Abstract

Compact silicon-on-insulator (SOI) rib waveguide 90° splitters based on narrow, high-aspect ratio (~10:1) trenches are designed and experimentally demonstrated. The splitter area is only 11 µm×11 µm. Splitter optical performance is investigated as a function of both trench width and refractive index of the trench fill material. We examine three trench fill materials, air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733), and find good agreement between experimental measurement and three dimensional (3D) finite difference time domain (FDTD) simulation. A splitting ratio of 49/51 (reflection/transmission) is measured for an index fluid-filled trench 82nm wide.

© 2007 Optical Society of America

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References

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2006 (3)

Y. Qian, S. Kim, J. Song, and G. P. Nordin, “Compact and low loss silicon-on-insulator rib waveguide 90° bend,” Opt. Express 14, 6020–6028 (2006)
[Crossref] [PubMed]

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptic tuning of SOI resonator switch,” Photon. Technol. Lett. 18, 364–366 (2006).
[Crossref]

S. Kim, J. Jiang, and G. P. Nordin, “Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures,” Opt. Eng. 45, 054602 (2006).
[Crossref]

2005 (4)

2004 (3)

2003 (2)

S. Lardenois, D. Paskcal, L. Vivien, E. Cassan, and S. Laval, “Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors,” Opt. Lett. 28, 1150–1152 (2003).
[Crossref] [PubMed]

L. Li, G. P. Nordin, J. M. English, and J. Jiang, “Small-area bends and beamsplitters for low-index-contrast waveguides”, Opt. Express 11(3), 282–290 (2003).
[Crossref]

2002 (1)

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

1998 (1)

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

1994 (1)

J. P. Berenger, “A perfectly matched layer for the absorption of electromagnetic waves,” J. Comput. Phys. 114, 185–200 (1994).
[Crossref]

Alperovich, E.

Aydinli, A.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptic tuning of SOI resonator switch,” Photon. Technol. Lett. 18, 364–366 (2006).
[Crossref]

Baets, R.

Beckx, S.

Berenger, J. P.

J. P. Berenger, “A perfectly matched layer for the absorption of electromagnetic waves,” J. Comput. Phys. 114, 185–200 (1994).
[Crossref]

Bienstman, P.

Bogaerts, W.

Cai, J.

Campenhout, J. V.

Cassan, E.

Chen, S.

J. Liu, J. Yu, S. Chen, and Z. Li, “Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching,” Photon. Technol. Lett. 17, 1187–1189 (2005).
[Crossref]

Coppinger, F.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Dagli, N.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptic tuning of SOI resonator switch,” Photon. Technol. Lett. 18, 364–366 (2006).
[Crossref]

Dumon, P.

English, J. M.

L. Li, G. P. Nordin, J. M. English, and J. Jiang, “Small-area bends and beamsplitters for low-index-contrast waveguides”, Opt. Express 11(3), 282–290 (2003).
[Crossref]

Goldring, D.

Hsiao, C. S.

Jalali, B.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Jiang, J.

S. Kim, J. Jiang, and G. P. Nordin, “Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures,” Opt. Eng. 45, 054602 (2006).
[Crossref]

J. Cai, G. P. Nordin, S. Kim, and J. Jiang, “Three-dimensional analysis of a hybrid photonic crystalconventional waveguide 90° bend,” Appl. Opt. 43, 4244–4249 (2004).
[Crossref] [PubMed]

L. Li, G. P. Nordin, J. M. English, and J. Jiang, “Small-area bends and beamsplitters for low-index-contrast waveguides”, Opt. Express 11(3), 282–290 (2003).
[Crossref]

Kim, S.

S. Kim, J. Jiang, and G. P. Nordin, “Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures,” Opt. Eng. 45, 054602 (2006).
[Crossref]

Y. Qian, S. Kim, J. Song, and G. P. Nordin, “Compact and low loss silicon-on-insulator rib waveguide 90° bend,” Opt. Express 14, 6020–6028 (2006)
[Crossref] [PubMed]

J. Cai, G. P. Nordin, S. Kim, and J. Jiang, “Three-dimensional analysis of a hybrid photonic crystalconventional waveguide 90° bend,” Appl. Opt. 43, 4244–4249 (2004).
[Crossref] [PubMed]

G. P. Nordin, J. W. Noh, and S. Kim, “In-plane photonic transduction for microcantilever sensor arrays,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to -8 (2007).

Kiyat, I.

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptic tuning of SOI resonator switch,” Photon. Technol. Lett. 18, 364–366 (2006).
[Crossref]

Koster, A.

Lardenois, S.

Laval, S.

Levy, U.

Li, L.

L. Li, G. P. Nordin, J. M. English, and J. Jiang, “Small-area bends and beamsplitters for low-index-contrast waveguides”, Opt. Express 11(3), 282–290 (2003).
[Crossref]

Li, T.

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

Li, Z.

J. Liu, J. Yu, S. Chen, and Z. Li, “Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching,” Photon. Technol. Lett. 17, 1187–1189 (2005).
[Crossref]

Liu, J.

J. Liu, J. Yu, S. Chen, and Z. Li, “Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching,” Photon. Technol. Lett. 17, 1187–1189 (2005).
[Crossref]

Luyssaert, B.

McNab, S. J.

Mendlovic, D.

Noh, J. W.

G. P. Nordin, J. W. Noh, and S. Kim, “In-plane photonic transduction for microcantilever sensor arrays,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to -8 (2007).

Nordin, G. P.

S. Kim, J. Jiang, and G. P. Nordin, “Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures,” Opt. Eng. 45, 054602 (2006).
[Crossref]

Y. Qian, S. Kim, J. Song, and G. P. Nordin, “Compact and low loss silicon-on-insulator rib waveguide 90° bend,” Opt. Express 14, 6020–6028 (2006)
[Crossref] [PubMed]

J. Cai, G. P. Nordin, S. Kim, and J. Jiang, “Three-dimensional analysis of a hybrid photonic crystalconventional waveguide 90° bend,” Appl. Opt. 43, 4244–4249 (2004).
[Crossref] [PubMed]

L. Li, G. P. Nordin, J. M. English, and J. Jiang, “Small-area bends and beamsplitters for low-index-contrast waveguides”, Opt. Express 11(3), 282–290 (2003).
[Crossref]

G. P. Nordin, J. W. Noh, and S. Kim, “In-plane photonic transduction for microcantilever sensor arrays,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to -8 (2007).

Pascal, D.

Paskcal, D.

Qian, Y.

Rendina, I.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Song, J.

Taflove, A.

A. Taflove, Computational Electrodynamics: The Finite-Difference Time-Domain Method, (Artech House, Boston, Mass., 1995).

Taillaert, D.

Tang, Y. Z.

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

Thourhout, D. V.

Vivien, L.

Vlasov, Y. A.

Wang, L.

Wang, W. H.

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

Wang, Y. L.

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

Wiaux, V.

Yegnanarayanan, S.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Yoon, T.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Yoshimoto, T.

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

Yu, J.

J. Liu, J. Yu, S. Chen, and Z. Li, “Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching,” Photon. Technol. Lett. 17, 1187–1189 (2005).
[Crossref]

Appl. Opt. (1)

IEEE J. Sel. Top. Quantum Electron. (1)

B. Jalali, S. Yegnanarayanan, T. Yoon, T. Yoshimoto, I. Rendina, and F. Coppinger, “Advances in Silicon-on-Insulator Optoelectronics,” IEEE J. Sel. Top. Quantum Electron. 4, 938–947 (1998).
[Crossref]

J. Comput. Phys. (1)

J. P. Berenger, “A perfectly matched layer for the absorption of electromagnetic waves,” J. Comput. Phys. 114, 185–200 (1994).
[Crossref]

J. Lightwave Technol. (1)

J. Opt. Soc. Am. A (1)

Opt. Eng. (1)

S. Kim, J. Jiang, and G. P. Nordin, “Design of compact polymer Mach-Zender interferometer and ring resonator with air trench structures,” Opt. Eng. 45, 054602 (2006).
[Crossref]

Opt. Express (4)

Opt. Lett. (2)

Photon. Technol. Lett. (3)

Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, “Integrated waveguide turning mirror on silicon-on-insulator,” Photon. Technol. Lett. 14, 68–70 (2002).
[Crossref]

J. Liu, J. Yu, S. Chen, and Z. Li, “Integrated folding 4×4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching,” Photon. Technol. Lett. 17, 1187–1189 (2005).
[Crossref]

I. Kiyat, A. Aydinli, and N. Dagli, “Low-power thermooptic tuning of SOI resonator switch,” Photon. Technol. Lett. 18, 364–366 (2006).
[Crossref]

Other (2)

G. P. Nordin, J. W. Noh, and S. Kim, “In-plane photonic transduction for microcantilever sensor arrays,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, Alexander N. Cartwright, Dav V. Nicolau, and Paul L. Gourley, Editors, Proceedings of SPIE Vol. 6447, pp. 64470J-1 to -8 (2007).

A. Taflove, Computational Electrodynamics: The Finite-Difference Time-Domain Method, (Artech House, Boston, Mass., 1995).

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Figures (5)

Fig. 1.
Fig. 1.

(a) Cross section of single mode SOI rib waveguide. (b) Splitter geometry.

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Fig. 2.
Fig. 2.

Total splitter efficiency (i.e., sum of transmitted and reflected power in waveguide modes divided by power in mode launched in 3D FDTD simulation) as a function of D [see Fig. 1(b) for definition of D] for SU8 trench fill and overclad.

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Fig. 3.
Fig. 3.

(a) Magnitude squared time-averaged magnetic field and (b) splitter efficiency as a function of trench width without Goos-Hanchen shift compensation for index matching fluid-filled case. The power in the incident waveguide mode for the simulations is normalized to unity such that the peak value of the magnitude squared time averaged magnetic field of the incident mode in (a) is 0.013. The fringes are due to interference between the incident and reflected modes.

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Fig. 4.
Fig. 4.

SEM images of (a) splitter, (b) roughness and verticality of etched sidewall, and (c) splitter/bend set after trench etch and before polymer coating.

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Fig. 5.
Fig. 5.

(a) Measured and 3D FDTD simulation results for reflection and transmission splitting ratio as a function of trench width for trench fills of air (n=1.0), SU8 (n=1.57), and index matching fluid (n=1.733) at λ=1550 nm. (b) 2D scan of output fiber at exit face of chip for a splitter with 82 nm trench width filled with index matching fluid.

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Tables (1)

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Table 1. Splitter 3D FDTD simulation results

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Equations (1)

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η = P splitter _ reflection ⁄ η Bend + P splitter _ transmission P Straight _ waveguide

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