Abstract

This paper deals with a broadband optical monitoring set up useful for the manufacturing of absorbing coatings. The monitoring strategy consists in simultaneous measurements of transmittance and reflectance over a large spectral range. The resulting analysis allows then to determine the real time deposited thickness. A stage of design correction is possible after the deposition and analysis of each layer. This method has potential for thin metallic layers coatings. We then describe layer after layer the strategy for the control and manufacturing of a filter with given colorimetric properties.

© 2008 Optical Society of America

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References

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  1. B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results - sputtering system,” Appl. Opt. 32, 2351–2360 (1993).
    [CrossRef] [PubMed]
  2. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
    [CrossRef] [PubMed]
  3. L. Li and Y. Yen, “Wideband monitoring and measuring system for optical coatings,” Appl. Opt. 28, 2890–2894 (1989).
    [CrossRef]
  4. A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
    [CrossRef]
  5. D. Ristau, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion process”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).
  6. M. Lappschies, B. Goertz, and D. Ristau, “Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering”, in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).
  7. S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).
  8. B. T. Sullivan and K. L. Byrt, “Metal/dielectric transmission interference filters with low reflectance. 2. Experimental results,” Appl. Opt. 34, 5684–5694 (1995).
    [CrossRef] [PubMed]
  9. B. Badoil, F. Lemarchand, M. Cathelinaud, and M. Lequime, “Interest of broadband optical monitoring for thin film filters manufacturing,” Appl. Opt. 46, 4294–4303 (2007).
    [CrossRef] [PubMed]
  10. S.D. Browning and J.A. Dobrowolski, “2007 OSA Topical meeting on Optical Interference Coatings manufacturing problem,” paper MB1 (2007).
  11. J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
    [CrossRef]
  12. O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
    [CrossRef]
  13. A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).
  14. T. Csendes, B. Daroczy, and Z. Hantos, “Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization,” (Springer-Verlag, Berlin1986) 188–192.

2008 (1)

J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
[CrossRef]

2007 (1)

2006 (1)

2004 (1)

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

1997 (1)

O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
[CrossRef]

1995 (1)

1993 (1)

1989 (1)

L. Li and Y. Yen, “Wideband monitoring and measuring system for optical coatings,” Appl. Opt. 28, 2890–2894 (1989).
[CrossRef]

Amotchkina, T. V.

Badoil, B.

Borkovskaya, O. Y.

O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
[CrossRef]

Browning, S.

J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
[CrossRef]

Browning, S.D.

S.D. Browning and J.A. Dobrowolski, “2007 OSA Topical meeting on Optical Interference Coatings manufacturing problem,” paper MB1 (2007).

Byrt, K. L.

Cathelinaud, M.

Csendes, T.

T. Csendes, B. Daroczy, and Z. Hantos, “Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization,” (Springer-Verlag, Berlin1986) 188–192.

Daroczy, B.

T. Csendes, B. Daroczy, and Z. Hantos, “Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization,” (Springer-Verlag, Berlin1986) 188–192.

Dmitruk, N. L.

O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
[CrossRef]

Dobrowolski, J. A.

J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
[CrossRef]

B. T. Sullivan and J. A. Dobrowolski, “Deposition error compensation for optical multilayer coatings. II. Experimental results - sputtering system,” Appl. Opt. 32, 2351–2360 (1993).
[CrossRef] [PubMed]

Dobrowolski, J.A.

S.D. Browning and J.A. Dobrowolski, “2007 OSA Topical meeting on Optical Interference Coatings manufacturing problem,” paper MB1 (2007).

Fursenko, O. V.

O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
[CrossRef]

Gabler, D.

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

Goertz, B.

M. Lappschies, B. Goertz, and D. Ristau, “Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering”, in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).

Gross, T.

D. Ristau, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion process”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).

Hantos, Z.

T. Csendes, B. Daroczy, and Z. Hantos, “Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization,” (Springer-Verlag, Berlin1986) 188–192.

Jacobson, M.

J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
[CrossRef]

Kaiser, N.

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

Kokarev, M. A.

A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).

Lappschies, M.

D. Ristau, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion process”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).

M. Lappschies, B. Goertz, and D. Ristau, “Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering”, in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).

leitel, R.

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

Lemarchand, F.

Lequime, M.

Li, L.

L. Li and Y. Yen, “Wideband monitoring and measuring system for optical coatings,” Appl. Opt. 28, 2890–2894 (1989).
[CrossRef]

Nadal, M.

J. A. Dobrowolski, S. Browning, M. Jacobson, and M. Nadal, “2007 Topical Meeting on Optical Interference Coatings: Manufacturing Problem,” Appl. Opt. 47, 231–245 (2008).
[CrossRef]

Prosovskiy, O. F.

A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).

Ristau, D.

M. Lappschies, B. Goertz, and D. Ristau, “Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering”, in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).

D. Ristau, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion process”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).

Stenzel, O.

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

Sullivan, B. T.

Tikhonravov, A. V.

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
[CrossRef] [PubMed]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).

Trubetskov, M. K.

A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the effect of accumulation of thickness errors in optical coating production by broadband optical monitoring,” Appl. Opt. 45, 7026–7034 (2006).
[CrossRef] [PubMed]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).

Wilbrandt, S.

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

Yen, Y.

L. Li and Y. Yen, “Wideband monitoring and measuring system for optical coatings,” Appl. Opt. 28, 2890–2894 (1989).
[CrossRef]

Appl. Opt. (6)

Proc. SPIE (2)

O. Y. Borkovskaya, N. L. Dmitruk, and O. V. Fursenko, “Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method,” Proc. SPIE 3094, 250–254 (1997).
[CrossRef]

A. V. Tikhonravov and M. K. Trubetskov, “On-line characterization and reoptimization of optical coatings,” Proc. SPIE 5250, 406–413 (2004).
[CrossRef]

Other (6)

D. Ristau, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion process”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE1 (2004).

M. Lappschies, B. Goertz, and D. Ristau, “Application of optical broadband monitoring to quasi rugate filter by ion beam sputtering”, in Digest of Optical Interference Coatings (Optical Society of America), paper TuE4 (2004).

S. Wilbrandt, R. leitel, D. Gabler, O. Stenzel, and N. Kaiser, “In situ broadband monitoring and characterization of optical coatings”, in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper TuE6 (2004).

A. V. Tikhonravov, M. K. Trubetskov, O. F. Prosovskiy, and M. A. Kokarev, “Optical characterization of thin metal films,” in Digest of Optical Interference Coatings on CD-ROM (Optical Society of America), paper WDPDP2 (2007).

T. Csendes, B. Daroczy, and Z. Hantos, “Nonlinear parameter estimation by global optimization: comparison of local search methods in respiratory system modelling, System Modelling and Optimization,” (Springer-Verlag, Berlin1986) 188–192.

S.D. Browning and J.A. Dobrowolski, “2007 OSA Topical meeting on Optical Interference Coatings manufacturing problem,” paper MB1 (2007).

Supplementary Material (2)

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Figures (7)

Fig. 1.
Fig. 1.

BOM set up implanted on a Balzers Ion Plating deposition machine

Fig. 2.
Fig. 2.

Theoretical spectral responses of the colorimetric filter design described in Table 2.

Fig. 3.
Fig. 3.

Experimental reflectance and transmittance of the first 6 layers. Theoretical responses are in thin lines. [Media 1]

Fig. 4.
Fig. 4.

Reflectance and Transmittance from the end of layer 7’ deposition to the beginning of layer 8’ deposition. [Media 2]

Fig. 5.
Fig. 5.

Reflectance and transmittance of the 8-layer-filter. Experimental spectra are in bold lines, theoretical values are in thin lines.

Fig. 6.
Fig. 6.

Spectral responses of the colorimetric filter after the 3 additional layers: transmittance (red curve), reflectance (filter side-blue curve), backside reflectance (green curve). Experimental measurements are in bold lines, theoretical values are in thin lines.

Fig. 7.
Fig. 7.

Reflected colors on filter side (a) and backside (b et d), and transmitted color (c et d).

Tables (5)

Tables Icon

Table 1. characteristics of a colorimetric filter – from [9]

Tables Icon

Table 2. Colorimetric filter structure

Tables Icon

Table 3. Colorimetric characteristics of filter defined on table 2

Tables Icon

Table 4. Improved colorimetric filter design. Additional layers are in bold font

Tables Icon

Table 5. Colorimetric parameters

Equations (3)

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MF = { 1 9 [ m = 1 3 ( x m T x m 0.01 x m T ) 2 + m = 1 3 ( y m T y m 0.01 y m T ) 2 + m = 1 3 ( Y m T Y m 0.01 Y m T ) 2 ] } 1 2
n ( λ ) = a 0 + a 1 λ 2 + a 2 λ 4
TMF = { 1 6 [ m = 2 3 ( x m T x m 0.01 x m T ) 2 + m = 2 3 ( y m T y m 0.01 y m T ) 2 + m = 2 3 ( Y m T Y m 0.01 Y m T ) 2 ] } 1 2

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