Abstract

This paper discusses the results of an investigation of the angular errors of circular optical scales fabricated by means of a laser image generator.

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  1. D. Yu. Kruchinin, "Method of fabricating optical scales by inverse photolithography," Russian Patent No. 2370799; 2009.
  2. D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Opt. Zh. 75(4), 92 (2008) [J. Opt. Technol. 75, 282 (2008)].
  3. Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].
  4. S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.
  5. D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

2009

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

2008

D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Opt. Zh. 75(4), 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

2006

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Abramov, Yu. F.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Anisimova, O. V.

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

Bartik, S. A.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Chugui, Yu. V.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Frizin, S. E.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Kir’yanov, A. V.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Kir’yanov, V. P.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

Kiryanov, A. V.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Kiryanov, V. P.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Kokarev, S. A.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Kruchinin, D. Y.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Kruchinin, D. Yu.

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Opt. Zh. 75(4), 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

D. Yu. Kruchinin, "Method of fabricating optical scales by inverse photolithography," Russian Patent No. 2370799; 2009.

Nikitin, V. G.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Tyryshkina, A. S.

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

Yakovlev, O. B.

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

Opt. Zh.

D. Yu. Kruchinin, "Photolithography in the production of circular optical scales at the Ural Optomechanical Factory," Opt. Zh. 75(4), 92 (2008) [J. Opt. Technol. 75, 282 (2008)].

Yu. F. Abramov, V. P. Kir’yanov, A. V. Kir’yanov, S. A. Kokarev, D. Yu. Kruchinin, Yu. V. Chuguĭ, and O. B. Yakovlev, "Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser-computer and photolithographic technologies," Opt. Zh. 73(8), 61 (2006) [J. Opt. Technol. 73, 544 (2006)].

D. Yu. Kruchinin, O. V. Anisimova, and A. S. Tyryshkina, "Study of the angular errors of dials fabricated by inverse photolithography," Opt. Zh. 76(6), 70 (2009) [J. Opt. Technol. 76, 373 (2009)].

Other

D. Yu. Kruchinin, "Method of fabricating optical scales by inverse photolithography," Russian Patent No. 2370799; 2009.

S. A. Bartik, S. E. Frizin, V. P. Kiryanov, A. V. Kiryanov, S. A. Kokarev, D. Y. Kruchinin, V. G. Nikitin, and O. B. Yakovlev, "Development of a technique for the determination of metrological parameters of technological system CLWS-300/C for synthesis of high-precision angular measuring structures," Tenth IMEKO TC7 International Symposium, 2004, St. Petersburg, pp. 316‒320.

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