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Study of thin-film heterostructures produced by laser deposition of a platinum and a lead zirconate titanate layer

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Abstract

We investigate the feasibility of using laser deposition to produce Pt and lead zirconate titanate layers. Optical microscopy, electron microscopy, and atomic-force microscopy of the lead zirconate titanate layer reveal surface roughness on these layers. The optical parameters of the resulting layers were studied by spectral ellipsometry, including the dispersion in the index of refraction and absorption coefficient of the Pt and lead zirconate titanate surface layer. X-ray crystallography indicates that the lead zirconate titanate layer produced has the classical (111) perovskite crystallographic orientation. Similar heterostructures are used as ferroelectric memory elements.

© 2017 Optical Society of America

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