A.

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

Vivien, L.

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

Wojcik, J.

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

Yegnanarayanan, S.

E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).

Appl. Phys. Lett. (1)

K. Foubert, L. Lalouat, B. Cluzel, E. Picard, D. Peyrade, E. Delamadeleine, F. de Fornel, and E. Hadji, “Nearfield modal microscopy of subwavelength light confinement in multimode silicon slot waveguides,” Appl. Phys. Lett. 93(25), 251103 (2008).
[Crossref]

J. Opt. Soc. Am. B (1)

A. Serpengüzel, “Amorphous silicon nitride microcavities,” J. Opt. Soc. Am. B 18(7), 989–993 (2001).
[Crossref]

Mater. Sci. Semicond. Process. (1)

N. Daldosso, M. Melchiorri, F. Riboli, F. Sbrana, L. Pavesi, G. Pucker, C. Kompocholis, M. Crivellari, P. Bellutti, and A. Lui, “Fabrication and optical characterization of thin two-dimensional Si 3N4 waveguides,” Mater. Sci. Semicond. Process. 7(4–6), 453–458 (2004).
[Crossref]

Opt. Express (7)

C. A. Barrios, B. Sánchez, K. B. Gylfason, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Demonstration of slot-waveguide structures on silicon nitride/silicon oxide platform,” Opt. Express 15(11), 6846–6856 (2007).
[Crossref]

K. Ikeda, R. E. Saperstein, N. Alic, and Y. Fainman, “Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/silicon dioxide waveguides,” Opt. Express 16(17), 12987–12994 (2008).
[Crossref]

J. N. Milgram, J. Wojcik, P. Mascher, and A. P. Knights, “Optically pumped Si nanocrystal emitter integrated with low loss silicon nitride waveguides,” Opt. Express 15(22), 14679–14688 (2007).
[Crossref]

S. Gaugiran, S. Gétin, J. Fedeli, G. Colas, A. Fuchs, F. Chatelain, and J. Dérouard, “Optical manipulation of microparticles and cells on silicon nitride waveguides,” Opt. Express 13(18), 6956–6963 (2005).
[Crossref]

L. Vivien, D. Marris-Morini, A. Griol, K. B. Gylfason, D. Hill, J. Alvarez, H. Sohlström, J. Hurtado, D. Bouville, and E. Cassan, “Vertical multiple-slot waveguide ring resonators in silicon nitride,” Opt. Express 16(22), 17237–17242 (2008).
[Crossref]

A. Gorin, A. Jaouad, E. Grondin, V. Aimez, and P. Charette, “Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties,” Opt. Express 16(18), 13509–13516 (2008).
[Crossref]

P. Barclay, K. Srinivasan, and O. Painter, “Nonlinear response of silicon photonic crystal microresonators excited via an integrated waveguide and fiber taper,” Opt. Express 13(3), 801–820 (2005).
[Crossref]

Opt. Lett. (2)

V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett. 28(15), 1302–1304 (2003).
[Crossref]

M. Borselli, T. J. Johnson, and O. Painter, “Accurate measurement of scattering and absorption loss in microphotonic devices,” Opt. Lett. 32(20), 2954–2956 (2007).
[Crossref]

Proc. SPIE (1)

M. Shaw, J. Guo, A. Vawter, S. Habermehl, and C. Sullivan, “Fabrication techniques for low loss silicon nitride waveguides,” Proc. SPIE 5720, 109 (2005).
[Crossref]

Other (2)

J. Guo, M. J. Shaw, G. A. Vawter, P. Esherick, G. R. Hadley, and C. T. Sullivan, “High-Q integrated on-chip micro-ring resonator,” in Proc. 17th Annu. Meeting IEEE/LEOS , 2, pp. 745, (2004).

E. Shah Hosseini, S. Yegnanarayanan, M. Soltani, and A. Adibi, “Ultra-High Quality Factor Microdisk Resonators for Chip-Scale Visible Integrated Photonics,” in Frontiers in Optics , FMG4 (2008).

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Figures (4)

Fig. 1.
Fig. 1.

Transmission spectrum of multiple 40 µm diameter rings coupled to a waveguide. Inset, high resolution spectrum of a 1.5∗106 coupled Q ring, 5.4∗106 intrinsic Q, 0.065 dB/cm loss in ring.

Fig. 2.
Fig. 2.

(a) A series of ring resonators coupled to a single waveguide. The resonators have slightly different radii to distinguish their transmission spectra. (b) SEM micrograph of scattering defects (vertical bars) across a ring resonator inserted to separately measure scattering and absorption losses.

Fig. 3.
Fig. 3.

Shift in the transmission spectra of a waveguide coupled ring with increasing coupled power. Input laser power heats the ring, causing an increase in the refractive index and in turn shifts in the resonance spectrum. The laser power is not sufficient to cause nonlinear absorption hence the Q of the ring does not change, as is evident by the constant extinction ratio across all coupled powers.

Fig. 4.
Fig. 4.

Shift of ring resonance at different coupled power. Rings with scattering defects absorb less of the coupled power and hence have small resonance shift.

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