Abstract

This paper discusses an automatic interferometer that makes it possible to measure the surface profile of flat and spherical (with a large radius of curvature) optical items. The interferometer’s field of view is as much as 30 mm in diameter. The vertical configuration of the main optical elements of the interferometer allowed it to be made compact and insensitive to vibrations. The surface profile is automatically measured by means of a nine-step phase-shift method. The results of experimental testing of the interferometer and its technical characteristics are presented.

© 2013 Optical Society of America

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References

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  1. D.  Malacara, ed., Optical Shop Testing (Wiley & Sons, New York, 2007).
  2. G. É.  Romanova, M. A.  Parpin, D. A.  Seregin, Digest of Lectures for the Course Computer Test Methods of Optics (ITMO, St. Petersburg, 2011).
  3. D.  Malacara, ed., Interferogram Analysis for Optical Testing (Taylor & Francis, 2005).
  4. J. C.  Wyant, “Phase Shifting Interferometry.nb” (1998), http://fp.optics.arizona.edu/jcwyant/Optics513/ChapterNotes/Chapter05/Notes/Phase%20Shifting%20Interferometry.nb.pdf .
  5. A. A.  Kovalev K. A.  Sukhorukov, “Reconstructing the shape of a wave front with large phase changes,” Izmerit. Tekhn. No. 4, 17 (2004).

2004 (1)

A. A.  Kovalev K. A.  Sukhorukov, “Reconstructing the shape of a wave front with large phase changes,” Izmerit. Tekhn. No. 4, 17 (2004).

Kovalev, A. A.

A. A.  Kovalev K. A.  Sukhorukov, “Reconstructing the shape of a wave front with large phase changes,” Izmerit. Tekhn. No. 4, 17 (2004).

Parpin, M. A.

G. É.  Romanova, M. A.  Parpin, D. A.  Seregin, Digest of Lectures for the Course Computer Test Methods of Optics (ITMO, St. Petersburg, 2011).

Romanova, G. É.

G. É.  Romanova, M. A.  Parpin, D. A.  Seregin, Digest of Lectures for the Course Computer Test Methods of Optics (ITMO, St. Petersburg, 2011).

Seregin, D. A.

G. É.  Romanova, M. A.  Parpin, D. A.  Seregin, Digest of Lectures for the Course Computer Test Methods of Optics (ITMO, St. Petersburg, 2011).

Sukhorukov, K. A.

A. A.  Kovalev K. A.  Sukhorukov, “Reconstructing the shape of a wave front with large phase changes,” Izmerit. Tekhn. No. 4, 17 (2004).

Izmerit. Tekhn. (1)

A. A.  Kovalev K. A.  Sukhorukov, “Reconstructing the shape of a wave front with large phase changes,” Izmerit. Tekhn. No. 4, 17 (2004).

Other (4)

D.  Malacara, ed., Optical Shop Testing (Wiley & Sons, New York, 2007).

G. É.  Romanova, M. A.  Parpin, D. A.  Seregin, Digest of Lectures for the Course Computer Test Methods of Optics (ITMO, St. Petersburg, 2011).

D.  Malacara, ed., Interferogram Analysis for Optical Testing (Taylor & Francis, 2005).

J. C.  Wyant, “Phase Shifting Interferometry.nb” (1998), http://fp.optics.arizona.edu/jcwyant/Optics513/ChapterNotes/Chapter05/Notes/Phase%20Shifting%20Interferometry.nb.pdf .

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