Abstract

A method of rapid monitoring of the degree of surface cleanliness of substrates intended to form the microrelief of diffraction optical elements is developed in this article. A method for monitoring the nanoroughness and degree of surface cleanliness from the dynamic state of a liquid drop has been developed and patented. The results of experiments on estimating the behavior of a liquid drop, obtained by means of a high-speed video camera, are presented. The device is used to efficiently correct the final cleaning process of dielectric substrates.

© 2009 Optical Society of America

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