Abstract

This paper discusses questions of the modernization of the production of circular optical scales. The results of modernizing the production and of introducing the technology of reverse photolithography for fabricating geodesic dials, rasters, and code disks are presented.

© 2008 Optical Society of America

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References

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  1. K. Faĭt, “Projection-exposure apparatus for fabricating high-accuracy dials,” Ĭenskoe Obozrenie No. 1, 21, (1977).
  2. G. Shukhardt, “New device complex for fabricating high-accuracy circular scales,” Ĭenskoe Obozrenie No. 2, 92 (1986).
  3. Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser computer and photolithographic technologies,” Opt. Zh. 73, 8, 61 (2006) Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev,[J. Opt. Technol. 73, 544 (2006)].

2006 (1)

Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser computer and photolithographic technologies,” Opt. Zh. 73, 8, 61 (2006) Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev,[J. Opt. Technol. 73, 544 (2006)].

Opt. Zh. (1)

Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev, “Modernizing the optical divider production of the Ural Optomechanical Factory on the basis of up-to-date laser computer and photolithographic technologies,” Opt. Zh. 73, 8, 61 (2006) Yu. F. Abramov, V. P. Kir'yanov, A. V. Kir'yanov, S. A. Kokarev, D. Yu. Kruchinin, R. V. Chuguĭ, and O. B. Yakovlev,[J. Opt. Technol. 73, 544 (2006)].

Other (2)

K. Faĭt, “Projection-exposure apparatus for fabricating high-accuracy dials,” Ĭenskoe Obozrenie No. 1, 21, (1977).

G. Shukhardt, “New device complex for fabricating high-accuracy circular scales,” Ĭenskoe Obozrenie No. 2, 92 (1986).

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