The process of local laser oxidation of a thin metallic film in the submicron size range of the irradiated region is theoretically studied. The analysis takes into account the absorptivity variation of the film during irradiation. The ratio of the film thickness to the size of the irradiated region is determined for which the thermal processes are determined by the substrate’s thermal conductivity and for which the film experiences quasi-steady-state heating. A calculational model is developed for determining the dynamics of the heating and oxidation of a thin film, allowing for the negative feedback of the thickness of the oxide layer and the absorptivity of the film. Analytical expressions are obtained for determining the variation in time of the film temperature and the thickness of the oxide layer during the action of the radiation, and the main regularities of the process are detected. The relationship between the radial gradients of the film temperature and the thickness of the oxide layer being formed is determined.
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