Abstract

This paper presents experimental studies of excilamps based on xenon dimers excited by a barrier discharge. Their characteristics in the natural-cooling and forced-cooling regime are investigated. It is established that the limitation of the power density of the radiation at high excitation powers is associated with the cooling efficiency of the excilamp radiator. It is shown that the radiation power density of sealed excilamps based on xenon dimers can reach 100 mW/cm2 in the quasi-steady-state regime. A circuit for an excilamp-excitation source and for the design of the excilamps is presented, along with a technique for calculating the excitation energy and power of barrier-discharge excilamps.

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  1. G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).
  2. G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).
  3. B. Eliasson and U. Kogelschatz, “UV excimer radiation from dielectric-barrier discharges,” Appl. Phys. B 46, 299 (1988).
    [CrossRef]
  4. B. Gellert and U. Kogelschatz, “Generation of excimer emission in dielectric barrier discharges,” Appl. Phys. B 52, 14 (1991).
    [CrossRef]
  5. H. Esrom and U. Kogelschatz, “Modification of surfaces with new excimer UV Sources,” Thin Solid Films 218, 231 (1992).
    [CrossRef]
  6. U. Kogelschatz, “Excimer lamps: history, discharge physics and industrial applications,” Proc. SPIE 5483, 272 (2004).
    [CrossRef]
  7. F. Vollkommer and L. Hitzschke, “Dielectric barrier discharge,” in Proceedings of the Eighth International Symposium on the Science and Technology of Light Sources (LS–8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, pp. 51–60.
  8. R. J. Carman and R. P. Mildren, “Computer modeling of a short-pulse excited dielectric barrier discharge xenon excimer lamp (??172 nm),” J. Phys. D: Appl. Phys. 36, 19 (2003).
    [CrossRef]
  9. Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
    [CrossRef]
  10. H. Akashi, A. Oda, and Y. Sakai, “Effect of gas heating on excimer distribution in DBD Xe excimer lamp,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 851–854.
  11. F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.
  12. M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].
  13. M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.
  14. E. Arnold, R. Dreiskemper, and S. Reber, “High-power excimer sources,” in Proceedings of the Eighth International Symposium on Science and Technology of Light Sources (LS-8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, IL12, pp. 90–98.
  15. M. I. Lomaev, “Determining the energy input into excilamps with barrier-discharge excitation,” Opt. Atmos. Okeana 14, 1091 (2001).
  16. T. C. Manley, “The electric characteristics of the ozonator discharge,” Trans. Electrochem. Soc. 84, 83 (1943).
    [CrossRef]

2006

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

2004

U. Kogelschatz, “Excimer lamps: history, discharge physics and industrial applications,” Proc. SPIE 5483, 272 (2004).
[CrossRef]

2003

R. J. Carman and R. P. Mildren, “Computer modeling of a short-pulse excited dielectric barrier discharge xenon excimer lamp (??172 nm),” J. Phys. D: Appl. Phys. 36, 19 (2003).
[CrossRef]

2001

M. I. Lomaev, “Determining the energy input into excilamps with barrier-discharge excitation,” Opt. Atmos. Okeana 14, 1091 (2001).

1992

H. Esrom and U. Kogelschatz, “Modification of surfaces with new excimer UV Sources,” Thin Solid Films 218, 231 (1992).
[CrossRef]

1991

B. Gellert and U. Kogelschatz, “Generation of excimer emission in dielectric barrier discharges,” Appl. Phys. B 52, 14 (1991).
[CrossRef]

1988

B. Eliasson and U. Kogelschatz, “UV excimer radiation from dielectric-barrier discharges,” Appl. Phys. B 46, 299 (1988).
[CrossRef]

1984

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

1982

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

1943

T. C. Manley, “The electric characteristics of the ozonator discharge,” Trans. Electrochem. Soc. 84, 83 (1943).
[CrossRef]

Agod, A.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Akashi, H.

H. Akashi, A. Oda, and Y. Sakai, “Effect of gas heating on excimer distribution in DBD Xe excimer lamp,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 851–854.

Arnold, E.

E. Arnold, R. Dreiskemper, and S. Reber, “High-power excimer sources,” in Proceedings of the Eighth International Symposium on Science and Technology of Light Sources (LS-8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, IL12, pp. 90–98.

Beleznai, Sz.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Carman, R. J.

R. J. Carman and R. P. Mildren, “Computer modeling of a short-pulse excited dielectric barrier discharge xenon excimer lamp (??172 nm),” J. Phys. D: Appl. Phys. 36, 19 (2003).
[CrossRef]

Dreiskemper, R.

E. Arnold, R. Dreiskemper, and S. Reber, “High-power excimer sources,” in Proceedings of the Eighth International Symposium on Science and Technology of Light Sources (LS-8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, IL12, pp. 90–98.

Eliasson, B.

B. Eliasson and U. Kogelschatz, “UV excimer radiation from dielectric-barrier discharges,” Appl. Phys. B 46, 299 (1988).
[CrossRef]

Esrom, H.

H. Esrom and U. Kogelschatz, “Modification of surfaces with new excimer UV Sources,” Thin Solid Films 218, 231 (1992).
[CrossRef]

Gellert, B.

B. Gellert and U. Kogelschatz, “Generation of excimer emission in dielectric barrier discharges,” Appl. Phys. B 52, 14 (1991).
[CrossRef]

Hitzschke, L.

F. Vollkommer and L. Hitzschke, “Dielectric barrier discharge,” in Proceedings of the Eighth International Symposium on the Science and Technology of Light Sources (LS–8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, pp. 51–60.

Jabbour, G.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

Jakab, L.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Juhasz, R.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Kirillova, N. N.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

Kogelschatz, U.

U. Kogelschatz, “Excimer lamps: history, discharge physics and industrial applications,” Proc. SPIE 5483, 272 (2004).
[CrossRef]

H. Esrom and U. Kogelschatz, “Modification of surfaces with new excimer UV Sources,” Thin Solid Films 218, 231 (1992).
[CrossRef]

B. Gellert and U. Kogelschatz, “Generation of excimer emission in dielectric barrier discharges,” Appl. Phys. B 52, 14 (1991).
[CrossRef]

B. Eliasson and U. Kogelschatz, “UV excimer radiation from dielectric-barrier discharges,” Appl. Phys. B 46, 299 (1988).
[CrossRef]

Lauro, R.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

Ledru, G.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

Lomaev, M. I.

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

M. I. Lomaev, “Determining the energy input into excilamps with barrier-discharge excitation,” Opt. Atmos. Okeana 14, 1091 (2001).

M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.

Manley, T. C.

T. C. Manley, “The electric characteristics of the ozonator discharge,” Trans. Electrochem. Soc. 84, 83 (1943).
[CrossRef]

Marchal, F.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

Maros, I.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Mihajlik, G.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Mildren, R. P.

R. J. Carman and R. P. Mildren, “Computer modeling of a short-pulse excited dielectric barrier discharge xenon excimer lamp (??172 nm),” J. Phys. D: Appl. Phys. 36, 19 (2003).
[CrossRef]

Nemeth, Zs.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Oda, A.

H. Akashi, A. Oda, and Y. Sakai, “Effect of gas heating on excimer distribution in DBD Xe excimer lamp,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 851–854.

Pavlovskaya, E. N.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

Podmoshenskii, I. V.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

Reber, S.

E. Arnold, R. Dreiskemper, and S. Reber, “High-power excimer sources,” in Proceedings of the Eighth International Symposium on Science and Technology of Light Sources (LS-8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, IL12, pp. 90–98.

Richter, P.

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Sakai, Y.

H. Akashi, A. Oda, and Y. Sakai, “Effect of gas heating on excimer distribution in DBD Xe excimer lamp,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 851–854.

Sewraj, N.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

Shitts, D. V.

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.

Skakun, V. S.

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.

Tarasenko, V. F.

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.

Volkova, G. A.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

Vollkommer, F.

F. Vollkommer and L. Hitzschke, “Dielectric barrier discharge,” in Proceedings of the Eighth International Symposium on the Science and Technology of Light Sources (LS–8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, pp. 51–60.

Yakovleva, A. V.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

Appl. Phys. B

B. Eliasson and U. Kogelschatz, “UV excimer radiation from dielectric-barrier discharges,” Appl. Phys. B 46, 299 (1988).
[CrossRef]

B. Gellert and U. Kogelschatz, “Generation of excimer emission in dielectric barrier discharges,” Appl. Phys. B 52, 14 (1991).
[CrossRef]

Byul. Izobr.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, I. V. Podmoshenski?, and A. V. Yakovleva, “Lamp for irradiation in the VUV,” Byul. Izobr. No. 41, 179 (1982).

J. Phys. D: Appl. Phys.

R. J. Carman and R. P. Mildren, “Computer modeling of a short-pulse excited dielectric barrier discharge xenon excimer lamp (??172 nm),” J. Phys. D: Appl. Phys. 36, 19 (2003).
[CrossRef]

Sz. Beleznai, G. Mihajlik, A. Agod, I. Maros, R. Juhasz, Zs. Nemeth, L. Jakab, and P. Richter, “High-efficiency dielectric barrier Xe discharge lamp: theoretical and experimental investigations,” J. Phys. D: Appl. Phys. 39, 3777 (2006).
[CrossRef]

Opt. Atmos. Okeana

M. I. Lomaev, “Determining the energy input into excilamps with barrier-discharge excitation,” Opt. Atmos. Okeana 14, 1091 (2001).

Pis’ma Zh. Tekh. Fiz.

M. I. Lomaev, V. S. Skakun, V. F. Tarasenko, and D. V. Shitts, “A high-power xenon dimer excilamp,” Pis’ma Zh. Tekh. Fiz. 32, No. 11, 68 (2006). [Tech. Phys. Lett. 32, 495 (2006)].

Proc. SPIE

U. Kogelschatz, “Excimer lamps: history, discharge physics and industrial applications,” Proc. SPIE 5483, 272 (2004).
[CrossRef]

Thin Solid Films

H. Esrom and U. Kogelschatz, “Modification of surfaces with new excimer UV Sources,” Thin Solid Films 218, 231 (1992).
[CrossRef]

Trans. Electrochem. Soc.

T. C. Manley, “The electric characteristics of the ozonator discharge,” Trans. Electrochem. Soc. 84, 83 (1943).
[CrossRef]

Zh. Prikl. Spektrosk.

G. A. Volkova, N. N. Kirillova, E. N. Pavlovskaya, and A. V. Yakovleva, “VUV lamp based on a barrier discharge in inert gases,” Zh. Prikl. Spektrosk. 41, 681 (1984).

Other

H. Akashi, A. Oda, and Y. Sakai, “Effect of gas heating on excimer distribution in DBD Xe excimer lamp,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 851–854.

F. Marchal, R. Lauro, G. Ledru, G. Jabbour, and N. Sewraj, “Formation of xenon excimer between 200 and 300 K following selective excitation of the Xe (6s) metastable state,” in Proceedings of the Twenty-Eighth ICPIG, Prague, Czech Republic, July 15–20, 2007, pp. 100–103.

F. Vollkommer and L. Hitzschke, “Dielectric barrier discharge,” in Proceedings of the Eighth International Symposium on the Science and Technology of Light Sources (LS–8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, pp. 51–60.

M. I. Lomaev, V. F. Tarasenko, D. V. Shitts, and V. S. Skakun, “Gas-discharge radiation source,” Byull. Izobr. No. 32, Patent for invention No. 2 310 947, published 11/20/2007.

E. Arnold, R. Dreiskemper, and S. Reber, “High-power excimer sources,” in Proceedings of the Eighth International Symposium on Science and Technology of Light Sources (LS-8), Greifswald, Germany, 30 Aug.–3 Sept. 1998, IL12, pp. 90–98.

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