Abstract

This paper discusses the process of mechanical and chemomechanical polishing of zinc selenide using rosin-based polishing resins having various physicochemical characteristics. A study is carried out of how the polishing time, the pressure, and the properties of the polishing resins used here affect the removal rate and the surface quality of optical elements made from polycrystalline zinc selenide during their mechanical polishing. It is shown that the surface quality substantially depends on the polishing conditions and the characteristics of the rosin-based resins used here.

© 2008 Optical Society of America

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  1. A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).
  2. V. M. Vinokurov, Study of Glass-Polishing Processes (Mashinostroenie, Moscow, 1967).
  3. G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).
  4. Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].
  5. T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
    [CrossRef]
  6. G. Herrington, D. A. Gregory, and W. Otto, “Infrared absorption in chemical laser window materials,” Appl. Opt. 15, 1953 (1976).
  7. S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
    [CrossRef]
  8. Yagtar Singkh Bési, “Method of polishing zinc selenide,” U.S. Patent 3 869 323 (1975).
  9. G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).
  10. E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).
  11. E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

2007 (1)

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

2004 (1)

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

1994 (2)

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
[CrossRef]

1982 (1)

Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].

1979 (1)

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

1976 (1)

Bési, Yagtar Singkh

Yagtar Singkh Bési, “Method of polishing zinc selenide,” U.S. Patent 3 869 323 (1975).

Borovskikh, U. P.

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

Devyatykh, G. G.

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Fujita, S.

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

Gavrishchuk, E. M.

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Goev, A. I.

A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).

Gregory, D. A.

Herrington, G.

Hiroyuki, K.

T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
[CrossRef]

Hitoshi, T.

T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
[CrossRef]

Ignat'ev, S. V.

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Korshunov, I. A.

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Kozhukhova, V. T.

Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].

Kukleva, Z. A.

Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].

Mimoto, H.

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

Murskii, G. L.

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Nikonenko, D. V.

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

Noguchi, T.

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

Otto, W.

Pogorelko, A. A.

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

Potelov, V. V.

A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).

Savel'ev, A. V.

A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).

Senik, B. N.

A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).

Suchkov, A. I.

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

Suchkov, I. A.

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

Takebe, H.

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

Tikhomirov, G. P.

Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].

Tikhonova, E. L.

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

Timofeev, O. V.

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

Vilkova, E. Yu.

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

Vinokurov, V. M.

V. M. Vinokurov, Study of Glass-Polishing Processes (Mashinostroenie, Moscow, 1967).

Yasuo, O.

T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
[CrossRef]

Appl. Opt. (1)

J. Cryst. Growth (1)

S. Fujita, H. Mimoto, H. Takebe, and T. Noguchi, “Growth of cubic ZnS, ZnSe and ZnSxSe1−x single crystals by iodine transport,” J. Cryst. Growth 47, 326 (1979).
[CrossRef]

J. Electron. Mater. (1)

T. Hitoshi, O. Yasuo, and K. Hiroyuki, “Chemical Etching of ZnSe Crystals,” J. Electron. Mater. 23, 835 (1994).
[CrossRef]

Neorg. Mater. (2)

E. M. Gavrishchuk, O. V. Timofeev, A. A. Pogorelko, and I. A. Suchkov, “The effect of the polishing conditions on the optical properties of the surface of zinc selenide,” Neorg. Mater. 40, 267 (2004).

E. M. Gavrishchuk, E. Yu. Vilkova, O. V. Timofeev, E. L. Tikhonova, and U. P. Borovskikh, “Studying the process of etching CVD zinc selenide,” Neorg. Mater. 43, 579 (2007).

Opt. Mekh. Prom. (1)

Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov, “Effect of processing on the surface quality of zinc selenide crystals,” Opt. Mekh. Prom. No. 5, 35 (1982) Z. A. Kukleva, V. T. Kozhukhova, and G. P. Tikhomirov,[Sov. J. Opt. Technol. 49, 304 (1982)].

Vysokochist. Veshchestva (1)

G. G. Devyatykh, I. A. Korshunov, G. L. Murskiĭ, and A. I. Suchkov, “Dependence of the number and size of the optical inhomogeneities on the surface of high-purity polycrystalline zinc selenide on its polishing conditions,” Vysokochist. Veshchestva No. 4, 79 (1994).

Other (4)

A. I. Goev, V. V. Potelov, A. V. Savel'ev, and B. N. Senik, “Forming optical surfaces,” in Trans. Kontenant Internat. Acad. 1, (2005).

V. M. Vinokurov, Study of Glass-Polishing Processes (Mashinostroenie, Moscow, 1967).

Yagtar Singkh Bési, “Method of polishing zinc selenide,” U.S. Patent 3 869 323 (1975).

G. G. Devyatykh, I. A. Korshunov, E. M. Gavrishchuk, G. L. Murskiĭ, S. V. Ignat'ev, and D. V. Nikonenko, “Study of the volume inhomogeneities in polycrystalline zinc selenide obtained by CVD,” Vysokochist. Veshch. No. 3, 16 (1993).

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