Abstract

We present experimental results on photonic crystal/photonic wire micro-cavity structures that demonstrate further enhancement of the quality-factor (Q-factor) - up to approximately 149,000 - in the fibre telecommunications wavelength range. The Q-values and the useful transmission levels achieved are due, in particular, to the combination of both tapering within and outside the micro-cavity, with carefully designed hole diameters and non-periodic hole placement within the tapered section. Our 2D Finite Difference Time Domain (FDTD) simulation approach shows good agreement with the experimental results.

© 2008 Optical Society of America

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  1. Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.
  2. Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
    [CrossRef]
  3. Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
    [CrossRef]
  4. E. A. Camargo, H. M. H. Chong, and R. M. De La Rue, ‘Highly compact asymmetric Mach-Zehnder device based on channel guides in a two-dimensional photonic crystal,’ Appl. Opt.,  45, pp. 6507–6510, 1st Sept (2006).
    [CrossRef] [PubMed]
  5. E.A. Camargo, H.M.H. Chong, and R.M. De La Rue, ‘Four-port coupled channel-guide device based on 2D photonic crystal structure,’ Photonics and Nanostructures - Fundamentals and Applications, 2 (3), pp 207–213, December (2004).
  6. Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).
  7. H. M. H. Chong and R. M. De La Rue, ‘Tuning of photonic crystal waveguide microcavity by thermooptic effect,’ IEEE Photon. Technol. Lett.,  16, no. 6, pp. 1528–1530, Jun. 2004.
    [CrossRef]
  8. M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
    [CrossRef]
  9. T. F. Krauss and R. M. De La Rue, ‘Photonic crystals in the optical regime—Past, present and future,’ Progress Quantum Electron., vol. 23, no. 2, pp. 51–96, Mar. 1999.
    [CrossRef]
  10. M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
    [CrossRef]
  11. M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
    [CrossRef]
  12. J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)
  13. P. Lalanne and J. P. Hugonin, ‘Bloch-wave engineering for high-Q, small-V microcavities,’ IEEE J. Quantum Electron.,  39, no. 11, pp. 1430–1438, Nov. 2003.
    [CrossRef]
  14. C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
    [CrossRef]
  15. T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
    [CrossRef] [PubMed]
  16. P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
    [CrossRef]
  17. P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.
  18. Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
    [CrossRef]
  19. B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

2008 (2)

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

2007 (2)

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

2006 (4)

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
[CrossRef] [PubMed]

E. A. Camargo, H. M. H. Chong, and R. M. De La Rue, ‘Highly compact asymmetric Mach-Zehnder device based on channel guides in a two-dimensional photonic crystal,’ Appl. Opt.,  45, pp. 6507–6510, 1st Sept (2006).
[CrossRef] [PubMed]

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

2005 (3)

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
[CrossRef]

2004 (1)

H. M. H. Chong and R. M. De La Rue, ‘Tuning of photonic crystal waveguide microcavity by thermooptic effect,’ IEEE Photon. Technol. Lett.,  16, no. 6, pp. 1528–1530, Jun. 2004.
[CrossRef]

2003 (2)

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

P. Lalanne and J. P. Hugonin, ‘Bloch-wave engineering for high-Q, small-V microcavities,’ IEEE J. Quantum Electron.,  39, no. 11, pp. 1430–1438, Nov. 2003.
[CrossRef]

2002 (1)

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

1999 (1)

T. F. Krauss and R. M. De La Rue, ‘Photonic crystals in the optical regime—Past, present and future,’ Progress Quantum Electron., vol. 23, no. 2, pp. 51–96, Mar. 1999.
[CrossRef]

1997 (1)

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Akahane, Y.

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

Armenise, Mario

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Asano, T.

T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
[CrossRef] [PubMed]

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

Baba, T.

Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
[CrossRef]

Camargo, E. A.

Camargo, E.A.

E.A. Camargo, H.M.H. Chong, and R.M. De La Rue, ‘Four-port coupled channel-guide device based on 2D photonic crystal structure,’ Photonics and Nanostructures - Fundamentals and Applications, 2 (3), pp 207–213, December (2004).

Camargo, Edilson

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Charvolin, T.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Chong, H. M. H.

E. A. Camargo, H. M. H. Chong, and R. M. De La Rue, ‘Highly compact asymmetric Mach-Zehnder device based on channel guides in a two-dimensional photonic crystal,’ Appl. Opt.,  45, pp. 6507–6510, 1st Sept (2006).
[CrossRef] [PubMed]

H. M. H. Chong and R. M. De La Rue, ‘Tuning of photonic crystal waveguide microcavity by thermooptic effect,’ IEEE Photon. Technol. Lett.,  16, no. 6, pp. 1528–1530, Jun. 2004.
[CrossRef]

Chong, H.M.H.

E.A. Camargo, H.M.H. Chong, and R.M. De La Rue, ‘Four-port coupled channel-guide device based on 2D photonic crystal structure,’ Photonics and Nanostructures - Fundamentals and Applications, 2 (3), pp 207–213, December (2004).

Chong, Harold

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Chong, Harold M. H.

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

Ciminell, Caterina

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

F, Pizzuto

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

F., Ohno

Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
[CrossRef]

Fan, S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Ferrera, J.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Foresi, J. S.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Fukuzawa, T.

Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
[CrossRef]

Geis, M. W.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

Gnan, M.

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).

Gnan, Marco

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

GS, Camarda

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

H, Rao

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

Hadji, E.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Hugonin, J. P.

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

P. Lalanne and J. P. Hugonin, ‘Bloch-wave engineering for high-Q, small-V microcavities,’ IEEE J. Quantum Electron.,  39, no. 11, pp. 1430–1438, Nov. 2003.
[CrossRef]

Ippen, E. P.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Jin, Chongjun

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Joannopoulos, J. D.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Johnson, N.P.

Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).

Johnson, Nigel

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Kimerling, L. C.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Krauss, T. F.

T. F. Krauss and R. M. De La Rue, ‘Photonic crystals in the optical regime—Past, present and future,’ Progress Quantum Electron., vol. 23, no. 2, pp. 51–96, Mar. 1999.
[CrossRef]

Lalanne, P.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

P. Lalanne and J. P. Hugonin, ‘Bloch-wave engineering for high-Q, small-V microcavities,’ IEEE J. Quantum Electron.,  39, no. 11, pp. 1430–1438, Nov. 2003.
[CrossRef]

Lecamp, G.

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

Lyszczarz, T. M.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

Macintyre, D.S.

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

Noda, S.

T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
[CrossRef] [PubMed]

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

Ntakis, Iraklis

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Peyrade, D.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Picard, E.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Pottier, Pierre

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

RL, Espinola

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

RM, Osgood

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

Rodier, J. C.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

RU, Ahmad

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

Rue, R. M. De La

E. A. Camargo, H. M. H. Chong, and R. M. De La Rue, ‘Highly compact asymmetric Mach-Zehnder device based on channel guides in a two-dimensional photonic crystal,’ Appl. Opt.,  45, pp. 6507–6510, 1st Sept (2006).
[CrossRef] [PubMed]

H. M. H. Chong and R. M. De La Rue, ‘Tuning of photonic crystal waveguide microcavity by thermooptic effect,’ IEEE Photon. Technol. Lett.,  16, no. 6, pp. 1528–1530, Jun. 2004.
[CrossRef]

T. F. Krauss and R. M. De La Rue, ‘Photonic crystals in the optical regime—Past, present and future,’ Progress Quantum Electron., vol. 23, no. 2, pp. 51–96, Mar. 1999.
[CrossRef]

Rue, R.M. De La

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

E.A. Camargo, H.M.H. Chong, and R.M. De La Rue, ‘Four-port coupled channel-guide device based on 2D photonic crystal structure,’ Photonics and Nanostructures - Fundamentals and Applications, 2 (3), pp 207–213, December (2004).

Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).

Rue, Richard De La

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Rue, Richard M. De La

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

Sauvan, C.

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

Smith, Henry I.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Song, B.S.

T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
[CrossRef] [PubMed]

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

Sorel, M.

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

Sorel, Marc

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Spector, S. J.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

Steinmeyer, G.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Thoen, E. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Thoms, S.

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

Velha, P.

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Villeneuve, P. R.

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

Williamson, R. C.

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

Zain, Ahmad Md

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Zain, Ahmad Rifqi Md

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

Zhang, Hua

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).

Appl. Opt. (1)

Electron. Lett. (1)

M. Gnan, S. Thoms, D.S. Macintyre, R.M. De La Rue, and M. Sorel, ‘Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist,’ Electron. Lett.,  44 (2), 115 – 116, 17th Jan (2008).
[CrossRef]

IEEE J. Quantum Electron. (1)

P. Lalanne and J. P. Hugonin, ‘Bloch-wave engineering for high-Q, small-V microcavities,’ IEEE J. Quantum Electron.,  39, no. 11, pp. 1430–1438, Nov. 2003.
[CrossRef]

IEEE Photon. Technol. Lett. (3)

H. M. H. Chong and R. M. De La Rue, ‘Tuning of photonic crystal waveguide microcavity by thermooptic effect,’ IEEE Photon. Technol. Lett.,  16, no. 6, pp. 1528–1530, Jun. 2004.
[CrossRef]

M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, ‘Submicrosecond submilliwatt siliconon- insulator thermooptic switch,’ IEEE Photon. Technol. Lett.,  16, no. 11, pp. 2514–2516, Nov. 2003.
[CrossRef]

Ahmad RU, Pizzuto F, Camarda GS, Espinola RL, Rao H, and Osgood RM, ‘Ultra compact corner-mirrors and T branches in silicon-on- insulator,’ IEEE Photon. Technol. Lett. 14, no 1, January, 2002.

IEEE Photon.Technol. Lett. (1)

Ahmad Rifqi Md Zain, Marco Gnan, Harold M. H. Chong, Marc Sorel, and Richard M. De La Rue, ‘Tapered Photonic Crystal Microcavities Embedded in Photonic Wire Waveguides with Large Resonance Quality-Factor and High Transmission,’ IEEE Photon.Technol. Lett. 20(1), 6 – 8, 1st January (2008).
[CrossRef]

J. Vac. Sci. Technol. (1)

M. Gnan, D.S. Macintyre, M. Sorel, R.M. De La Rue, and S. Thoms, ‘Enhanced stitching for the fabrication of photonic structures by electron beam lithography,’ J. Vac. Sci. Technol. B,  25, pp. 2034, 2007.
[CrossRef]

Jpn.J.Appl.Phys. (1)

Ohno F., T. Fukuzawa, and T. Baba,‘Mach-Zehnder Interferometers Composed of μ-Bends and μ-Branches in a Si Photonic Wire Waveguide,’ Jpn.J.Appl.Phys. 44, No. 7A, 2005, pp. 5322–5323.
[CrossRef]

New J. Phys (1)

Richard De La Rue, Harold Chong, Marco Gnan, Nigel Johnson, Iraklis Ntakis, Pierre Pottier, Marc Sorel, Ahmad Md Zain, Hua Zhang, Edilson Camargo, Chongjun Jin, Mario Armenise, and Caterina Ciminell ‘Photonic crystal and photonic wire nano-photonics based on silicon-on-insulator,’ New J. Phys,  8, (2006) 256.
[CrossRef]

New J. Phys. (IOP) (1)

P. Velha, J. C. Rodier, P. Lalanne, J. P. Hugonin, D. Peyrade, E. Picard, T. Charvolin, and E. Hadji, ‘Ultra high reflectivity photonic bandgap mirrors in a ridge SOI waveguide,’ New J. Phys. (IOP),  8, no. 204, pp. 1–13, Sep. 2006.

Opt. Express (2)

T. Asano, B.S. Song, and S. Noda,’ Analysis of the experimental Q factors (∼1 million) of photonic crystal nanocavities,’ Opt. Express 14, 1996–2002 (2006)
[CrossRef] [PubMed]

C. Sauvan, G. Lecamp, P. Lalanne, and J. P. Hugonin, ‘Modal reflectivity enhancement by geometry tuning in photonic crystal micro-cavities,’ Opt. Express,  3, no. 1, pp. 245–255, Jan. 2005.
[CrossRef]

Opt. Express, (1)

P. Velha, E. Picard, T. Charvolin, E. Hadji, J. C. Rodier, P. Lalanne, and D. Peyrade, ‘Ultra-High Q/V Fabry-Perot microcavity on SOI substrate,’ Opt. Express, 15 (24), 16090–16096, 26th November (2007).
[CrossRef]

Progress Quantum Electron. (1)

T. F. Krauss and R. M. De La Rue, ‘Photonic crystals in the optical regime—Past, present and future,’ Progress Quantum Electron., vol. 23, no. 2, pp. 51–96, Mar. 1999.
[CrossRef]

Other (4)

E.A. Camargo, H.M.H. Chong, and R.M. De La Rue, ‘Four-port coupled channel-guide device based on 2D photonic crystal structure,’ Photonics and Nanostructures - Fundamentals and Applications, 2 (3), pp 207–213, December (2004).

Hua Zhang, M. Gnan, N.P. Johnson, and R.M. De La Rue, ‘Ultra-Small Mach-Zehnder Interferometer Devices in Thin Silicon-on-Insulator,’ Integrated Photonics Research and Applications (IPRA), Uncasville, Conn., USA, April (2006).

J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, Henry I. Smith, and E. P. Ippen, ‘Photonic-bandgap microcavities in optical waveguides,’ Nature  390, 143 (1997)

B.S. Song, S. Noda, T. Asano, and Y. Akahane,’Ultra-high-Q photonic double-heterostructure nanocavity,’ Nature materials  4, March 2005.

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Figures (4)

Fig. 1.
Fig. 1.

Scanning electron micrograph (SEM) image of the tapered PhC micro cavities embedded in PhW waveguide with N number of periodic mirrors, cavity length, c (inside length of the two hole in the middle of the periodic mirrors) and aperiodic mirrors forming the tapered section where NTI is the number of hole for tapered within cavity section and NTO is the number of hole outside the cavity.

Fig. 2.
Fig. 2.

Transmission spectra for N = 5 with NTI = 4 and NTO= 3 using 2D FDTD approach with Q of approximately 177 000 at resonance frequency of 1483.54 nm at cavity length, c of 425 nm.

Fig. 3.
Fig. 3.

Transmission spectra for N = 4 and NTI = 4 with (a) NTO=1 (b) NTO=2 (c) NTO=3 – with a cavity length, c = 450 nm.

Fig. 4.
Fig. 4.

Measured transmission spectra for N = 5 with NTI = 4 and NTO= 3 corresponded to simulation result in Fig. 2 with Q of approximately 147 000 at resonance frequency of 1479.705 nm.

Tables (1)

Tables Icon

Table 1. Comparison of Simulated and Experimental value of different taper outside cavity, NTO for N=5 and NTI=4

Metrics