Abstract

A microfabrication process using ultrafast laser pulses in glass was investigated. We investigated the formation of semiconductors by the irradiation of glasses with femtosecond laser pulses. ZnS- or PbS-doped SiO2-Al2O3-B2O3-CaO-ZnO-Na2O-K2O glasses were prepared by a melting method and irradiated by femtosecond laser pulses. Periodic structures in the sample glasses with a high refractive index difference were produced by femtosecond laser pulses. The maximum relative refractive index difference between the irradiated area and the nonirradiated areas was 20%. Diffraction gratings were also fabricated inside the ZnS- or PbS-doped silicate glasses. The diffraction efficiency of these gratings was approximately 90% in the infrared region.

© 2004 Optical Society of America

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References

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    [Crossref]
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    [Crossref]
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    [Crossref] [PubMed]
  6. N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
    [Crossref]
  7. N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

2004 (2)

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

2002 (1)

2001 (1)

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

1997 (1)

E. N. Glezer and E. Mazur, “Ultrafast-laser driven micro-explosions in transparent materials,” Appl. Phys. Lett. 71, 882–884(1997)
[Crossref]

1996 (2)

Callan, J. P.

Davis, K. M.

Finlay, R. J.

Glezer, E. N.

Her, T.-H.

Hirano, M.

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

Hirao, K.

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21, 1729–1731(1996)
[Crossref] [PubMed]

Hosono, H.

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

Huang, L.

Itoh, K.

Kawamura, K.

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

Kuroda, D.

Kuroiwa, Y.

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

Mazur, E.

Milosavljevic, M.

Miura, K.

Narita, Y.

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

Nishii, J.

Sarukura, N.

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

Sugimoto, N.

Takeshima, N.

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

Tanaka, S.

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

Watanabe, W.

Appl. Phys. Lett. (2)

E. N. Glezer and E. Mazur, “Ultrafast-laser driven micro-explosions in transparent materials,” Appl. Phys. Lett. 71, 882–884(1997)
[Crossref]

K. Kawamura, N. Sarukura, M. Hirano, and H. Hosono, “Holographic encoding of fine-pitched micrograting structure in amorphous SiO2 thin films on silicon by a single femtosecond laser pulse,” Appl. Phys. Lett. 78, 1038–1040(2001)
[Crossref]

J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue (1)

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of Silver Particles by Femtosecond Laser Pulses inside Silver-ion Doped Glass,” J. Ceram. Soc. Jpn. Supplement 112-1, PacRim5 Special Issue 112[5], S887(2004)

J.Non-Cryst. Solids (1)

N. Takeshima, Y. Kuroiwa, Y. Narita, S. Tanaka, and K. Hirao, “Precipitation of silver particles by femtosecond laser pulses inside silver ion doped glass,” J.Non-Cryst. Solids 336, 234–236(2004)
[Crossref]

Opt. Express (1)

Opt. Lett. (2)

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Figures (6)

Fig. 1.
Fig. 1.

Photographs of the samples after irradiation.(a) ZnS-doped glass (b) PbS-doped glass (c) additive-free (d) PbO-doped glass

Fig.2 .
Fig.2 .

Microscopic images of the ZnS-doped glass in plane view (a) Transmitted image (b) Reflected image

Fig. 3.
Fig. 3.

The microscopic image of the ZnS-doped glass in cross-section view.

Fig. 4.
Fig. 4.

The absorbance spectra for the fabricated grating in ZnS- and PbS-doped glass. (a) Absorbance spectra of fabricated gratings that had periods from 3µm to 15µm in PbS-doped glass (b) Absorbance spectra of a collimating light and a diffusion light in ZnS-doped glass (c) Absorbance spectra of a collimating light and a diffusion light in PbS-doped glass

Fig. 5.
Fig. 5.

Refractive index profiles measured by BPR in the PbS-doped glass.

Fig. 6.
Fig. 6.

EPMA images of the laser-irradiated area in the PbS-doped glass.

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