This paper presents the results of the development of photodetectors for the IR and terahertz ranges, based on uncooled microbolometer detector arrays fabricated by the sol-gel technology. Detectors with a 320×240-element format are demonstrated, having a temperature resolution better than 100mK and a threshold power of 160pW/pixel in the 8-14-μm range, with a response time of 12-16ms. The threshold power at a wavelength of 130μm was 33nW/pixel for a terahertz image visualized in a 160×120 format at a rate of 90frame/sec. A design was developed to match an antenna with an uncooled high-resistance integrated microbolometer, allowing the detector sensitivity to be significantly increased in the terahertz range.
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