Abstract

This paper discusses the possibilities of reducing the angular errors of circular optical scales fabricated by lift-off photolithography, using photomasks synthesized by means of a CLWS-300 laser image generator.

© 2013 Optical Society of America

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  1. D. Yu.  Kruchinin, “Method of fabricating optical scales by lift-off photolithography,” Russian Patent No. 2 370 799 (2009).
  2. D. Yu.  Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008) [J. Opt. Technol. 75, 282 (2008)].
  3. D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].
  4. D. Yu.  Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” Opt. Zh. 77, No. 6, 46 (2010) [J. Opt. Technol. 77, 387 (2010)].
  5. Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].
  6. S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.
  7. D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].
  8. D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].
  9. D. Yu.  Kruchinin, O. B.  Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.

2012 (1)

D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].

2011 (1)

D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].

2010 (1)

D. Yu.  Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” Opt. Zh. 77, No. 6, 46 (2010) [J. Opt. Technol. 77, 387 (2010)].

2009 (1)

D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

2008 (1)

D. Yu.  Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

2006 (1)

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Abramov, Yu. F.

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Andronov, M. P.

D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].

Anisimova, O. V.

D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

Bartik, S. A.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Chugui, Yu. V.

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Frizin, S. E.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Kir’yanov, A. V.

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Kir’yanov, V. P.

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Kiryanov, A. V.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Kiryanov, V. P.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Kokarev, S. A.

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Kruchinin, D. Y.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Kruchinin, D. Yu.

D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].

D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].

D. Yu.  Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” Opt. Zh. 77, No. 6, 46 (2010) [J. Opt. Technol. 77, 387 (2010)].

D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

D. Yu.  Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

D. Yu.  Kruchinin, “Method of fabricating optical scales by lift-off photolithography,” Russian Patent No. 2 370 799 (2009).

D. Yu.  Kruchinin, O. B.  Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.

Nikitin, V. G.

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

Tyryshkina, A. S.

D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

Yakovlev, O. B.

D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].

D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

D. Yu.  Kruchinin, O. B.  Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.

Opt. Zh. (6)

D. Yu.  Kruchinin, “Photolithography in the production of circular optical scales at the Ural Optomechanical Factory,” Opt. Zh. 75, No. 4, 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

D. Yu.  Kruchinin, O. V.  Anisimova, A. S.  Tyryshkina, “Study of the angular errors of dials fabricated by reverse photolithography,” Opt. Zh. 76, No. 6, 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

D. Yu.  Kruchinin, “Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography,” Opt. Zh. 77, No. 6, 46 (2010) [J. Opt. Technol. 77, 387 (2010)].

Yu. F.  Abramov, V. P.  Kir’yanov, A. V.  Kir’yanov, S. A.  Kokarev, D. Yu.  Kruchinin, Yu. V.  Chuguĭ, O. B.  Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser–computer and photolithographic technologies,” Opt. Zh. 73, No. 8, 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

D. Yu.  Kruchinin, O. B.  Yakovlev, “Study of the angular errors of circular optical scales fabricated by means of the CLWS-300 laser image generator,” Opt. Zh. 78, No. 6, 47 (2011) [J. Opt. Technol. 78, 383 (2011)].

D. Yu.  Kruchinin, O. B.  Yakovlev, M. P.  Andronov, “Study of how the synthesis conditions of circular optical scales fabricated using a CLWS-300 laser image generator affect their angular errors,” Opt. Zh. 79, No. 7, 41 (2012) [J. Opt. Technol. 79, 412 (2012)].

Other (3)

D. Yu.  Kruchinin, O. B.  Yakovlev, “Photomasks for the production of optical scales,” in Transactions of the International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 2, pp. 111–114.

D. Yu.  Kruchinin, “Method of fabricating optical scales by lift-off photolithography,” Russian Patent No. 2 370 799 (2009).

S. A.  Bartik, S. E.  Frizin, V. P.  Kiryanov, A. V.  Kiryanov, S. A.  Kokarev, D. Y.  Kruchinin, V. G.  Nikitin, O. B.  Yakovlev, “Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high precision angular measuring structures,” in Tenth IMEKO TC7 International Symposium, St. Petersburg, 2004, pp. 316–320.

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