Abstract

In this work, detailed design and realization of high quality factor (Q) racetrack resonators based on silicon-on-insulator rib waveguides are presented. Aiming to achieve critical coupling, suitable waveguide geometry is determined after extensive numerical studies of bending loss. The final design is obtained after coupling factor calculations and estimation of propagation loss. Resonators with quality factors (Q) as high as 119000 has been achieved, the highest Q value for resonators based on silicon-on-insulator rib waveguides to date with extinction ratios as large as 12 dB.

© 2005 Optical Society of America

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  1. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
    [Crossref]
  2. S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
    [Crossref]
  3. B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).
  4. A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
    [Crossref]
  5. D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
    [Crossref]
  6. B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
    [Crossref]
  7. J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29, 2861–2863 (2004)
    [Crossref]
  8. K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction,” Opt. Lett. 26, 1888–1890 (2001)
    [Crossref]
  9. W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
    [Crossref]
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  11. RSoft Designing Group, Ossining, NY, USA; http://www.rsoftdesign.com
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    [Crossref]
  13. V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
    [Crossref]
  14. SOITEC Silicon on Insulator Thechnologies, Bernin, France; http://www.soitec.com

2005 (1)

I. Kiyat, A. Aydinli, and N. Dagli, “A Compact Silicon-on-Insulator Polarization Splitter,” IEEE Photon. Technol. Lett. 17, 100–102 (2005)
[Crossref]

2004 (2)

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

J. Niehusmann, A. Vörckel, P. H. Bolivar, T. Wahlbrink, W. Henschel, and H. Kurz, “Ultrahigh-quality-factor silicon-on-insulator microring resonator,” Opt. Lett. 29, 2861–2863 (2004)
[Crossref]

2001 (3)

1999 (3)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

1998 (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

1997 (1)

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

1993 (1)

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Aydinli, A.

I. Kiyat, A. Aydinli, and N. Dagli, “A Compact Silicon-on-Insulator Polarization Splitter,” IEEE Photon. Technol. Lett. 17, 100–102 (2005)
[Crossref]

Bolivar, P. H.

Boyd, J. T.

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

Bulthuis, H. F.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Cerrina, F.

Choi, J. M.

Chu, S. T.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Dagli, N.

I. Kiyat, A. Aydinli, and N. Dagli, “A Compact Silicon-on-Insulator Polarization Splitter,” IEEE Photon. Technol. Lett. 17, 100–102 (2005)
[Crossref]

De Brabander, G. N.

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

Driessen, A.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Foresi, J. S.

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Glass, J. L.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Greene, W.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Haus, H. A.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Headley, W. R.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

Henschel, W.

Hoekstra, H. J. W. M.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Howe, S.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

Ippen, E. P.

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Kaneko, T.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

Kimerling, L. C.

K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction,” Opt. Lett. 26, 1888–1890 (2001)
[Crossref]

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Kiyat, I.

I. Kiyat, A. Aydinli, and N. Dagli, “A Compact Silicon-on-Insulator Polarization Splitter,” IEEE Photon. Technol. Lett. 17, 100–102 (2005)
[Crossref]

Klunder, D. J. W.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Kokubun, Y.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

Krioukov, E.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Kurz, H.

Lee, K. K.

Lee, R. K.

Levi, A. F. J.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Lim, D. R.

Little, B. E.

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Liu, A.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

Logan, R. A.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

McCall, S. L.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Naghski, D. H.

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

Niehusmann, J.

Otto, C.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Pan, W.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

Paniccia, M.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

Pearton, S. J.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Reed, G. T.

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

Ripin, D. J.

B. E. Little, H. A. Haus, J. S. Foresi, L. C. Kimerling, E. P. Ippen, and D. J. Ripin, “Wavelength switching and routing using absorption and resonance,” IEEE Photon. Technol. Lett. 11, 816–818 (1999).

Sato, S.

S. T. Chu, B. E. Little, W. Pan, T. Kaneko, S. Sato, and Y. Kokubun, “Second-order filter response from parallel coupled glass microring resonators,” IEEE Photon. Technol. Lett. 11, 1426–1428 (1999).
[Crossref]

Sengo, G.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Shin, J.

Slusher, R. E.

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

Steinmeyer, G.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Subramaniam, V.

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

Tan, F. S.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Thoen, E. R.

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Ultra-compact Si-SiO2 microring resonator optical channel dropping filters,” IEEE Photon. Technol. Lett. 10, 549–551 (1998).
[Crossref]

Van der Veen, T.

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Vörckel, A.

Wahlbrink, T.

Yariv, A.

Appl. Phys. B (1)

D. J. W. Klunder, E. Krioukov, F. S. Tan, T. Van der Veen, H. F. Bulthuis, G. Sengo, C. Otto, H. J. W. M. Hoekstra, and A. Driessen, “Verticaly and laterally waveguide-coupled cylindirical microsesonators in Si3N4 on SiO2 technology,” Appl. Phys. B 73, 603–608 (2001).
[Crossref]

Appl. Phys. Lett. (2)

W. R. Headley, G. T. Reed, S. Howe, A. Liu, and M. Paniccia, “Polarization-independent optical racetrack resonators using rib waveguides on silicon-on-insulator,” Appl. Phys. Lett. 85, 5523–5525 (2004)
[Crossref]

A. F. J. Levi, R. E. Slusher, S. L. McCall, J. L. Glass, S. J. Pearton, and R. A. Logan “Directional light coupling from microdisk lasers,” Appl. Phys. Lett. 62, 561–563 (1993).
[Crossref]

IEEE Photon. Technol. Lett. (5)

I. Kiyat, A. Aydinli, and N. Dagli, “A Compact Silicon-on-Insulator Polarization Splitter,” IEEE Photon. Technol. Lett. 17, 100–102 (2005)
[Crossref]

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, and W. Greene, “Verticaly coupled glass microring resonator channel droping filters,” IEEE Photon. Technol. Lett. 11, 215–217 (1999).
[Crossref]

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[Crossref]

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[Crossref]

J. Lightwave Technol. (1)

V. Subramaniam, G. N. De Brabander, D. H. Naghski, and J. T. Boyd, “Measured of mode field profiles and bending and transition losses in curved optical channel waveguides,” J. Lightwave Technol. 15, 990–997 (1997)
[Crossref]

Opt. Lett. (3)

Other (2)

RSoft Designing Group, Ossining, NY, USA; http://www.rsoftdesign.com

SOITEC Silicon on Insulator Thechnologies, Bernin, France; http://www.soitec.com

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Figures (4)

Fig. 1.
Fig. 1.

(a) Cross sectional schematic view of the designed rib waveguide and the coupling region. The dimensions used in fabrication are H=1.00 µm, w=1.0 µm, h=0.58 µm and g=0.8 µm (b) Optical micrographs of one of the fabricated resonators and its coupling region.

Fig. 2.
Fig. 2.

(a) The effective index method is used to reduce 3D structure to 2D. (b) Analytically and numerically (3D BPM) simulated bending loss extrapolated to 90° as a function of bending radius. Expected Q values for the design are shown on the second y-axis. Inset shows the layout used in BPM simulations.

Fig. 3.
Fig. 3.

Numerically (3D BPM) calculated coupling factors as a function of straight coupling length for different radii. Inset shows the layout used in BPM simulations

Fig. 4.
Fig. 4.

Measured transmission spectra of the fabricated silicon-on-insulator rib waveguide racetrack resonators for radii of 500, 350, 250 and 150 µm for the same span of wavelengths.

Tables (1)

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Table 1. Summary of characteristics of fabricated and measured resonators

Equations (4)

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I t = ( 1 κ ) 1 2 exp ( ( α T 2 + i ϕ ) ) 1 ( 1 κ ) 1 2 exp ( ( α T 2 + i ϕ ) ) 2
κ = 1 exp ( α T )
Loss bend = 10 log ( exp ( α bend Δ θ R ) )
α bend = α y 2 k 0 3 n e ( 1 + α y w 2 ) k y 2 ( n e 2 2 n e l 2 ) exp ( α y w ) exp ( 2 α y 3 3 n e 2 k 0 2 R )

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