Abstract

A negative-tone inorganic–organic hybrid SiO2:TiO2 glass is investigated for fabrication of refractive microlenses. This sol-gel material enjoys an advantage over materials used in conventional photoresist-based fabrication techniques in that it lends itself to a single-step etching-free process. The application of a high-energy beam-sensitive (HEBS) mask provides a reliable and simple method for fabrication of three-dimensional micro-optical elements with a single UV exposure. The technique of using the sol-gel material with the HEBS gray-scale mask has considerable potential for low-cost mass production of continuous-phase-level diffractive optical elements and micro-optical structures.

©2002 Optical Society of America

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References

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  1. H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
    [Crossref]
  2. S. I. Najafi, T. Touam, R. Sara, M. P. Andrews, and M. A. Farada, “Sol-gel glass waveguide and grating on silicon,” J. Lightwave Technol. 16, 1640–1646 (1998).
    [Crossref]
  3. P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
    [Crossref]
  4. P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
    [Crossref]
  5. S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A.V. Tishchenko, and O. Parriaux, “Single-step UV recording of sinusoidal surface gratings in hybrid sol-gel glasses,” Appl. Opt. 38, 6744–6748 (1999).
    [Crossref]
  6. J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M.R. Descour, and N. Peyghambarian, “Binary-phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939–1941 (1998).
    [Crossref]
  7. K. Kintaka, J. Nishii, and N. Tohge, “Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method,” Appl. Opt. 39, 489–493 (2000).
    [Crossref]
  8. Canyon Materials, Inc., website http://www.canyonmaterials.com

2001 (1)

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

2000 (1)

1999 (2)

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

S. Pelissier, D. Blanc, M. P. Andrews, S. I. Najafi, A.V. Tishchenko, and O. Parriaux, “Single-step UV recording of sinusoidal surface gratings in hybrid sol-gel glasses,” Appl. Opt. 38, 6744–6748 (1999).
[Crossref]

1998 (2)

1997 (1)

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

Andrews, M. P.

Äyräs, P.

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M.R. Descour, and N. Peyghambarian, “Binary-phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939–1941 (1998).
[Crossref]

Blanc, D.

Chan, Y. C.

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Coudray, P.

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

Descour, M.R.

Etienne, P.

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

Farada, M. A.

Honkanen, S.

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M.R. Descour, and N. Peyghambarian, “Binary-phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939–1941 (1998).
[Crossref]

Jiang, H. J.

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Kintaka, K.

Lam, Y. L.

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Levy, R.

Memdes, S. B.

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

Moreau, Y.

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

Najafi, S. I.

Ng, G. I.

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Nishii, J.

Parriaux, O.

Pelissier, S.

Peyghambarian, N.

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

J. T. Rantala, P. Äyräs, R. Levy, S. Honkanen, M.R. Descour, and N. Peyghambarian, “Binary-phase zone-plate arrays based on hybrid sol-gel glass,” Opt. Lett. 23, 1939–1941 (1998).
[Crossref]

Porque, J.

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

Rantala, J. T.

Rantala, J.T.

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

Sara, R.

Tishchenko, A.V.

Tohge, N.

Touam, T.

Yuan, X.-C.

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Appl. Opt. (2)

J. Lightwave Technol. (1)

Opt. Commun. (2)

P. Coudray, P. Etienne, Y. Moreau, J. Porque, and S. I. Najafi, “Sol-gel channel waveguide on silicon: fast direct imprinting and low cost fabrication,” Opt. Commun. 143, 199–202 (1997).
[Crossref]

P. Äyräs, J.T. Rantala, S. Honkanen, S. B. Memdes, and N. Peyghambarian, “Diffraction gratings in sol-gel films by direct contact printing using a UV-mercury lamp,” Opt. Commun. 162, 215–218 (1999).
[Crossref]

Opt. Eng. (1)

H. J. Jiang, X.-C. Yuan, Y. L. Lam, Y. C. Chan, and G. I. Ng, “Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass,” Opt. Eng. 40, 2017–2021 (2001).
[Crossref]

Opt. Lett. (1)

Other (1)

Canyon Materials, Inc., website http://www.canyonmaterials.com

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Figures (4)

Fig. 1.
Fig. 1. Schematic diagram of microlens fabrication using the HEBS gray-scale mask.

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Fig. 2.
Fig. 2. Calibration of the sol-gel material with HEBS gray-scale mask for gray-scale values from optical density 0.12 to 1.2.

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Fig. 3.
Fig. 3. Transmittance of the hybrid sol-gel thin film on quartz substrate compared with transmittance of a bare quartz substrate.

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Fig. 4.
Fig. 4. Measured surface profile of the sol-gel microlens.

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