Abstract

We describe the fabrication of freestanding optical fibers in a glass chip by femtosecond laser three-dimensional (3D) micro-machining. The process has mainly four steps: (1) femtosecond laser scanning of the areas surrounding the fibers; (2) postan-nealing of the sample for the modification of the exposed areas; (3) chemical etching of the sample for the selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the fibers. The measured optical loss of the fibers is approximately 0.7dB/cm. Integrating the freestanding fibers with 3D micromirrors is also demonstrated, enabling functions such as light folding or splitting in the glass chips. Furthermore, we demonstrate that the freestanding fibers can be incorporated into a microfluidic circuit for on-chip biophotonic applications.

© 2005 Optical Society of America

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    [CrossRef]

Appl. Phys. (2)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, H. Helvajian, and K. Midorikawa, �??3-D microstructuring inside photosensitive glass by femtosecond laser excitation,�?? Appl. Phys. A76, 857-860 (2003).

K. Sugioka, M. Masuda, T. Hongo, Y. Cheng, K. Shihoyama, and K. Midorikawa, �??Three-dimensional microfluidic structure embedded in photostructurable glass by femtosecond laser for lab-on-chip application,�?? Appl. Phys. A79, 815-817 (2004).

CLEO 2004 (1)

S. Ho, P. R. Herman, Y. Cheng, K. Sugioka, and K. Midorikawa, �??Direct ultrafast laser writing of buried waveguides in Foturan glass,�?? in Conference on Lasers and Electro-Optics (CLEO), Vol. 97 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2004), paper CThD6.

J. Appl. Phys. (1)

T. Hongo, K. Sugioka, H. Niino, Y. Cheng, M. Masuda, J. Miyamoto, H. Takai, and K. Midorikawa, �??Threedimensional micromachining of glass using femtosecond laser for lab- a-chip device manufacture,�?? J. Appl. Phys. 97, 063517 (2005)
[CrossRef]

Jpn. J. Appl. Phys. (1)

Y. Kondo, J. Qiu, T. Mitsuyu, K. Hirao, and T. Yoko, �??Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching,�?? Jpn. J. Appl. Phys. 38, L1146-L1148 (1999).

Opt. Express (1)

Opt. Lett. (4)

RIKEN Review (1)

H. Helvajian, P. D. Fuqua, W. W. Hansen, and S. Janson, �??Laser microprocessing for nanosatellite microthruster applications,�?? RIKEN Review 32, 57-63 (2001), <a href="http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf">http://www.riken.go.jp/lab-www/library/publication/review/pdf/No_32/32_057.pdf</a>.

SPIE Proc. 4830 (1)

M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, and K. Midorikawa, �??3D microfabrication in photosensitive glass by femtosecond laser,�?? SPIE Proc. 4830, 576-580 (2002).

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