S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A.-S. Morlens, P. Balcou, P. Zeitoun, C. Valentin, V. Laude, and S. Kazamias, “Compression of attosecond harmonic pulses by extreme-ultraviolet chirped mirrors,” Opt. Lett. 30, 1554–1556 (2005).
[Crossref]
[PubMed]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
I. L. Beigman, A. S. Pirozhkov, and E. N. Ragozin, “Reflection of few-cycle x-ray pulses by aperiodic multilayer structures,” J. Opt. A 4, 433–439 (2002).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A. Wonisch, Th. Westerwalbesloh, W. Hachmann, and N. Kabachnik, “Aperiodic nanometer multilayer systems as optical key components for attosecond electron spectroscopy,” Thin Solid Films 464–465, 473–477 (2004).
[Crossref]
B. A. M. Hansson and H. M. Hertz, “Liquid-jet laser-plasma extreme ultraviolet sources: from droplets to filaments,” J. Phys. D: Appl. Phys. 37, 3233–3243 (2004).
[Crossref]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
B. A. M. Hansson and H. M. Hertz, “Liquid-jet laser-plasma extreme ultraviolet sources: from droplets to filaments,” J. Phys. D: Appl. Phys. 37, 3233–3243 (2004).
[Crossref]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
J. Hollensheada and L. Klebanoff, “Modeling radiation-induced carbon contamination of extreme ultraviolet optics,” J. Vac. Sci. Technol. B 24, 64–82 (2006).
[Crossref]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
A. Wonisch, Th. Westerwalbesloh, W. Hachmann, and N. Kabachnik, “Aperiodic nanometer multilayer systems as optical key components for attosecond electron spectroscopy,” Thin Solid Films 464–465, 473–477 (2004).
[Crossref]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A.-S. Morlens, P. Balcou, P. Zeitoun, C. Valentin, V. Laude, and S. Kazamias, “Compression of attosecond harmonic pulses by extreme-ultraviolet chirped mirrors,” Opt. Lett. 30, 1554–1556 (2005).
[Crossref]
[PubMed]
J. Hollensheada and L. Klebanoff, “Modeling radiation-induced carbon contamination of extreme ultraviolet optics,” J. Vac. Sci. Technol. B 24, 64–82 (2006).
[Crossref]
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47, 2906–2914 (2008).
[Crossref]
[PubMed]
M. Suman, F. Frassetto, P. Nicolosi, and M.-G. Pelizzo, “Design of a-periodic multilayer structures for attosecond pulses in the EUV,” Appl. Opt. 46, 8159–8169 (2007).
[Crossref]
[PubMed]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
I. L. Beigman, A. S. Pirozhkov, and E. N. Ragozin, “Reflection of few-cycle x-ray pulses by aperiodic multilayer structures,” J. Opt. A 4, 433–439 (2002).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
I. L. Beigman, A. S. Pirozhkov, and E. N. Ragozin, “Reflection of few-cycle x-ray pulses by aperiodic multilayer structures,” J. Opt. A 4, 433–439 (2002).
[Crossref]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
S. Bajt, J.B. Alameda, T. W. Barbee, W. M. Clift, J. A. Folta, B. B. Kaufmann, and E. A. Spiller, “Improved reflectance and stability of Mo/Si multilayers,” Opt. Eng. 41, 1797–1804 (2002).
[Crossref]
M. E. Malinowski, C. Steinhaus, W. M. Clift, L. E. Klebanoff, S. Mrowka, and R. Soufli “Controlling contamination in Mo/Si mutilayer mirrors by Si surface capping modifications,” Proc. SPIE 4688, 442–453 (2002).
[Crossref]
M. Suman, M. G. Pelizzo, P. Nicolosi, and D. L. Windt, “Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography,” Appl. Opt. 47, 2906–2914 (2008).
[Crossref]
[PubMed]
M. Suman, F. Frassetto, P. Nicolosi, and M.-G. Pelizzo, “Design of a-periodic multilayer structures for attosecond pulses in the EUV,” Appl. Opt. 46, 8159–8169 (2007).
[Crossref]
[PubMed]
S. B. Hill, I. Ermanoski, C. Tarrio, T. B. Lucatorto, T. E. Madey, S. Bajt, M. Fang, and M. Chandhok “Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors,” Proc. SPIE 6517, 65170G (2007).
[Crossref]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
K. Motai, H. Oizumi, S. Miyagaki, I. Nishiyama, A. Izumi, T. Ueno, Y. Miyazaki, and A. Namiki., “Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror,” Proc. SPIE 6517, 65170F1–65170F8 (2007).
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
A. Wonisch, U. Neuhusler, N. M. Kabachnik, T. Uphues, M. Uiberacker, V. Yakovlev, F. Krausz, M. Drescher, U. Kleineberg, and U. Heinzmann, “Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses,” Appl. Opt. 45, 4147–4156 (2006).
[Crossref]
[PubMed]
A. S. Morlens, R. López-Martens, O. Boyko, P. Zeitoun, P. Balcou, K. Varj, E. Gustafsson, T. Remetter, A. L’Huillier, S. Kazamias, J. Gautier, F. Delmotte, and M.-F. Ravet, “Design and characterization of extreme-ultraviolet broadband mirrors for attosecond science,” Opt. Lett. 31, 1558–1560 (2006).
[Crossref]
[PubMed]
S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards “Oxidation resistance of Ru-capped EUV multilayers,” Proc. SPIE 5751, 118–127 (2005).
[Crossref]
Z. S. Wang, H. C. Wang, J. T. Zhu, F. L. Wang, Z. X. Gu, L. Y. Chen, A. G. Michette, A. K. Powell, S. J. Pfauntsch, and F. Schäfers, “Broad angular multilayer analyzer for soft X-rays,” Opt. Express 14, 2533–2538 (2006).
[Crossref]
[PubMed]
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