Abstract

This paper shows the conditions for the appearance and the character of the erosional microstructures on the surface of silicon photodiodes and single-crystal silicon that appear after the silicon is acted on by single and multiple pulses of laser radiation in an atmosphere of pure air and of air contaminated with the vapors of an organometallic compound.

© 2015 Optical Society of America

Stability of photodiodes under irradiation with a 157-nm pulsed excimer laser

Ping-Shine Shaw, Rajeev Gupta, and Keith R. Lykke
Appl. Opt. 44(2) 197-207 (2005)

Photosensitivity of Te-doped silicon photodiodes fabricated using femtosecond laser irradiation

Rui Li, Lingyan Du, Fei Tang, Yadong Jiang, and Zhiming Wu
Appl. Opt. 55(36) 10211-10214 (2016)

Study on the inversion of doped concentration induced by millisecond pulsed laser irradiation silicon-based avalanche photodiode

Dong Yuan, Wang Di, Wei Zhi, and Fu Tai Ran
Appl. Opt. 57(5) 1051-1055 (2018)

Cavitation erosion of laser-surface-melted self-quenched Fe–AI bronze

R. J. Crisci, C. W. Draper, and C. M. Preece
Appl. Opt. 21(10) 1730-1731 (1982)

Periodic surface structures on dielectrics upon femtosecond laser pulses irradiation

Shi-Zhen Xu, Kai Sun, Cai-Zhen Yao, Hao Liu, Xin-Xiang Miao, Yi-Lan Jiang, Hai-Jun Wang, Xiao-Dong Jiang, Xiao-Dong Yuan, and Xiao-Tao Zu
Opt. Express 27(6) 8983-8993 (2019)