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Simple fabrication of diffraction gratings by two-beam interference method in highly photosensitive hybrid sol-gel films

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Abstract

Sol-gel hybrid materials containing a large quantity of photoactive molecules exhibited large changes in both refractive index and volume by UV exposure. The materials were used for the fabrication of diffraction gratings using the two-beam interference method. With this technique, we could simply fabricate the diffraction gratings and easily control the grating periods. The diffraction effects and efficiencies of gratings rely heavily on the UV doses and the fabricated diffraction gratings showed a good diffraction performance.

©2004 Optical Society of America

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Figures (6)

Fig. 1.
Fig. 1. Refractive index changes (a) and thickness changes (b) in UV exposed and baked SGH film depending on UV doses.
Fig. 2.
Fig. 2. Illustration of two-beam interference system (a) and the schematic illustration of the interference beam illuminated by the two-beam system (b).
Fig. 3.
Fig. 3. Optical micrographs of diffraction gratings with periods of 5 µm (a), 3 µm (b), and 1 µm (c) fabricated with the two-beam interference system (photo-fabrication: before baking, optical micrographs investigation: after baking).
Fig. 4.
Fig. 4. AFM images of diffraction gratings with periods of 600 nm (a) and 500 nm (b) fabricated with the two-beam interference system (photo-fabrication: before baking, AFM investigation: after baking).
Fig. 5.
Fig. 5. CCD images of diffraction effects of the gratings with the period of 5 µm depending on exposure time (Diffraction effects in-situ measurement: before baking).
Fig. 6.
Fig. 6. Diffraction efficiencies of gratings with the period of 0.7 µm depending on exposure time (Diffraction efficiencies measurement: after baking).
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