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Broadband form birefringent quarter-wave plate for the mid-infrared wavelength region

Gregory P. Nordin and Panfilo C. Deguzman

Open Access Open Access

Abstract

We discuss the design, fabrication and optical performance of a broadband form-birefringent quarter-wave plate for the 3.5 to 5 µm wavelength region. Rigorous coupled wave analysis (RCWA) was used to design the requisite subwavelength grating for silicon substrates in ambient air. Fabricated samples yield a measured phase retardation of 89° to 102° over the desired wavelength range.

©1999 Optical Society of America

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Figures (5)
Fig. 1.
Fig. 1. Schematic diagram of a form birefringent wave plate and a normally incident beam showing TE and TM polarization definitions.

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Fig. 2.
Fig. 2. Phase retardation as a function of wavelength for 1.0 µm period gratings parameterized by (a) fill factor (for a thickness of 1.25 µm) and (b) thickness (for a fill factor of 66%).

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Fig. 3.
Fig. 3. (a) Scanning electron microscope (SEM) cross section image of a photoresist grating on Si. (b) SEM top view image of Cr etch mask (on Si) with a Cr fill factor of ~70%.

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Fig. 4.
Fig. 4. SEM cross section image of etched Si grating.

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Fig. 5.
Fig. 5. (a) Measured and simulated phase retardation as a function of wavelength and (b) the corresponding TE and TM transmission coefficients.

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Tables (1)

Tables Icon

Table 1. RCWA binary grating layer parameters. The layers are numbered from top to bottom.

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