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Direct laser writing of thermally stabilized channel waveguides with Bragg gratings

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Abstract

Thermally stabilized photo-induced channel waveguides with Bragg gratings were fabricated in Ge-B-SiO2 thin glass films by exposure with KrF excimer laser and successive annealing at 600°C. The annealing reversed the photo-induced refractive index pattern and also enhanced its thermal stability. The stabilized channel waveguide with a Bragg grating showed diffraction efficiency of 18.0 dB and 18.7 dB for TE- and TM-like modes, respectively. The diffraction efficiencies and wavelengths for both modes never changed after heat treatment at 500°C, whereas the conventional photo-induced grating decayed even at 200°C.

©2004 Optical Society of America

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Figures (5)

Fig. 1.
Fig. 1. Changes in refractive indices at 632.8 nm wavelength of the unirradiated film and the homogeneously irradiated film as a function of an annealing time at 600°C. Irradiation was performed with KrF excimer laser under the condition of the photon density of 180 mJ/cm2/pulse and a shot number of 27 000.
Fig. 2.
Fig. 2. Schematic fabrication processes of a thermally stabilized channel waveguide with TG by irradiation with KrF excimer laser and thermal annealing. The refractive index distribution in Ge-B-SiO2 thin film at each process is also shown. The refractive index in the unirradiated region became higher than that of the irradiated one after annealing for longer than 10 min, in contrast with the case before annealing.
Fig. 3.
Fig. 3. Near-field pattern of the output beam from a thermally stabilized channel waveguide when the light of 1550 nm in wavelength was coupled. The height and width of the core were 4 μm and 6 μm, respectively.
Fig. 4.
Fig. 4. Transmission spectra of a thermally stabilized channel waveguide with TG for TE-and TM-like modes. Diffraction peaks of 18.0 dB and 18.7 dB for TE-like and TM-like modes were observed, which were located at 1532.7 nm and 1533.1 nm, respectively.
Fig. 5.
Fig. 5. Changes in (a) diffraction efficiencies and (b) diffraction wavelengths for TE-and TM-like modes of a thermally stabilized channel waveguide with TG after heat treatment up to 500°C. For comparison, the experimental results for a channel waveguide with a PG are also plotted. Annealing time was 1 h at each temperature.
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