Abstract

This paper discusses features of the synthesis of hologram-projectors intended for use in a holographic version of the photolithographic process. The main attention is paid to how the discretization of the object and the hologram affects the structure of the reconstructed image. The requirements imposed on the calculational and display parameters of the synthesized holograms are formulated and substantiated. It is established that discretization of the synthesized holograms not only causes additional reconstructed images to appear but also restricts the minimum size of the elements of the reconstructed images to 1.5λ.

© 2008 Optical Society of America

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  1. S. N. Koreshev and V. P. Ratushnyî, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004) S. N. Koreshev and V. P. Ratushnyî,[J. Opt. Technol. 71, 673 (2004)].
  2. S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme shot-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
    [CrossRef]
  3. F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
    [CrossRef]
  4. S. N. Koreshev and V. P. Ratushnyî, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) S. N. Koreshev and V. P. Ratushnyî,[Opt. Spectrosc. 101, 976 (2006)].
    [CrossRef]
  5. C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
    [CrossRef]
  6. P. P. Naullenau, F. Salmassi, E. M. Cullikson, and J. A. Liddle, “Design and fabrication of a high-efficiency extreme-ultraviolet binary phase-only computer-generated hologram,” Appl. Opt. 46, 2581 (2007).
    [CrossRef]
  7. R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic Press, New York, 1971; Mir, Moscow, 1973).
  8. G. B. Semenov and S. N. Koreshev, “Diffraction efficiency and some features of the spectra of discrete amplitude binary holograms,” Opt. Spektrosk. 41, 310 (1976) G. B. Semenov and S. N. Koreshev,[Opt. Spectrosc. 41, 177 (1976)].
  9. J. W. Goodman, Introduction to Fourier Optics (McGraw Hill, New York, 1968; Mir, Moscow, 1970).

2007 (1)

2006 (1)

S. N. Koreshev and V. P. Ratushnyî, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) S. N. Koreshev and V. P. Ratushnyî,[Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

2004 (2)

S. N. Koreshev and V. P. Ratushnyî, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004) S. N. Koreshev and V. P. Ratushnyî,[J. Opt. Technol. 71, 673 (2004)].

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme shot-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

1995 (1)

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

1992 (1)

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

1976 (1)

G. B. Semenov and S. N. Koreshev, “Diffraction efficiency and some features of the spectra of discrete amplitude binary holograms,” Opt. Spektrosk. 41, 310 (1976) G. B. Semenov and S. N. Koreshev,[Opt. Spectrosc. 41, 177 (1976)].

Burckhardt, C. B.

R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic Press, New York, 1971; Mir, Moscow, 1973).

Clube, F.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Collier, R. J.

R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic Press, New York, 1971; Mir, Moscow, 1973).

Cullikson, E. M.

Darbellay, Y.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Goodman, J. W.

J. W. Goodman, Introduction to Fourier Optics (McGraw Hill, New York, 1968; Mir, Moscow, 1970).

Gray, S.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Howells, M.

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Jacobsen, C.

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Koreshev, S. N.

S. N. Koreshev and V. P. Ratushnyî, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) S. N. Koreshev and V. P. Ratushnyî,[Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N. Koreshev and V. P. Ratushnyî, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004) S. N. Koreshev and V. P. Ratushnyî,[J. Opt. Technol. 71, 673 (2004)].

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme shot-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

G. B. Semenov and S. N. Koreshev, “Diffraction efficiency and some features of the spectra of discrete amplitude binary holograms,” Opt. Spektrosk. 41, 310 (1976) G. B. Semenov and S. N. Koreshev,[Opt. Spectrosc. 41, 177 (1976)].

Liddle, J. A.

Lin, L. H.

R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic Press, New York, 1971; Mir, Moscow, 1973).

Malfoy, S.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Naullenau, P. P.

Ratushnyi, V. P.

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme shot-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

Ratushnyî, V. P.

S. N. Koreshev and V. P. Ratushnyî, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) S. N. Koreshev and V. P. Ratushnyî,[Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

S. N. Koreshev and V. P. Ratushnyî, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004) S. N. Koreshev and V. P. Ratushnyî,[J. Opt. Technol. 71, 673 (2004)].

Salmassi, F.

Semenov, G. B.

G. B. Semenov and S. N. Koreshev, “Diffraction efficiency and some features of the spectra of discrete amplitude binary holograms,” Opt. Spektrosk. 41, 310 (1976) G. B. Semenov and S. N. Koreshev,[Opt. Spectrosc. 41, 177 (1976)].

Struchen, D.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Tisserand, J.

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Appl. Opt. (1)

J. Appl. Phys. (1)

C. Jacobsen and M. Howells, “Projection x-ray lithography using computer-generated holograms: A study of compatibility with proximity lithography,” J. Appl. Phys. 71, 2993 (1992).
[CrossRef]

Opt. Eng. (1)

F. Clube, S. Gray, D. Struchen, J. Tisserand, S. Malfoy, and Y. Darbellay, “Holographic microlithography,” Opt. Eng. 34, 2724 (1995).
[CrossRef]

Opt. Spektrosk. (2)

S. N. Koreshev and V. P. Ratushnyî, “Focused image holograms in high-resolution holographic projection photolithography,” Opt. Spektrosk. 101, 1038 (2006) S. N. Koreshev and V. P. Ratushnyî,[Opt. Spectrosc. 101, 976 (2006)].
[CrossRef]

G. B. Semenov and S. N. Koreshev, “Diffraction efficiency and some features of the spectra of discrete amplitude binary holograms,” Opt. Spektrosk. 41, 310 (1976) G. B. Semenov and S. N. Koreshev,[Opt. Spectrosc. 41, 177 (1976)].

Opt. Zh. (1)

S. N. Koreshev and V. P. Ratushnyî, “Using the method of holography to obtain images of two-dimensional objects when solving problems of high-resolution photolithography,” Opt. Zh. 71, No. 10, 32 (2004) S. N. Koreshev and V. P. Ratushnyî,[J. Opt. Technol. 71, 673 (2004)].

Proc. SPIE (1)

S. N. Koreshev and V. P. Ratushnyi, “Holographic method for obtaining images with limiting high resolution for extreme shot-wave lithography problems,” Proc. SPIE 5290, 221 (2004).
[CrossRef]

Other (2)

J. W. Goodman, Introduction to Fourier Optics (McGraw Hill, New York, 1968; Mir, Moscow, 1970).

R. J. Collier, C. B. Burckhardt, and L. H. Lin, Optical Holography (Academic Press, New York, 1971; Mir, Moscow, 1973).

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