Abstract

A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining with a tightly focused beam of a femtosecond laser with a wavelength of 800 nm, a repetition rate of 1 kHz, and a pulse length of 130 fs in air. We used laser direct writing technology to form periodic double-row nanohole structures, and the laser was focused with a 10× focusing objective lens (NA=0.3). We investigated the relationship between the width of structures and the speed of processing to provide knowledge of the evolution of the nanohole and nanoridge structures.

© 2015 Optical Society of America

Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses

Cheng-Yun Zhang, Jian-Wu Yao, Hai-Ying Liu, Qiao-Feng Dai, Li-Jun Wu, Sheng Lan, Vyacheslav A. Trofimov, and Tatiana M. Lysak
Opt. Lett. 37(6) 1106-1108 (2012)

Crystal orientation dependence of femtosecond laser-induced periodic surface structure on (100) silicon

Lan Jiang, Weina Han, Xiaowei Li, Qingsong Wang, Fantong Meng, and Yongfeng Lu
Opt. Lett. 39(11) 3114-3117 (2014)

Anisotropy modulations of femtosecond laser pulse induced periodic surface structures on silicon by adjusting double pulse delay

Weina Han, Lan Jiang, Xiaowei Li, Qingsong Wang, Hao Li, and YongFeng Lu
Opt. Express 22(13) 15820-15828 (2014)

Direct writing anisotropy on crystalline silicon surface by linearly polarized femtosecond laser

Pengjun Liu, Lan Jiang, Jie Hu, Weina Han, and Yongfeng Lu
Opt. Lett. 38(11) 1969-1971 (2013)

Continuous modulations of femtosecond laser-induced periodic surface structures and scanned line-widths on silicon by polarization changes

Weina Han, Lan Jiang, Xiaowei Li, Pengjun Liu, Le Xu, and YongFeng Lu
Opt. Express 21(13) 15505-15513 (2013)