Abstract

This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur when ellipsometry and reflection spectrophotometry are used to investigate wedge-shaped thin films. Part II of this paper describes the capabilities and limitations of various experimental approaches for studying wedge-shaped films. We describe the results obtained for films produced by atomic-layer deposition and plasma chemical deposition. We study the capabilities of ellipsometry for determining the optical constants and thicknesses of wedge-shaped films. We propose a simple spectrophotometric approach for routine studies of thick wedge-shaped films.

© 2017 Optical Society of America

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