Abstract

This paper presents the results of investigating the parameters (minimum repetition period of the elements and porosity) of structures obtained under the action of argon laser radiation on thin films of glassy chalcogenide semiconductor deposited on layers of x-ray-amorphous chromium. It is shown that thin films of a three-component glassy semiconductor exposed by radiation with wavelength 0.488 µm can be used in the method of interference photolithography to obtain structures with a minimum period of 260 nm and a minimum size of the structural element of 65 nm. It is established that the minimum size of a structural element can be reduced to 50 nm when the repetition period of the elements is increased to 600 nm by using the “two-mask” technology of interference photolithography.

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  1. V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
    [CrossRef]
  2. M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
    [CrossRef] [PubMed]
  3. S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].
  4. S. N. Koreshev and V. P. Ratushnyĭ, “Nanostructurization of thin chalcogenide glassy semiconductor films during formation of relief-phase hologram structures,” Opt. Spektrosk. 106, 331 (2009). [Opt. Spectrosc. 106, 288 (2009)].
  5. S. N. Koreshev and V. P. Ratushnyĭ, “How the parasitic-nanostructuring parameters of relief-phase holographic structures on thin glassy-chalcogenide-semiconductor films depend on their relief height,” Opt. Zh. 76, No. 5, 47 (2009). [J. Opt. Technol. 76, 286 (2009)].

2009

S. N. Koreshev and V. P. Ratushnyĭ, “Nanostructurization of thin chalcogenide glassy semiconductor films during formation of relief-phase hologram structures,” Opt. Spektrosk. 106, 331 (2009). [Opt. Spectrosc. 106, 288 (2009)].

S. N. Koreshev and V. P. Ratushnyĭ, “How the parasitic-nanostructuring parameters of relief-phase holographic structures on thin glassy-chalcogenide-semiconductor films depend on their relief height,” Opt. Zh. 76, No. 5, 47 (2009). [J. Opt. Technol. 76, 286 (2009)].

2007

S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].

2000

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

1997

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
[CrossRef]

Belykh, A. V.

S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].

Berger, V.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
[CrossRef]

Campbell, M.

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Costard, E.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
[CrossRef]

Denning, R. G.

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Gauthier-Lafaye, O.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
[CrossRef]

Harrison, M. T.

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Koreshev, S. N.

S. N. Koreshev and V. P. Ratushnyĭ, “How the parasitic-nanostructuring parameters of relief-phase holographic structures on thin glassy-chalcogenide-semiconductor films depend on their relief height,” Opt. Zh. 76, No. 5, 47 (2009). [J. Opt. Technol. 76, 286 (2009)].

S. N. Koreshev and V. P. Ratushnyĭ, “Nanostructurization of thin chalcogenide glassy semiconductor films during formation of relief-phase hologram structures,” Opt. Spektrosk. 106, 331 (2009). [Opt. Spectrosc. 106, 288 (2009)].

S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].

Ratushnyi, V. P.

S. N. Koreshev and V. P. Ratushnyĭ, “Nanostructurization of thin chalcogenide glassy semiconductor films during formation of relief-phase hologram structures,” Opt. Spektrosk. 106, 331 (2009). [Opt. Spectrosc. 106, 288 (2009)].

S. N. Koreshev and V. P. Ratushnyĭ, “How the parasitic-nanostructuring parameters of relief-phase holographic structures on thin glassy-chalcogenide-semiconductor films depend on their relief height,” Opt. Zh. 76, No. 5, 47 (2009). [J. Opt. Technol. 76, 286 (2009)].

S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].

Sharp, D. N.

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Turberfield, A. J.

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Electron. Lett.

V. Berger, O. Gauthier-Lafaye, and E. Costard, “Fabrication of a 2D photonic band gap by a holographic method,” Electron. Lett. 33, 425 (1997).
[CrossRef]

Nature

M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, and A. J. Turberfield, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404, 53 (2000).
[CrossRef] [PubMed]

Opt. Spektrosk.

S. N. Koreshev and V. P. Ratushnyĭ, “Nanostructurization of thin chalcogenide glassy semiconductor films during formation of relief-phase hologram structures,” Opt. Spektrosk. 106, 331 (2009). [Opt. Spectrosc. 106, 288 (2009)].

Opt. Zh.

S. N. Koreshev and V. P. Ratushnyĭ, “How the parasitic-nanostructuring parameters of relief-phase holographic structures on thin glassy-chalcogenide-semiconductor films depend on their relief height,” Opt. Zh. 76, No. 5, 47 (2009). [J. Opt. Technol. 76, 286 (2009)].

S. N. Koreshev, A. V. Belykh, and V. P. Ratushnyĭ, “Holographic photolithography based on thin films of a glassy chalcogenide semiconductor,” Opt. Zh. 74, No. 7, 80 (2007). [J. Opt. Technol. 74, 504 (2007)].

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