Abstract

This paper discusses the factors that affect the thickness distribution of a layer on a spherical surface of convex shape of known radius when layers are being formed on it through a flat stop of the simplest shape. It shows that the placement of the optical item and the stop relative to the evaporator affect the character of the thickness distribution of the layer.

© 2008 Optical Society of America

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References

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  1. V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,” Opt. Zh. 70, 3, 50 (2003) V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,[J. Opt. Technol. 70, No. 187 (2003)].
  2. L. Holland, Vacuum Deposition of Thin Films (Chapman and Hall, London, 1956). L. Holland, Vacuum Deposition of Thin Films (Gosénergoizdat, Moscow, 1963).

2003 (1)

V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,” Opt. Zh. 70, 3, 50 (2003) V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,[J. Opt. Technol. 70, No. 187 (2003)].

Opt. Zh. (1)

V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,” Opt. Zh. 70, 3, 50 (2003) V. A. Dmitrenko, L. A. Gubanova, and É. S. Putilin, “Forming gradient layers by means of circular stops and screens,[J. Opt. Technol. 70, No. 187 (2003)].

Other (1)

L. Holland, Vacuum Deposition of Thin Films (Chapman and Hall, London, 1956). L. Holland, Vacuum Deposition of Thin Films (Gosénergoizdat, Moscow, 1963).

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