Abstract

Frequency mismatch in high-order microring-resonator filters is investigated. We demonstrate that this frequency mismatch is caused mainly by the intrafield distortion of scanning-electron-beam-lithography (SEBL) used in fabrication. The intrafield distortion of an SEBL system is measured, and a simple method is also proposed to correct this distortion. By applying this correction method, the average frequency mismatch in second-order microring-resonator filters was reduced from -8.6GHz to 0.28 GHz.

© 2008 Optical Society of America

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  1. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
    [CrossRef]
  2. A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
    [CrossRef]
  3. Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-?m radius," Opt. Express 16, 4309 (2008).
    [CrossRef]
  4. J. V. Hryniewicz, Member, IEEE, P. P. Absil, B. E. Little, Member, IEEE, R. A. Wilson, and P.-T. Ho, "Higher-order filter response in coupled microring resonators," IEEE Photon. Technol. Lett. 12, 320-322 (2000).
    [CrossRef]
  5. Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
    [CrossRef]
  6. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
    [CrossRef]
  7. H. I. Smith, T. Barwicz, C. W. Holzwarth, M. A. Popovi??, M. R. Watts, P. T. Rakich, M. Qi, R. Barreto, F. X. Kärtner and E. P. Ippen, "Strategies for fabricating strong-confinement microring filters and circuits," in Optical Fiber Communication Conference (OFC/NFOEC), Technical Digest (CD) (Optical Society of America, 2007), paper OThC2, http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2007-OThC2
  8. T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
    [CrossRef]
  9. T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
    [CrossRef]
  10. S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).
  11. M. R. Watts, T. Barwicz, M. A. Popovi??, P. T. Rakich, L. Socci, E. P. Ippen, H. I. Smith, and F.X. Kärtner, "Microring-resonator filter with doubled free-spectral-range by two-point coupling," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CMP3 http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2005-CMP3
  12. C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
    [CrossRef]
  13. E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
    [CrossRef]
  14. J. G. Goodberlet, J. T. Hastings, and H. I. Smith, "Performance of the Raith 150 electron-beam lithography system," J. Vac. Sci. Technol. B 19, 2499-2502 (2001).
    [CrossRef]

2008 (1)

2007 (1)

S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).

2006 (2)

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

2004 (1)

2003 (1)

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

2002 (1)

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

2001 (1)

J. G. Goodberlet, J. T. Hastings, and H. I. Smith, "Performance of the Raith 150 electron-beam lithography system," J. Vac. Sci. Technol. B 19, 2499-2502 (2001).
[CrossRef]

2000 (1)

J. V. Hryniewicz, Member, IEEE, P. P. Absil, B. E. Little, Member, IEEE, R. A. Wilson, and P.-T. Ho, "Higher-order filter response in coupled microring resonators," IEEE Photon. Technol. Lett. 12, 320-322 (2000).
[CrossRef]

1998 (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

1997 (1)

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

1991 (1)

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Anderson, E. H.

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Barwicz, T.

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

Beausoleil, R. G.

Boegli, V.

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Bolivar, P. H.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Chu, S. T.

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Fattal, D.

Foresi, J.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Foresi, J. S.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Goodberlet, J. G.

J. G. Goodberlet, J. T. Hastings, and H. I. Smith, "Performance of the Raith 150 electron-beam lithography system," J. Vac. Sci. Technol. B 19, 2499-2502 (2001).
[CrossRef]

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Hastings, J. T.

J. G. Goodberlet, J. T. Hastings, and H. I. Smith, "Performance of the Raith 150 electron-beam lithography system," J. Vac. Sci. Technol. B 19, 2499-2502 (2001).
[CrossRef]

Haus, H. A.

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Henschel, W.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Holzwarth, C. W.

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

Hryniewicz, J. V.

J. V. Hryniewicz, Member, IEEE, P. P. Absil, B. E. Little, Member, IEEE, R. A. Wilson, and P.-T. Ho, "Higher-order filter response in coupled microring resonators," IEEE Photon. Technol. Lett. 12, 320-322 (2000).
[CrossRef]

Ippen, E. P.

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Kärtner, F. X.

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

Kern, D.

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Khan, M. H.

S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).

Kimerling, L. C.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Kokubun, Y.

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

Kurz, H.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Laine, J. P.

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Little, B. E.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

Mönster, M.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Popovi??, M. A.

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

Qi, M.

S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).

Rakich, P. T.

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

Rakich,, P. T.

Schattenburg, M. L.

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Shen, H.

S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).

Smith, H. I.

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

J. G. Goodberlet, J. T. Hastings, and H. I. Smith, "Performance of the Raith 150 electron-beam lithography system," J. Vac. Sci. Technol. B 19, 2499-2502 (2001).
[CrossRef]

E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
[CrossRef]

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Suzuki, S.

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

Theon, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
[CrossRef]

Vörckel, A.

A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
[CrossRef]

Watts, M. R.

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

T. Barwicz, M. A. Popovi??. P. T. Rakich,M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: fabrication and analysis," Opt. Express 12, 1437 (2004).
[CrossRef]

Xiao, S.

S. Xiao, M. H. Khan, H. Shen, and M. Qi, "Compact silicon microring resonators with ultra-low propagation loss in the C band," Opt. Express 15, 11467 (2007).

Xu, Q.

Yanagase, Y.

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

IEEE J. Lightwave Technol. (3)

Y. Yanagase, S. Suzuki, Y. Kokubun and S. T. Chu, "Box-like filter response and expansion of FSR by a vertically triple coupled microring resonator filter," IEEE J. Lightwave Technol. 20, 1525-1529 (2002).
[CrossRef]

B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J. P. Laine, "Microring resonator channel dropping filters," IEEE J. Lightwave Technol. 15, 998-1005 (1997).
[CrossRef]

T. Barwicz, M. A. Popovi??, M. R. Watts, P. T. Rakich, E. P. Ippen and H. I. Smith, "Fabrication of Add-Drop Filters Based on Frequency-Matched Microring Resonators," IEEE J. Lightwave Technol. 24, 2207-2218 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (3)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Theon, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-511 (1998).
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A. Vörckel, M. Mönster, W. Henschel, P. H. Bolivar, and H. Kurz, "Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop mutiplexers," IEEE Photon. Technol. Lett. 15, 921-923 (2003).
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J. V. Hryniewicz, Member, IEEE, P. P. Absil, B. E. Little, Member, IEEE, R. A. Wilson, and P.-T. Ho, "Higher-order filter response in coupled microring resonators," IEEE Photon. Technol. Lett. 12, 320-322 (2000).
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J. Vac. Sci. Technol. B (3)

C. W. Holzwarth, T. Barwicz, M. A. Popovi??, P. T. Rakich, E. P. Ippen, F. X. Kärtner, and H. I. Smith, "Accurate resonant frequency spacing of microring filters without postfabrication trimming," J. Vac. Sci. Technol. B 24, 3244-3247 (2006).
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E. H. Anderson, V. Boegli, M. L. Schattenburg, D. Kern, H. I. Smith, "Metrology of electron-beam lithography systems using holographically produced reference samples," J. Vac. Sci. Technol. B 9, 3606-3610 (1991).
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Opt. Express (3)

Other (2)

M. R. Watts, T. Barwicz, M. A. Popovi??, P. T. Rakich, L. Socci, E. P. Ippen, H. I. Smith, and F.X. Kärtner, "Microring-resonator filter with doubled free-spectral-range by two-point coupling," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optical Society of America, 2005), paper CMP3 http://www.opticsinfobase.org/abstract.cfm?URI=CLEO-2005-CMP3

H. I. Smith, T. Barwicz, C. W. Holzwarth, M. A. Popovi??, M. R. Watts, P. T. Rakich, M. Qi, R. Barreto, F. X. Kärtner and E. P. Ippen, "Strategies for fabricating strong-confinement microring filters and circuits," in Optical Fiber Communication Conference (OFC/NFOEC), Technical Digest (CD) (Optical Society of America, 2007), paper OThC2, http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2007-OThC2

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