Abstract

In this study, a hollow optical waveguide with omni-directional reflectors in silicon-based materials was design, fabricated and characterized. By using dry etching technique, plasma-enhanced chemical vapor deposition for Si/SiO2 thin films and covering another wafer with omni-directional reflector together, the waveguides can be formed with an air core of 1.2mm×1.3mm. A uniform propagation loss of the waveguide to be around 1.7dB/cm for C+L band was found for the TE and TM modes. Polarization-independent hollow optical waveguides were obtained with the hollow waveguide structure.

© 2004 Optical Society of America

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References

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Appl. Phys. A

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H. Y. Lee, H. Makino, T. Yao, �??Si-based omnidirectional reflector and transmission filter optimized at a wavelength of 1.55um,�?? Appl. Phys. Lett. 81, 4502-4504 (2002).
[CrossRef]

CLEO/Pacific Rim 2003

C. C. Chen, P. G. Luan, J. Y. Chang, H, W. Lee, �??Design of omnidirectional reflector air-waveguide,�?? The 5th Pacific Rim Conference on CLEO/Pacific Rim 2003, 2 , 610-615 (2003).
[CrossRef]

J. Jap. Appl. Phys.

T. Miura, F. Koyama, �??Low-loss and polarization-Insensitive Semicondductor Hollow Waveguide with GaAs/AlAs Multi-Layer Mirrors,�?? J. Jap. Appl. Phys. 43, L21-L23 (2004).
[CrossRef]

J. Opt. Soc. Am. A

J. Opt. Soc. Am. B

Nature

B. Temelkuran, S. D. Hart, G. Benoit, J. D. Joanopoulos and Y. Fink, �??Wavelength-scalable hollow optical fibers with large photonic bandgaps for CO2 laser transmission,�?? Nature 420, 650-653 (1997).
[CrossRef]

J. D. Joannopoulos, P. R. Villeneuve, S. Fan, �??Photonic crystals: putting a new twist on light,�?? Nature 386, 143-149 (1997).
[CrossRef]

Opt. Lett.

Phys. Rev. Lett.

E. Yablonovitch, �??Inhibited spontaneous emission in solid state physics and electronics,�?? Phys. Rev. Lett. 58, 2059-2062 (1987)
[CrossRef] [PubMed]

Science

Y. Fink, J. N. Winn, F. Shanhui, C. Chiping, J. Michel, J. D. Joannopoulos, and E. L. Thomas, �??A dielectric omnidirectional reflector,�?? Science 282, 1679-1682 (1998).
[CrossRef] [PubMed]

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Figures (5)

Fig. 1.
Fig. 1.

Schematic structure of hollow waveguide with ODR

Fig. 2.
Fig. 2.

Mode pattern of SHOW-ODR as (a) with well-bonded the ODRs and (b) with a 1µm gap between the ODRs.

Fig. 3.
Fig. 3.

SEM micrograph of cross-section of SHOW-ODR.

Fig. 4.
Fig. 4.

(a) Mode pattern of a conventional single mode fiber with a core diameter of 9µm.(b) Mode pattern of SHOW -ODR. The horizontal and vertical mode size is around 1.3µm and 1.4µm, respectively.

Fig. 5.
Fig. 5.

Propagation loss of SHOW-ODR for the TE and TM modes

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