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Fabrication of planar photonic crystals in a chalcogenide glass using a focused ion beam

Darren Freeman, Steve Madden, and Barry Luther-Davies

Open Access Open Access

Abstract

Free-standing “AMTIR-1” (Ge33As12Se55) chalcogenide glass films have been patterned using a focused ion beam (FIB) to create two-dimensional photonic crystal membranes. The triangular lattices were selected for a photonic bandgap relevant to fiber telecommunications. Optical measurements of transmission spectra as a function of incident angle showed clear signs of Fano resonances, indicating that the structures had strongly modified guided modes.

©2005 Optical Society of America

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Figures (5)
Fig. 1.
Fig. 1. 100×100 µm2 free-standing photonic crystal membrane imaged at normal incidence to reveal long-range order. The holes were milled in horizontal rows.

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Fig. 2.
Fig. 2. High-resolution (<3 nm) close-up of the free-standing photonic crystal slab of Fig. 1, at 45°. The holes were milled sequentially in rows in the direction of the arrow. Successive rows were stacked from left to right.

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Fig. 3.
Fig. 3. A crack through the bottom of a 20×20 µm2 structure fabricated on the same film as Fig. 1. The holes were milled sequentially in rows in the direction of the arrow. Successive rows were stacked from left to right.

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Fig. 4.
Fig. 4. Transmission spectra of a part of the 100×100 µm2 photonic crystal slab, for both linear polarization states and as a function of angle of incidence along the Γ-K direction of the lattice.

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Fig. 5.
Fig. 5. (left) The 20×20 µm2 lattice of Fig. 3 before it was damaged. (right, 625 kB) Movie of transmitted light at 780 nm as the sample was rotated through 0°-40°-0° in steps of 2°. The illustrated frame is at 10° and shows both enhanced and suppressed transmission.

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