Abstract

A new version of the modulation interference microscope with a long-path coordinate stage on aeromagnetic guides has been developed that can displace the microscope with nonrectilinearity no greater than 0.1 µm on a path length of up to 300 mm. The given modification of the microscope can be used to investigate the surface of large optical items having dimensions up to 300 × 300 × 100 mm with a resolution of 0.1 nm along the vertical and 10–100 nm in the sample plane. The design and operating principles of the main modules of the microscope are considered. Examples are used to show that the microscope thus developed has possibilities and advantages when optical surfaces are being investigated.

© 2012 OSA

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References

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  1. A. H. Bennet, Phase Microscopy (John Wiley & Sons, Inc., New York, 1951).
  2. S. G. Romanov and M. Bardosova, “Polarization anisotropy of optical transmission in opals and Langmuir–Blodgett crystals,” Fiz. Tverd. Tela 52, 495 (2010). [Phys. Solid State 52, 533 (2010)].
  3. V. A. Andreev and K. V. Indukaev, “The problem of sub-Rayleigh resolution in microscopy,” J. Russ. Laser Res. 24, No. 3, 1 (2003).
    [CrossRef]
  4. T. S. Fefelova, “New designs of motion converters for mechatronic modules,” Fund. Issled. No. 3, 50 (2010).
  5. GOST 11141-84, “Optical items. Surface-cleanliness classes. Monitoring methods,” in Int. 1985-01-01 (Izd. Stand, Moscow, 1984).
  6. GOST 2789-73, “Surface roughness. Parameters and characteristics,” (Izd. Stand, Moscow, 1973).
  7. V. V. Azarova, Yu. D. Golyaev, and G. Ya. Kolodnyĭ, “Precision optical surfaces and laser mirrors. Their metrology and application,” in Physical and Quantum Electronics, in Transactions of the 50th Scientific–Technical Conf. of MFTI, 2007, pp. 45–46, Part 5.
  8. A. L. Karasev, A. V. Smirnov, L. I. Smirnov, and M. V. Yurenkov, “Method of protecting a valuable object,” Eurasian Patent No. 011567 (2008).
  9. J. C. Wyant, “White light interferometry exhibits error,” Proc. SPIE 4737, 98 (2002).
    [CrossRef]
  10. “Profilometer with a single sensor for noncontact 2D and 3D surface metrology,” http://www.frt-gmbh.com/en/products/microprof/microprof/.

2010 (2)

S. G. Romanov and M. Bardosova, “Polarization anisotropy of optical transmission in opals and Langmuir–Blodgett crystals,” Fiz. Tverd. Tela 52, 495 (2010). [Phys. Solid State 52, 533 (2010)].

T. S. Fefelova, “New designs of motion converters for mechatronic modules,” Fund. Issled. No. 3, 50 (2010).

2003 (1)

V. A. Andreev and K. V. Indukaev, “The problem of sub-Rayleigh resolution in microscopy,” J. Russ. Laser Res. 24, No. 3, 1 (2003).
[CrossRef]

2002 (1)

J. C. Wyant, “White light interferometry exhibits error,” Proc. SPIE 4737, 98 (2002).
[CrossRef]

Andreev, V. A.

V. A. Andreev and K. V. Indukaev, “The problem of sub-Rayleigh resolution in microscopy,” J. Russ. Laser Res. 24, No. 3, 1 (2003).
[CrossRef]

Azarova, V. V.

V. V. Azarova, Yu. D. Golyaev, and G. Ya. Kolodnyĭ, “Precision optical surfaces and laser mirrors. Their metrology and application,” in Physical and Quantum Electronics, in Transactions of the 50th Scientific–Technical Conf. of MFTI, 2007, pp. 45–46, Part 5.

Bardosova, M.

S. G. Romanov and M. Bardosova, “Polarization anisotropy of optical transmission in opals and Langmuir–Blodgett crystals,” Fiz. Tverd. Tela 52, 495 (2010). [Phys. Solid State 52, 533 (2010)].

Bennet, A. H.

A. H. Bennet, Phase Microscopy (John Wiley & Sons, Inc., New York, 1951).

Fefelova, T. S.

T. S. Fefelova, “New designs of motion converters for mechatronic modules,” Fund. Issled. No. 3, 50 (2010).

Golyaev, Yu. D.

V. V. Azarova, Yu. D. Golyaev, and G. Ya. Kolodnyĭ, “Precision optical surfaces and laser mirrors. Their metrology and application,” in Physical and Quantum Electronics, in Transactions of the 50th Scientific–Technical Conf. of MFTI, 2007, pp. 45–46, Part 5.

Indukaev, K. V.

V. A. Andreev and K. V. Indukaev, “The problem of sub-Rayleigh resolution in microscopy,” J. Russ. Laser Res. 24, No. 3, 1 (2003).
[CrossRef]

Kolodnyi, G. Ya.

V. V. Azarova, Yu. D. Golyaev, and G. Ya. Kolodnyĭ, “Precision optical surfaces and laser mirrors. Their metrology and application,” in Physical and Quantum Electronics, in Transactions of the 50th Scientific–Technical Conf. of MFTI, 2007, pp. 45–46, Part 5.

Romanov, S. G.

S. G. Romanov and M. Bardosova, “Polarization anisotropy of optical transmission in opals and Langmuir–Blodgett crystals,” Fiz. Tverd. Tela 52, 495 (2010). [Phys. Solid State 52, 533 (2010)].

Wyant, J. C.

J. C. Wyant, “White light interferometry exhibits error,” Proc. SPIE 4737, 98 (2002).
[CrossRef]

Fiz. Tverd. Tela (1)

S. G. Romanov and M. Bardosova, “Polarization anisotropy of optical transmission in opals and Langmuir–Blodgett crystals,” Fiz. Tverd. Tela 52, 495 (2010). [Phys. Solid State 52, 533 (2010)].

Fund. Issled. (1)

T. S. Fefelova, “New designs of motion converters for mechatronic modules,” Fund. Issled. No. 3, 50 (2010).

J. Russ. Laser Res. (1)

V. A. Andreev and K. V. Indukaev, “The problem of sub-Rayleigh resolution in microscopy,” J. Russ. Laser Res. 24, No. 3, 1 (2003).
[CrossRef]

Proc. SPIE (1)

J. C. Wyant, “White light interferometry exhibits error,” Proc. SPIE 4737, 98 (2002).
[CrossRef]

Other (6)

“Profilometer with a single sensor for noncontact 2D and 3D surface metrology,” http://www.frt-gmbh.com/en/products/microprof/microprof/.

GOST 11141-84, “Optical items. Surface-cleanliness classes. Monitoring methods,” in Int. 1985-01-01 (Izd. Stand, Moscow, 1984).

GOST 2789-73, “Surface roughness. Parameters and characteristics,” (Izd. Stand, Moscow, 1973).

V. V. Azarova, Yu. D. Golyaev, and G. Ya. Kolodnyĭ, “Precision optical surfaces and laser mirrors. Their metrology and application,” in Physical and Quantum Electronics, in Transactions of the 50th Scientific–Technical Conf. of MFTI, 2007, pp. 45–46, Part 5.

A. L. Karasev, A. V. Smirnov, L. I. Smirnov, and M. V. Yurenkov, “Method of protecting a valuable object,” Eurasian Patent No. 011567 (2008).

A. H. Bennet, Phase Microscopy (John Wiley & Sons, Inc., New York, 1951).

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