Abstract

A polishing pad can smooth out mid-to-high spatial frequency errors automatically due to its rigidity and modeling of the smoothing effect is important. The relationship between surface error and polishing time is built here based on the Bridging model and Preston’s equation. A series of smoothing experiments using pitch tools under different motion manners were performed and the results verified exponential decay between surface error and smoothing time. At the same time, parameters describing smoothing efficiency and smoothing limit were also fitted from the results. This method can be applied to predict the smoothing effect, estimate the smoothing time and compare smoothing rates of different runs.

© 2014 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2010

2008

R. E.  Parks, “Specifications: Figure and finish are not enough,” Proc. SPIE 7071, 70710B (2008).
[CrossRef]

2004

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

1999

P. K.  Mehta, P. B.  Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” Proc. SPIE 3786, 447–459 (1999).
[CrossRef]

1998

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

1995

1982

N. J.  Brown, R. E.  Parks, “The polishing-to-figuring transition in turned optics,” Proc. SPIE 0306, 58–65 (1982).
[CrossRef]

An, H. K.

Borden, M. R.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Brown, N. J.

N. J.  Brown, R. E.  Parks, “The polishing-to-figuring transition in turned optics,” Proc. SPIE 0306, 58–65 (1982).
[CrossRef]

Burge, J. H.

Campbell, J. H.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Feit, M. D.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Hackel, R. P.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Hawley-Fedder, R. A.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Hudyma, R. M.

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

Jones, R. A.

Kim, D. W.

Mehta, P. K.

P. K.  Mehta, P. B.  Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” Proc. SPIE 3786, 447–459 (1999).
[CrossRef]

Menapace, J. A.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Park, W. H.

Parks, R. E.

R. E.  Parks, “Specifications: Figure and finish are not enough,” Proc. SPIE 7071, 70710B (2008).
[CrossRef]

N. J.  Brown, R. E.  Parks, “The polishing-to-figuring transition in turned optics,” Proc. SPIE 0306, 58–65 (1982).
[CrossRef]

Reid, P. B.

P. K.  Mehta, P. B.  Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” Proc. SPIE 3786, 447–459 (1999).
[CrossRef]

Riley, M. O.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Runkel, M.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Sommargren, G. E.

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

Stolz, C. J.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Sweeney, D. W.

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

Taylor, J. S.

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

Whitman, P. K.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Yu, J.

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

Appl. Opt.

Opt. Express

Proc. SPIE

P. K.  Mehta, P. B.  Reid, “A mathematical model for optical smoothing prediction of high-spatial frequency surface errors,” Proc. SPIE 3786, 447–459 (1999).
[CrossRef]

J. S.  Taylor, G. E.  Sommargren, D. W.  Sweeney, R. M.  Hudyma, “The fabrication and testing of optics for EUV projection lithography,” Proc. SPIE 3331, 580–590 (1998).
[CrossRef]

J. H.  Campbell, R. A.  Hawley-Fedder, C. J.  Stolz, J. A.  Menapace, M. R.  Borden, P. K.  Whitman, J.  Yu, M.  Runkel, M. O.  Riley, M. D.  Feit, R. P.  Hackel, “NIF optical material and fabrication technologies: An overview,” Proc. SPIE 5341, 84–101 (2004).
[CrossRef]

R. E.  Parks, “Specifications: Figure and finish are not enough,” Proc. SPIE 7071, 70710B (2008).
[CrossRef]

N. J.  Brown, R. E.  Parks, “The polishing-to-figuring transition in turned optics,” Proc. SPIE 0306, 58–65 (1982).
[CrossRef]

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