Vibration perturbations occurring during the operation of a laser interferometer with passive and active vibration isolation are investigated using a microvibration sensor based on micromechanical accelerometers. A description of the workstation is provided, and the optical layout of the device and the method of measurement are described. Analysis of the measurement results showed that, under the influence of random microvibration, the amplitudes of the surface vibrations and the vibrations of the microscope head are different, and the difference reaches values comparable to the resolution of the laser interferometer. It is shown that, in order to reduce the measurement errors of a laser interferometer, it is useful to perform active vibration isolation during the measurement.
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