Abstract

The surface texture is compared for silicon oxide and cerium oxide films obtained by oblique laser deposition at identical angles and deposition rates. This paper discusses how the crystallization tendency of the oxides affects the structure and relief of the deposited film—the length and tilt angle of the resulting columnar crystals to the substrate and the presence or absence of ridges of crystallites extended in a direction perpendicular to the deposition direction. The main types of surface relief formed by oblique deposition of oxides are considered, along with the various ways the liquid crystals are oriented by means of these reliefs. It is shown that the ratio of the sizes of the liquid-crystal molecules and the characteristic inhomogeneities of the surface relief serve as the main criterion for their longitudinal or transverse orientation, since orientation with a small contact area is energetically unfavorable.

© 2015 Optical Society of America

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