Abstract

This paper discusses the possibility of direct single-stage thermochemical recording on thin-film titanium, based on the difference of the optical properties of the film in the irradiated and unirradiated areas. A technique is proposed for theoretically analyzing the process of oxidizing thin metallic films, allowing for the change of the film’s absorptivity during irradiation. The main regularities of the process of laser oxidation of titanium films are determined, and, among other things, it is shown that it is preferable to use the thinnest possible films for thermochemical recording.

© 2014 Optical Society of America

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  1. A. G.  Poleshchuk, V. P.  Korolkov, “Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements,” Proc. SPIE 6732, 67320X (2007).
  2. S.  Ogata, M.  Tada, M.  Yoneda, “Electron-beam writing system and its application to large and high-density diffractive optic elements,” Appl. Opt. 33, 2032 (1994).
    [CrossRef]
  3. V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).
  4. M. N.  Libenson, Laser-Induced Optical and Thermal Processes in Condensed Media and Their Interaction (Nauka, St. Petersburg, 2007).
  5. A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
    [CrossRef]
  6. V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).
  7. V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).
  8. M. N.  Polyanskiy, “Refractive index database—Electron. data,” http://refractiveindex.info .
  9. A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

2012 (1)

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

2008 (1)

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

2007 (1)

A. G.  Poleshchuk, V. P.  Korolkov, “Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements,” Proc. SPIE 6732, 67320X (2007).

1999 (1)

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

1996 (1)

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

1994 (1)

1980 (1)

V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).

Abd-Lefdil, M.

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

Dakka, A.

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

Eichler, H.

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

Gorbunov, A. A.

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

Huey, B.

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

Korolkov, V. P.

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

A. G.  Poleshchuk, V. P.  Korolkov, “Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements,” Proc. SPIE 6732, 67320X (2007).

Kotov, G. A.

V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).

Krutenkova, E. A.

V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).

Lafait, J.

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

Libenson, M. N.

M. N.  Libenson, Laser-Induced Optical and Thermal Processes in Condensed Media and Their Interaction (Nauka, St. Petersburg, 2007).

Matyzhonok, V. N.

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

Ogata, S.

Poleshchuk, A. G.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

A. G.  Poleshchuk, V. P.  Korolkov, “Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements,” Proc. SPIE 6732, 67320X (2007).

Pompe, W.

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

Sametov, A. R.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

Sedukhin, A. G.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

Sella, C.

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

Shakhno, E. A.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

Sinev, D. A.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

Tada, M.

Veiko, V. P.

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).

Yoneda, M.

Appl. Opt. (1)

Appl. Phys. Lett. (1)

A. A.  Gorbunov, H.  Eichler, W.  Pompe, B.  Huey, “Lateral self-limitation in the laser-induced oxidation of ultrathin metal films,” Appl. Phys. Lett. 69, 2816 (1996).
[CrossRef]

Fiz. Khim. Obrab. Mat. (1)

V. P.  Veĭko, G. A.  Kotov, E. A.  Krutenkova, “Calculating the thermal strains of a pattern under laser processing of films,” Fiz. Khim. Obrab. Mat. No. 5, 37 (1980).

J. Laser Micro/Nanoeng. (1)

V. P.  Veiko, E. A.  Shakhno, A. G.  Poleshchuk, V. P.  Korolkov, V. N.  Matyzhonok, “Local laser oxidation of thin metal films: ultra-resolution in theory and in practice,” J. Laser Micro/Nanoeng. 3, 201 (2008).

Komp. Opt. (1)

V. P.  Veĭko, D. A.  Sinev, E. A.  Shakhno, A. G.  Poleshchuk, A. R.  Sametov, A. G.  Sedukhin, “Study of the features of multibeam laser thermochemical recording of diffraction microstructures,” Komp. Opt. 36, 562 (2012).

Moroccan J. Condens. Matter (1)

A.  Dakka, J.  Lafait, M.  Abd-Lefdil, C.  Sella, “Optical study of titanium dioxide thin films prepared by R.F. sputtering,” Moroccan J. Condens. Matter 2, No. 1, 153 (1999).

Proc. SPIE (1)

A. G.  Poleshchuk, V. P.  Korolkov, “Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements,” Proc. SPIE 6732, 67320X (2007).

Other (2)

M. N.  Polyanskiy, “Refractive index database—Electron. data,” http://refractiveindex.info .

M. N.  Libenson, Laser-Induced Optical and Thermal Processes in Condensed Media and Their Interaction (Nauka, St. Petersburg, 2007).

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