Abstract

This paper discusses the main stages of the synthesis of focused-image holograms. It is established that the key problem of the synthesis when the projection objective has aberrations is to compute the complex amplitude of the object wave in the plane of the hologram. A high-throughput method of solving this problem is developed.

© 2013 Optical Society of America

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  1. S. N.  Koreshev, V. P.  Ratushnyĭ, “Principles of the technology of holographic submicron photolithography,” Nauchno-tekhn. Vest. SPbGU ITMO No. 23, 34 (2005).
  2. S. N.  Koreshev, V. P.  Ratushnyĭ, “Focused-image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) [Opt. Spectrosc. 101, 976 (2006)].
    [CrossRef]
  3. S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].
  4. S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].
  5. S. N.  Koreshev, I. N.  Korepin, “Choosing the synthesis parameters of focused-image hologram–projectors,” Opt. Zh. 78, No. 9, 44 (2011) [J. Opt. Technol. 78, 594 (2011)].
  6. T.  Shimobaba, H.  Nakayama, N.  Masuda, T.  Ito, “Rapid calculation algorithm of Fresnel computer-generated hologram using lookup table and wave-front-recording plane methods for three-dimensional display,” Opt. Express 18, 19504 (2010).
    [CrossRef]
  7. M. E.  Lucente, “Interactive computation of holograms using a lookup table,” J. Electron. Imaging 2, 28 (1993).
    [CrossRef]
  8. S.  Kim, E.  Kim, “Effective generation of digital holograms of three-dimensional objects using a novel lookup-table method,” Appl. Opt. 47, No. 19, D55 (2008).
    [CrossRef]
  9. S.  Kim, E.  Kim, “Fast computation of hologram patterns of a 3D object using run-length encoding and novel lookup-table methods,” Appl. Opt. 48, 1030 (2009).
    [CrossRef]

2011

S. N.  Koreshev, I. N.  Korepin, “Choosing the synthesis parameters of focused-image hologram–projectors,” Opt. Zh. 78, No. 9, 44 (2011) [J. Opt. Technol. 78, 594 (2011)].

2010

T.  Shimobaba, H.  Nakayama, N.  Masuda, T.  Ito, “Rapid calculation algorithm of Fresnel computer-generated hologram using lookup table and wave-front-recording plane methods for three-dimensional display,” Opt. Express 18, 19504 (2010).
[CrossRef]

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

2009

2008

S.  Kim, E.  Kim, “Effective generation of digital holograms of three-dimensional objects using a novel lookup-table method,” Appl. Opt. 47, No. 19, D55 (2008).
[CrossRef]

S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].

2006

S. N.  Koreshev, V. P.  Ratushnyĭ, “Focused-image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

2005

S. N.  Koreshev, V. P.  Ratushnyĭ, “Principles of the technology of holographic submicron photolithography,” Nauchno-tekhn. Vest. SPbGU ITMO No. 23, 34 (2005).

1993

M. E.  Lucente, “Interactive computation of holograms using a lookup table,” J. Electron. Imaging 2, 28 (1993).
[CrossRef]

Ito, T.

Ivanov, Yu. A.

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

Kim, E.

Kim, S.

Korepin, I. N.

S. N.  Koreshev, I. N.  Korepin, “Choosing the synthesis parameters of focused-image hologram–projectors,” Opt. Zh. 78, No. 9, 44 (2011) [J. Opt. Technol. 78, 594 (2011)].

Koreshev, S. N.

S. N.  Koreshev, I. N.  Korepin, “Choosing the synthesis parameters of focused-image hologram–projectors,” Opt. Zh. 78, No. 9, 44 (2011) [J. Opt. Technol. 78, 594 (2011)].

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].

S. N.  Koreshev, V. P.  Ratushnyĭ, “Focused-image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N.  Koreshev, V. P.  Ratushnyĭ, “Principles of the technology of holographic submicron photolithography,” Nauchno-tekhn. Vest. SPbGU ITMO No. 23, 34 (2005).

Kozulin, I. A.

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].

Lucente, M. E.

M. E.  Lucente, “Interactive computation of holograms using a lookup table,” J. Electron. Imaging 2, 28 (1993).
[CrossRef]

Masuda, N.

Nakayama, H.

Nikanorov, O. V.

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].

Ratushnyi, V. P.

S. N.  Koreshev, V. P.  Ratushnyĭ, “Focused-image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N.  Koreshev, V. P.  Ratushnyĭ, “Principles of the technology of holographic submicron photolithography,” Nauchno-tekhn. Vest. SPbGU ITMO No. 23, 34 (2005).

Shimobaba, T.

Appl. Opt.

J. Electron. Imaging

M. E.  Lucente, “Interactive computation of holograms using a lookup table,” J. Electron. Imaging 2, 28 (1993).
[CrossRef]

Nauchno-tekhn. Vest. SPbGU ITMO

S. N.  Koreshev, V. P.  Ratushnyĭ, “Principles of the technology of holographic submicron photolithography,” Nauchno-tekhn. Vest. SPbGU ITMO No. 23, 34 (2005).

Opt. Express

Opt. Spektrosk.

S. N.  Koreshev, V. P.  Ratushnyĭ, “Focused-image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

Opt. Zh.

S. N.  Koreshev, O. V.  Nikanorov, Yu. A.  Ivanov, I. A.  Kozulin, “Program system for synthesis and digital reconstruction of hologram–projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010) [J. Opt. Technol. 77, 33 (2010)].

S. N.  Koreshev, O. V.  Nikanorov, I. A.  Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008) [J. Opt. Technol. 75, 558 (2008)].

S. N.  Koreshev, I. N.  Korepin, “Choosing the synthesis parameters of focused-image hologram–projectors,” Opt. Zh. 78, No. 9, 44 (2011) [J. Opt. Technol. 78, 594 (2011)].

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