Abstract

A method is proposed for synthesizing Fresnel hologram projectors, based on breaking down the structure of an object into typical elements. The possibility provided by this method of substantially reducing the volume of required computations is pointed out as one of the main advantages of the proposal. A software package for synthesizing and reconstructing Fresnel hologram projectors is described that implements this method. The results of an experimental study of the package are presented, obtained in the process of a comparative analysis of the proposed method and a traditional method of synthesizing hologram projectors.

© 2012 OSA

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  1. S. N. Koreshev and V. P. Ratushnyĭ, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].
  2. S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
    [CrossRef]
  3. F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
    [CrossRef]
  4. S. N. Koreshev and V. P. Ratushnyĭ, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
    [CrossRef]
  5. C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
    [CrossRef]
  6. P. P. Naullenau, F. Salmassi, E. M. Cullikson, and J. A. Liddle, “Design and fabrication of a high-efficiency extreme-ultraviolet binary phase-only computer-generated hologram,” Appl. Opt. 46, 2581 (2007).
    [CrossRef]
  7. S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
    [CrossRef]
  8. S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].
  9. T. Shimobaba, H. Nakayama, N. Masuda, and T. Ito, “Rapid calculation algorithm of Fresnel computer-generated hologram using look-up table and wavefront-recording plane methods for three-dimensional display,” Opt. Express 18, 19504 (2010).
    [CrossRef]
  10. M. Lucente, “Interactive computation of holograms using a ‘look-up table’,” J. Electron. Imaging 2, No. 1, 28 (1993).
    [CrossRef]
  11. S. C. Kim and E. S. Kim, “Effective generation of digital holograms of three-dimensional objects using a novel ‘look-up table method’,” Appl. Opt. 47, No. 19, D55 (2008).
    [CrossRef]
  12. S. C. Kim and E. S. Kim, “Fast computation of hologram patterns of a 3D object using run-length encoding and novel look-up table methods,” Appl. Opt. 48, 1030 (2009).
    [CrossRef]
  13. S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

2011 (1)

S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
[CrossRef]

2010 (2)

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

T. Shimobaba, H. Nakayama, N. Masuda, and T. Ito, “Rapid calculation algorithm of Fresnel computer-generated hologram using look-up table and wavefront-recording plane methods for three-dimensional display,” Opt. Express 18, 19504 (2010).
[CrossRef]

2009 (1)

2008 (2)

S. C. Kim and E. S. Kim, “Effective generation of digital holograms of three-dimensional objects using a novel ‘look-up table method’,” Appl. Opt. 47, No. 19, D55 (2008).
[CrossRef]

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

2007 (1)

2006 (1)

S. N. Koreshev and V. P. Ratushnyĭ, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

2004 (2)

S. N. Koreshev and V. P. Ratushnyĭ, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

1995 (1)

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

1993 (1)

M. Lucente, “Interactive computation of holograms using a ‘look-up table’,” J. Electron. Imaging 2, No. 1, 28 (1993).
[CrossRef]

1992 (1)

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Clube, F.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Cullikson, E. M.

Darbellay, Y.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Gray, S.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Howells, M.

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Ito, T.

Ivanov, Yu. A.

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

Jacobsen, C.

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Kim, E. S.

Kim, S. C.

Koreshev, S. N.

S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
[CrossRef]

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

S. N. Koreshev and V. P. Ratushnyĭ, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N. Koreshev and V. P. Ratushnyĭ, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

Kozulin, I. A.

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

Liddle, J. A.

Lucente, M.

M. Lucente, “Interactive computation of holograms using a ‘look-up table’,” J. Electron. Imaging 2, No. 1, 28 (1993).
[CrossRef]

Malfoy, S.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Masuda, N.

Nakayama, H.

Naullenau, P. P.

Nikanorov, O. V.

S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
[CrossRef]

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

Ratushnyi, V. P.

S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
[CrossRef]

S. N. Koreshev and V. P. Ratushnyĭ, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N. Koreshev and V. P. Ratushnyĭ, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

Salmassi, F.

Shimobaba, T.

Struchen, D.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Tisserand, J.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Appl. Opt. (3)

J. Appl. Phys. (1)

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: a study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

J. Electron. Imaging (1)

M. Lucente, “Interactive computation of holograms using a ‘look-up table’,” J. Electron. Imaging 2, No. 1, 28 (1993).
[CrossRef]

Opt. Eng. (1)

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Opt. Express (1)

Opt. Spektrosk. (2)

S. N. Koreshev and V. P. Ratushnyĭ, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006). [Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N. Koreshev, O. V. Nikanorov, and V. P. Ratushnyĭ, “Reconstruction of synthesized holograms fresnel projectors at angles of incidence of reconstructing wave that exceed the angle of incidence of the reference wave in hologram synthesis,” Opt. Spektrosk. 111, 156 (2011). [Opt. Spectrosc. 111, 134 (2011)].
[CrossRef]

Opt. Zh. (3)

S. N. Koreshev, O. V. Nikanorov, Yu. A. Ivanov, and I. A. Kozulin, “Program system for synthesis and digital reconstruction of holograms-projectors: synthesis parameters effect on image reconstruction quality,” Opt. Zh. 77, No. 1, 42 (2010). [J. Opt. Technol. 77, 33 (2010)].

S. N. Koreshev, O. V. Nikanorov, and I. A. Kozulin, “Choosing the synthesis parameters of hologram-projectors for photolithography,” Opt. Zh. 75, No. 9, 29 (2008). [J. Opt. Technol. 75, 558 (2008)].

S. N. Koreshev and V. P. Ratushnyĭ, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004). [J. Opt. Technol. 71, 673 (2004)].

Proc. SPIE (1)

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme short-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

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