Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist

Liang-Ting Jiang; Tzu-Chien Huang; Chien-Ren Chiu; Chih-Yuan Chang; Sen-Yeu Yang

doi:10.1364/OE.15.012088

Abstract

This paper reports a novel and effective method to fabricate microlens arrays on polycarbonate films by hybrid extrusion rolling embossing. The metallic cylinder mold bearing an array of micro-holes is fabricated using photolithography with dry film resist. During the extrusion rolling embossing process, the extruded PC film is immediately pressed against the surface of the roller mold. Under the influence of the rolling pressure and surface tension, an array of convex microlenses is formed. The uniformity and optical properties have been verified. An efficient continuous mass production technique has been demonstrated.

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D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]
X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]
W. X. Yu and X. -C. Yuan, “UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask,” Opt. Express 11, 2253–2258 (2003).
[Crossref] [PubMed]
C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]
V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]
W. L. Chang and P. K. Wei, “Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography,” Opt. Express 15, 6774–6783 (2007).
[Crossref] [PubMed]
S.-I. Chang and J.-B. Yoon, “Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method,” Opt. Express 12, 6366–6371 (2004).
[Crossref] [PubMed]
R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]
B.K. Lee, D.S. Kim, and T.H. Kwon, “Replication of microlens arrays by injection molding, Microsystem Technologies,” 10, 531–535 (2004).
N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]
S.-M. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D: Appl. Phys. 36, 2451–2456 (2003).
[Crossref]
C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]

2007 (2)

W. L. Chang and P. K. Wei, “Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography,” Opt. Express 15, 6774–6783 (2007).
[Crossref] [PubMed]

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

2006 (3)

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]

C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]

2004 (2)

S.-I. Chang and J.-B. Yoon, “Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method,” Opt. Express 12, 6366–6371 (2004).
[Crossref] [PubMed]

B.K. Lee, D.S. Kim, and T.H. Kwon, “Replication of microlens arrays by injection molding, Microsystem Technologies,” 10, 531–535 (2004).

2003 (2)

S.-M. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D: Appl. Phys. 36, 2451–2456 (2003).
[Crossref]

W. X. Yu and X. -C. Yuan, “UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask,” Opt. Express 11, 2253–2258 (2003).
[Crossref] [PubMed]

2002 (2)

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]

N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]

1990 (1)

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Chang, C. Y.

C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]

C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]

Chang, S.-I.

S.-I. Chang and J.-B. Yoon, “Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method,” Opt. Express 12, 6366–6371 (2004).
[Crossref] [PubMed]

Chang, W. L.

W. L. Chang and P. K. Wei, “Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography,” Opt. Express 15, 6774–6783 (2007).
[Crossref] [PubMed]

Cheong, W. C.

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]

Conedera, V.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Daly, D.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Daran, E.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Davies, N.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Doucet, J. B.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Fu, Y. Q.

N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]

Guo, R.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Hsieh, K. H.

C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]

Huang, L. S.

C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]

Huang, W.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Hutley, M. C.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Kang, S.

S.-M. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D: Appl. Phys. 36, 2451–2456 (2003).
[Crossref]

Kim, D.S.

B.K. Lee, D.S. Kim, and T.H. Kwon, “Replication of microlens arrays by injection molding, Microsystem Technologies,” 10, 531–535 (2004).

Kim, S.-M.

S.-M. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D: Appl. Phys. 36, 2451–2456 (2003).
[Crossref]

Koh, Y. H.

N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]

Kwon, T.H.

B.K. Lee, D.S. Kim, and T.H. Kwon, “Replication of microlens arrays by injection molding, Microsystem Technologies,” 10, 531–535 (2004).

Lee, B.K.

B.K. Lee, D.S. Kim, and T.H. Kwon, “Replication of microlens arrays by injection molding, Microsystem Technologies,” 10, 531–535 (2004).

Leïchlé, T.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Levallois, C.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Li, J.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Ngo, N. Q.

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]

Ong, N. S.

N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]

Sheh, J. L.

C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]

Stevens, R. F.

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Vergnenègre, C.

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois, T. Camps, V. Conedera, J. B. Doucet, and F. Carcenac, “Fabrication and characterization of microlens arrays using a cantilever-based spotter,” Opt. Express 15, 6900–6907 (2007).
[Crossref] [PubMed]

Wei, P. K.

W. L. Chang and P. K. Wei, “Fabrication of a close-packed hemispherical submicron lens array and its application in photolithography,” Opt. Express 15, 6774–6783 (2007).
[Crossref] [PubMed]

Xia, A.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Xiao, S.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

Yang, S. Y.

C. Y. Chang, S. Y. Yang, L. S. Huang, and K. H. Hsieh, “Fabrication of polymer microlens arrays using capillary forming with a soft mold of micro-holes array and UV-curable polymer,” Opt. Express 14, 6253–6258 (2006).
[Crossref] [PubMed]

Yang, S.Y.

C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]

Yoon, J.-B.

S.-I. Chang and J.-B. Yoon, “Shape-controlled, high fill-factor microlens arrays fabricated by a 3D diffuser lithography and plastic replication method,” Opt. Express 12, 6366–6371 (2004).
[Crossref] [PubMed]

Yu, W. X.

W. X. Yu and X. -C. Yuan, “UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask,” Opt. Express 11, 2253–2258 (2003).
[Crossref] [PubMed]

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]

Yuan, X. -C.

W. X. Yu and X. -C. Yuan, “UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask,” Opt. Express 11, 2253–2258 (2003).
[Crossref] [PubMed]

Yuan, X.-C.

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong, “Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam-sensitive gray-scale mask,” Opt. Express 10, 303–308 (2002).
[PubMed]

Zhai, X.

R. Guo, S. Xiao, X. Zhai, J. Li, A. Xia, and W. Huang, “Micro lens fabrication by means of femtosecond two photon photopolymerization,” Opt. Express 14, 810–816 (2006).
[Crossref] [PubMed]

J. Phys. D: Appl. Phys. (1)

S.-M. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D: Appl. Phys. 36, 2451–2456 (2003).
[Crossref]

Meas. Sci. Technol. (1)

D. Daly, R. F. Stevens, M. C. Hutley, and N. Davies, “The manufacture of microlenses by melting photoresist,” Meas. Sci. Technol. 1, 759–766 (1990). http://www.iop.org/EJ/toc/0957-0233/1/8
[Crossref]

Microelectron. Eng. (1)

N. S. Ong, Y. H. Koh, and Y. Q. Fu, “Microlens array produced using hot embossing process,” Microelectron. Eng. 60, (2002) 365–379.
[Crossref]

Microsyst. Technol. (1)

C. Y. Chang, S.Y. Yang, and J. L. Sheh, “A roller embossing process for rapid fabrication of microlens arrays on glass substrates,” Microsyst. Technol. 12754–759 (2006).
[Crossref]