Abstract

This paper discusses the features of the design and technology of fabricating a series of linear photosensitive charge-coupled devices (LCCDs), with from 3072 to 6144 elements. The photosensitive elements of these devices have a step of 13μm, which provides a resolution of 38.5 line pairs/mm. The main geometrical and photoelectric parameters of the LCCDs are presented.

© 2009 Optical Society of America

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