Abstract

Lead zirconate–titanate films to be used as the active and adhesion layers in a ferroelectric structure have been studied. The layers are obtained by magnetron sputtering on platinum-coated silicon substrates, and spectral ellipsometry is used to determine their optical characteristics. The ellipsomeric angles were measured in the 250–900-nm wavelength range, and the thicknesses (213 and 54 nm) and the dispersion of the optical constants (the refractive and absorption indices) were determined on the basis of two optical models of the layers.

© 2015 Optical Society of America

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