Chiral microstructures (spirals) fabrication by holographic lithography

Yee Kwong Pang; Jeffrey Chi Wai Lee; Hung Fai Lee; Wing Yim Tam; C. T. Chan; Ping Sheng

doi:10.1364/OPEX.13.007615

Optics Express
Vol. 13,
Issue 19,
pp. 7615-7620
(2005)
•https://doi.org/10.1364/OPEX.13.007615

Chiral microstructures (spirals) fabrication by holographic lithography

Yee Kwong Pang, Jeffrey Chi Wai Lee, Hung Fai Lee, Wing Yim Tam, C. T. Chan, and Ping Sheng

Open Access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Yee Kwong Pang, Jeffrey Chi Wai Lee, Hung Fai Lee, Wing Yim Tam, C. T. Chan, and Ping Sheng, "Chiral microstructures (spirals) fabrication by holographic lithography," Opt. Express 13, 7615-7620 (2005)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Related Topics
Table of Contents Category
- Research Papers
Optics & Photonics Topics
?

The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: August 3, 2005
- Revised Manuscript: September 11, 2005
- Manuscript Accepted: September 12, 2005
- Published: September 19, 2005

Abstract

We present an optical interference model to create chiral microstructures (spirals) and its realization in photoresist using holographic lithography. The model is based on the interference of six equally-spaced circumpolar linear polarized side beams and a circular polarized central beam. The pitch and separation of the spirals can be varied by changing the angle between the side beams and the central beam. The realization of the model is carried out using the 325 nm line of a He-Cd laser and spirals of sub-micron size are fabricated in photoresist.

Full Article | PDF Article

More Like This

Optical activities of large-area SU8 microspirals fabricated by multibeam holographic lithography

Xia Wang, Wensheng Gao, Jenny Hung, and Wing Yim Tam
Appl. Opt. 53(11) 2425-2430 (2014)

Square spiral 3D photonic bandgap crystals at telecommunications frequencies

Martin O. Jensen and Michael J. Brett
Opt. Express 13(9) 3348-3354 (2005)

Method for single-shot fabrication of chiral woodpile photonic structures using phase-controlled interference lithography

Swagato Sarkar, Krishnendu Samanta, and Joby Joseph
Opt. Express 28(3) 4347-4361 (2020)

Previous Article Next Article

Cited By

Optica participates in Crossref's Cited-By Linking service. Citing articles from Optica Publishing Group journals and other participating publishers are listed here.

Alert me when this article is cited.

Fig. 1. The 6+1 beam configuration setup.

Download Full Size | PDF

Fig. 2. Intensity contour surfaces of (a) and (c) left handed and (b) and (d) right handed spirals using the 6+1 beams interference of Eq. (3).

Download Full Size | PDF

Fig.3. SEM images of spirals: (a) overall (b) close-up views. (c) Structure with out off phase interference. Scale bar is: (a) 2 μm, (b) 1 μm, and (c) 1 μm..

Download Full Size | PDF

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

{\vec{k}}_{n} = k (\cos \frac{2 (n - 1) π}{6} \sin φ, \sin \frac{2 (n - 1) π}{6} \sin φ, \cos φ),

{\vec{k}}_{0} = k (0, 0, 1) .

I (\vec{r}) = \sum_{n, m} {\vec{E}}_{n} e^{- i {\vec{k}}_{n} \cdot \vec{r} - i δ_{n}} \cdot {\vec{E}}_{m}^{*} e^{i {\vec{k}}_{m} \cdot \vec{r} + i δ_{m}},

{\vec{E}}_{0} = \frac{E_{0}}{\sqrt{2}} (1, \pm i, 0) .

Abstract

Cited By

Figures (3)

Equations (4)

Optics Express