Abstract

In this paper, we have analyzed the relationship between light propagation performance and uneven thickness of Su8-photo-resist based on EOPCB. Although spinning process is used to even the Su8-photo-resist, the obtained Su8-photo-resist is uneven, which directly affect cross-section shape of core layer. As long as we control h?[0,3???m] and a, b?[0,2???m], light propagation performance does not affected. But, it is easy to actually fabricate EOPCB.

© 2013 Optical Society of America

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  1. K.  Schmieder K. J.  Wolter, “Electro-optical printed circuit board (EOPCB),” in IEEE 2000 Electronic Components and Technology Conference, Las Vegas, 2000, pp. 749–753.
  2. N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.
  3. L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.
  4. X.-H.  Zheng, “Fabrication of micro-structure by using epoxy-based negative photoresist,” Opto-Electron. Eng. 33, No. 11, 36, 2006.
  5. S.  Finnveden M.  Fraggstedt, “Waveguide finite elements for curved structures,” J. Sound Vib. 312, No. 4–5, 644, 2008.
    [CrossRef]
  6. K.  Dossou M.  Fontaine, “A high order isoparametric finite element method for the computation of waveguide modes,” Comput. Methods Appl. Mech. Eng. 194, No. 6–8, 837, 2005.
    [CrossRef]

2008 (2)

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

S.  Finnveden M.  Fraggstedt, “Waveguide finite elements for curved structures,” J. Sound Vib. 312, No. 4–5, 644, 2008.
[CrossRef]

2006 (1)

X.-H.  Zheng, “Fabrication of micro-structure by using epoxy-based negative photoresist,” Opto-Electron. Eng. 33, No. 11, 36, 2006.

2005 (1)

K.  Dossou M.  Fontaine, “A high order isoparametric finite element method for the computation of waveguide modes,” Comput. Methods Appl. Mech. Eng. 194, No. 6–8, 837, 2005.
[CrossRef]

2002 (1)

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Bosman, E.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Chen, D.

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Dossou, K.

K.  Dossou M.  Fontaine, “A high order isoparametric finite element method for the computation of waveguide modes,” Comput. Methods Appl. Mech. Eng. 194, No. 6–8, 837, 2005.
[CrossRef]

Finnveden, S.

S.  Finnveden M.  Fraggstedt, “Waveguide finite elements for curved structures,” J. Sound Vib. 312, No. 4–5, 644, 2008.
[CrossRef]

Fontaine, M.

K.  Dossou M.  Fontaine, “A high order isoparametric finite element method for the computation of waveguide modes,” Comput. Methods Appl. Mech. Eng. 194, No. 6–8, 837, 2005.
[CrossRef]

Fraggstedt, M.

S.  Finnveden M.  Fraggstedt, “Waveguide finite elements for curved structures,” J. Sound Vib. 312, No. 4–5, 644, 2008.
[CrossRef]

Hendrickx, N.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Li, Y.-G.

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Schmieder, K.

K.  Schmieder K. J.  Wolter, “Electro-optical printed circuit board (EOPCB),” in IEEE 2000 Electronic Components and Technology Conference, Las Vegas, 2000, pp. 749–753.

Thienpont, H.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Van Daele, P.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Van Erps, J.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Van Steenberge, G.

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Wolter, K. J.

K.  Schmieder K. J.  Wolter, “Electro-optical printed circuit board (EOPCB),” in IEEE 2000 Electronic Components and Technology Conference, Las Vegas, 2000, pp. 749–753.

Yang, F.

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Zhang, L.-G.

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Zheng, X.-H.

X.-H.  Zheng, “Fabrication of micro-structure by using epoxy-based negative photoresist,” Opto-Electron. Eng. 33, No. 11, 36, 2006.

Comput. Methods Appl. Mech. Eng. (1)

K.  Dossou M.  Fontaine, “A high order isoparametric finite element method for the computation of waveguide modes,” Comput. Methods Appl. Mech. Eng. 194, No. 6–8, 837, 2005.
[CrossRef]

J. Sound Vib. (1)

S.  Finnveden M.  Fraggstedt, “Waveguide finite elements for curved structures,” J. Sound Vib. 312, No. 4–5, 644, 2008.
[CrossRef]

Opt. Precis. Eng (1)

L.-G.  Zhang, D.  Chen, F.  Yang, Y.-G.  Li, “Research on SU-8 resist photolithography process,” Opt. Precis. Eng. 10, No. 3, 266, 2002.

Opto-Electron. Eng. (1)

X.-H.  Zheng, “Fabrication of micro-structure by using epoxy-based negative photoresist,” Opto-Electron. Eng. 33, No. 11, 36, 2006.

Proc. SPIE. (1)

N.  Hendrickx, G.  Van Steenberge, E.  Bosman, J.  Van Erps, H.  Thienpont, P.  Van Daele, “Towards flexible routing schemes for polymer optical interconnections on printed circuit boards,” Proc. SPIE. 6899, 689904, 2008.

Other (1)

K.  Schmieder K. J.  Wolter, “Electro-optical printed circuit board (EOPCB),” in IEEE 2000 Electronic Components and Technology Conference, Las Vegas, 2000, pp. 749–753.

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