Abstract

We discuss implementation of a photolithographic process based on synthesized focused-image holograms used in combination with a low-quality objective. Such systems have shown promise for photolithography at extremely short wavelengths. We develop a lookup-table-based synthesis method for focused-image holograms. This method is then used to develop a software system for digital image reconstruction and synthesis in focused-image hologram projectors. We show that such a system has promising applications in the field of photolithography.

© 2016 Optical Society of America

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