Abstract

Based on literature data, this paper discusses the possibilities of creating new film-forming materials by using mixed films having interior mechanical stresses that are reduced by comparison with traditional materials. The ranges of the refractive indices of mixed films having the minimum possible stress are considered.

© 2014 Optical Society of America

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  1. M. A.  Okatov, ed., Optical Technician’s Handbook (Politekhnika, St. Petersburg, 2004).
  2. V. M.  Kosevich, L. S.  Palatnik, Formation Mechanism and Substructure of Condensed Films (Nauka, Moscow, 1972).
  3. A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].
  4. R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].
  5. M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].
  6. H. K.  Pulker, Coatings on Glass (Elsevier Science B. V., Amsterdam, 1999).
  7. C. A.  Davis, “A simple model for the formation of compressive stress in thin films by ion bombardment,” Thin Solid Films 226, 30 (1993).
    [CrossRef]
  8. O.  Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
    [CrossRef]
  9. O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
    [CrossRef]
  10. L.  Maissel, R.  Glang, eds., Handbook of Thin Film Technology, vol. 2 (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977).
  11. A. E.  Ennos, “Stresses developed in optical film coatings,” Appl. Opt. 5, 51 (1966).
    [CrossRef]
  12. É. S.  Putilin, Optical Coatings. A Textbook (SPbGU ITMO, St. Petersburg, 2010).
  13. L. A.  Gubanova, V. A.  Zverev, “Creating interference coatings with improved mechanical properties, based on mixed films,” Izv. Vyssh. Uchebn. Zaved. Prib. 55, No. 4, 46 (2012).
  14. H.  Sankur, W. J.  Gunning, J. F.  Denatale, “Intrinsic stress and structural properties of mixed composition thin films,” Appl. Opt. 27, 1564 (1988).
    [CrossRef]
  15. A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).
  16. N. S.  Gluck, D. B.  Taber, J. P.  Heuer, R. L.  Hall, W. J.  Gunning, “Properties of mixed composition Si/ZnSe and ZnSe/LaF3 infrared optical thin films,” Appl. Opt. 31, 6127 (1992).
    [CrossRef]
  17. T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
    [CrossRef]

2012

L. A.  Gubanova, V. A.  Zverev, “Creating interference coatings with improved mechanical properties, based on mixed films,” Izv. Vyssh. Uchebn. Zaved. Prib. 55, No. 4, 46 (2012).

2009

O.  Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

2000

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

1993

C. A.  Davis, “A simple model for the formation of compressive stress in thin films by ion bombardment,” Thin Solid Films 226, 30 (1993).
[CrossRef]

1992

M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].

N. S.  Gluck, D. B.  Taber, J. P.  Heuer, R. L.  Hall, W. J.  Gunning, “Properties of mixed composition Si/ZnSe and ZnSe/LaF3 infrared optical thin films,” Appl. Opt. 31, 6127 (1992).
[CrossRef]

1988

1986

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

1982

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

1966

Chuvilin, A.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Davis, C. A.

C. A.  Davis, “A simple model for the formation of compressive stress in thin films by ion bombardment,” Thin Solid Films 226, 30 (1993).
[CrossRef]

Denatale, J. F.

Ebert, J.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Egorov, A. L.

M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].

Ennos, A. E.

Feigin, D. M.

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

Furman, Sh. A.

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

Gainutdinov, I. S.

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

Gisin, M. A.

M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].

Gluck, N. S.

Gorbunov, A. F.

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

Gubanova, L. A.

L. A.  Gubanova, V. A.  Zverev, “Creating interference coatings with improved mechanical properties, based on mixed films,” Izv. Vyssh. Uchebn. Zaved. Prib. 55, No. 4, 46 (2012).

Gunning, W. J.

Gusev, A. G.

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

Hahn, S. H.

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

Hall, R. L.

Heuer, J. P.

Ivanov, O. N.

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

Jakobs, S.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Kaiser, N.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Kaiser, U.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Karfidov, V. P.

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

Kim, E. J.

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

Kim, S. W.

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

Kocherba, G. I.

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

Kolitsch, A.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Kosevich, V. M.

V. M.  Kosevich, L. S.  Palatnik, Formation Mechanism and Substructure of Condensed Films (Nauka, Moscow, 1972).

Munnik, F.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Mustaev, R. M.

M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].

Nesmelov, E. A.

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

Nikitin, A. S.

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

Palatnik, L. S.

V. M.  Kosevich, L. S.  Palatnik, Formation Mechanism and Substructure of Condensed Films (Nauka, Moscow, 1972).

Pulker, H. K.

H. K.  Pulker, Coatings on Glass (Elsevier Science B. V., Amsterdam, 1999).

Putilin, É. S.

É. S.  Putilin, Optical Coatings. A Textbook (SPbGU ITMO, St. Petersburg, 2010).

Ryu, T. U.

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

Sankur, H.

Stenzel, O.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

O.  Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

Taber, D. B.

Validov, R. M.

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

Vinnichenko, M.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Wilbrandt, S.

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

Zverev, V. A.

L. A.  Gubanova, V. A.  Zverev, “Creating interference coatings with improved mechanical properties, based on mixed films,” Izv. Vyssh. Uchebn. Zaved. Prib. 55, No. 4, 46 (2012).

Appl. Opt.

Izv. Vyssh. Uchebn. Zaved. Prib.

L. A.  Gubanova, V. A.  Zverev, “Creating interference coatings with improved mechanical properties, based on mixed films,” Izv. Vyssh. Uchebn. Zaved. Prib. 55, No. 4, 46 (2012).

J. Phys. D

O.  Stenzel, “A model for calculating the effect of nanosized pores on refractive index, thermal shift and mechanical stress in optical coatings,” J. Phys. D 42, 055312 (2009).
[CrossRef]

Opt. Eng.

T. U.  Ryu, S. H.  Hahn, S. W.  Kim, E. J.  Kim, “Optical, mechanical and thermal properties of MgF2–ZnS and MgF2–Ta2O5 composite thin films deposited by coevaporation,” Opt. Eng. 39, 3207 (2000).
[CrossRef]

Opt. Mekh. Prom.

A. G.  Gusev, I. S.  Gaĭnutdinov, E. A.  Nesmelov, A. S.  Nikitin, “Internal stresses in Ge, ZnS, and ZnSe thin films,” Opt. Mekh. Prom. No. 8, 35 (1982) [Sov. J. Opt. Technol. 49, 508 (1982)].

R. M.  Validov, A. G.  Gusev, O. N.  Ivanov, E. A.  Nesmelov, “Linear expansion coefficients of films,” Opt. Mekh. Prom. No. 9, 50 (1986) [Sov. J. Opt. Technol. 53, 550 (1986)].

Opt. Zh.

M. A.  Gisin, A. L.  Egorov, R. M.  Mustaev, “Internal stresses and adhesion of PbTe films obtained by vacuum evaporation,” Opt. Zh. No. 2, 48 (1992) [Sov. J. Opt. Technol. 59, 105 (1992)].

Thin Solid Films

O.  Stenzel, S.  Wilbrandt, N.  Kaiser, M.  Vinnichenko, F.  Munnik, A.  Kolitsch, A.  Chuvilin, U.  Kaiser, J.  Ebert, S.  Jakobs, “The correlation between mechanical stress, thermal shift and refractive index in HfO2, Nb2O5, Ta2O5 and SiO2 layers and its relation to the layer porosity,” Thin Solid Films 517, 6058 (2009).
[CrossRef]

C. A.  Davis, “A simple model for the formation of compressive stress in thin films by ion bombardment,” Thin Solid Films 226, 30 (1993).
[CrossRef]

Other

A. F.  Gorbunov, V. P.  Karfidov, G. I.  Kocherba, D. M.  Feĭgin, Sh. A.  Furman, “Material for optical coatings,” Inventor’s Certificate 1 679 451, Byul. Izobr. No. 35 (1991).

M. A.  Okatov, ed., Optical Technician’s Handbook (Politekhnika, St. Petersburg, 2004).

V. M.  Kosevich, L. S.  Palatnik, Formation Mechanism and Substructure of Condensed Films (Nauka, Moscow, 1972).

L.  Maissel, R.  Glang, eds., Handbook of Thin Film Technology, vol. 2 (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977).

É. S.  Putilin, Optical Coatings. A Textbook (SPbGU ITMO, St. Petersburg, 2010).

H. K.  Pulker, Coatings on Glass (Elsevier Science B. V., Amsterdam, 1999).

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