Abstract

This paper discusses the possibilities of obtaining optical microstructures based on UV-hardenable acrylates. The applicability of the method of halftone lithography for obtaining polymeric microlenses and for forming microelements on the end of an optical fiber is investigated.

© 2008 Optical Society of America

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  1. C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).
  2. M. Wu and G. Whitsides, “Fabrication of two-dimensional arrays of microlenses and their applications in photolithography,” J. Micromech. Microeng. 12, 747 (2002).
    [CrossRef]
  3. A. G. Olszak and M. R. Descour, “Microscopy in multiples,” IEEE OE Mag. 5, No. 5, 16 (2005).
  4. M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).
  5. N. D. Tolstoba, “Gram-Schmidt technique for aberration analysis in telescope mirror testing,” Proc. SPIE 3785, 140 (1999).
  6. X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).
  7. T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
    [CrossRef]
  8. M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
    [CrossRef]
  9. T. N. Khatsevich and I. O. Mikhaĭlov, Endoscopy. A Textbook (SGGA, Novosibirsk, 2002).
  10. F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).
  11. V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).
  12. S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D.: Appl. Phys. 36, 2451 (2003).
  13. S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
    [CrossRef]
  14. Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
    [CrossRef]
  15. K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
    [CrossRef]
  16. Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).
  17. M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).
  18. M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].
  19. T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).
  20. M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. No. 468, 33/[385]-42/[394] (2007).
  21. A. S. Berezkina, “The effect of the type and concentration of dye on the formation of a microelement at the end of an optical fiber,” in Collection of the Articles of the Fourth Interindustry Conference of Young Scientists of St. Petersburg, St. Petersburg, SPbGU ITMO, 2007, pp. 12-16.
  22. M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

2007

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. No. 468, 33/[385]-42/[394] (2007).

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

2006

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

2005

A. G. Olszak and M. R. Descour, “Microscopy in multiples,” IEEE OE Mag. 5, No. 5, 16 (2005).

2004

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

2003

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D.: Appl. Phys. 36, 2451 (2003).

2002

S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
[CrossRef]

M. Wu and G. Whitsides, “Fabrication of two-dimensional arrays of microlenses and their applications in photolithography,” J. Micromech. Microeng. 12, 747 (2002).
[CrossRef]

2001

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

1999

N. D. Tolstoba, “Gram-Schmidt technique for aberration analysis in telescope mirror testing,” Proc. SPIE 3785, 140 (1999).

1997

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).

1995

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

1994

C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).

Altissimo, M.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Berezin, Yu. D.

V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).

Berezkina, A. S.

A. S. Berezkina, “The effect of the type and concentration of dye on the formation of a microelement at the end of an optical fiber,” in Collection of the Articles of the Fourth Interindustry Conference of Young Scientists of St. Petersburg, St. Petersburg, SPbGU ITMO, 2007, pp. 12-16.

Berkel, C.

C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).

Burunkova, J. E.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

Burunkova, Yu. É.

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

Businaro, L.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Cabrini, S.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Cai, L. Z.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Chuiko, V. A.

V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).

Clarke, J.

C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).

Cojoc, D.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Cui, Zheng

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

De Vittorio, M.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Degiorgio, V.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Denisuk, I. Yu.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

Denisyuk, I. Yu.

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

Descour, M. R.

A. G. Olszak and M. R. Descour, “Microscopy in multiples,” IEEE OE Mag. 5, No. 5, 16 (2005).

Deubel, M.

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

Di Fabrizio, E.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Dong, G. Y.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Fokina, M.

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. No. 468, 33/[385]-42/[394] (2007).

Fokina, M. I.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

Gale, M. T.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Gao, Feng

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

Gao, Fuhua

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

Gerardino, A.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Hessler, Th.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

John, S.

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

Juodkazis, S.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Jurss, M.

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Kang, S.

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D.: Appl. Phys. 36, 2451 (2003).

S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
[CrossRef]

Kaso, A.

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

Kawata, Satoshi

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Khatsevich, T. N.

T. N. Khatsevich and I. O. Mikhaĭlov, Endoscopy. A Textbook (SGGA, Novosibirsk, 2002).

Kim, S.

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D.: Appl. Phys. 36, 2451 (2003).

Kondo, T.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Kumar, R.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Lee, N.

S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
[CrossRef]

Matsuo, S.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

McGarvey, B.

C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).

Meng, X. F.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Mikhailov, I. O.

T. N. Khatsevich and I. O. Mikhaĭlov, Endoscopy. A Textbook (SGGA, Novosibirsk, 2002).

Mizawa, H.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Mizeikis, V.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Moon, S.

S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
[CrossRef]

Olszak, A. G.

A. G. Olszak and M. R. Descour, “Microscopy in multiples,” IEEE OE Mag. 5, No. 5, 16 (2005).

Pedersen, J.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Peiponen, K. E.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Perennes, F.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Prasciolu, M.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Proietti, R.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Quenzer, H. J.

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Reimer, K.

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Romanato, F.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Rossi, M.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Savander, P.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Savolainen, M.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Schiappellia, F.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Shen, X. X.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Silvennoinen, R.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Smirnova, T. V.

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

Steudle, D.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Sun, Hong-Bo

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Tiziani, H. J.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Tolstoba, N. D.

N. D. Tolstoba, “Gram-Schmidt technique for aberration analysis in telescope mirror testing,” Proc. SPIE 3785, 140 (1999).

Tormen, M.

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Vegener, M.

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

Vehviläinen, H.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Veiko, V. P.

V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).

Visimberga, G.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Wagner, B.

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Wang, Y. R.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Wegner, M.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

Whitsides, G.

M. Wu and G. Whitsides, “Fabrication of two-dimensional arrays of microlenses and their applications in photolithography,” J. Micromech. Microeng. 12, 747 (2002).
[CrossRef]

Wu, M.

M. Wu and G. Whitsides, “Fabrication of two-dimensional arrays of microlenses and their applications in photolithography,” J. Micromech. Microeng. 12, 747 (2002).
[CrossRef]

Xu, X. F.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Yang, X. L.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Yao, Jun

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

Yu, X. Q.

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

Zhang, Yixiao

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

Appl. Phys. Lett.

M. Deubel, M. Vegener, A. Kaso, and S. John, “Direct laser writing and characterization of 'Slanted Pore' Photonic Crystals,” Appl. Phys. Lett. 85, 1895 (2004).
[CrossRef]

IEEE OE Mag.

A. G. Olszak and M. R. Descour, “Microscopy in multiples,” IEEE OE Mag. 5, No. 5, 16 (2005).

Izv. Ross. Akad. Nauk, Ser. Fiz.

V. P. Veĭko, Yu. D. Berezin, and V. A. Chuĭko, “Laser technologies for forming fiber-optics instruments,” Izv. Ross. Akad. Nauk, Ser. Fiz. 61, 1627 (1997).

J. Micromech. Microeng.

M. Wu and G. Whitsides, “Fabrication of two-dimensional arrays of microlenses and their applications in photolithography,” J. Micromech. Microeng. 12, 747 (2002).
[CrossRef]

S. Moon, N. Lee, and S. Kang, “Fabrication of a microlens array using micro-compression molding with an electroformed mold insert,” J. Micromech. Microeng. 13, 98 (2002).
[CrossRef]

J. Phys. D.: Appl. Phys.

S. Kim and S. Kang, “Replication qualities and optical properties of UV-moulded microlens arrays,” J. Phys. D.: Appl. Phys. 36, 2451 (2003).

Meas. Sci. Technol.

M. Savolainen, K. E. Peiponen, P. Savander, R. Silvennoinen, and H. Vehviläinen, “Novel optical techniques for window-glass inspection,” Meas. Sci. Technol. 6, 1016 (1995).

Microelectron. Eng.

F. Schiappellia, R. Kumar, M. Prasciolu, D. Cojoc, S. Cabrini, M. De Vittorio, G. Visimberga, A. Gerardino, V. Degiorgio, and E. Di Fabrizio, “Efficient fiber-to-waveguide coupling by a lens on the end of the optical fiber fabricated by focused ion-beam milling,” Microelectron. Eng. 73-74, 397 (2004).

Jun Yao, Zheng Cui, Fuhua Gao, Yixiao Zhang, and Feng Gao, “Design of hybrid micro optical elements with coded gray-tone mask,” Microelectron. Eng. 57-58, 793 (2001).

M. Tormen, L. Businaro, M. Altissimo, F. Romanato, S. Cabrini, F. Perennes, R. Proietti, Hong-Bo Sun, Satoshi Kawata, and E. Di Fabrizio, “3D patterning by means of nanoimprinting, X-ray and two-photon lithography,” Microelectron. Eng. 73-74, 535 (2004).

Mol. Cryst.

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. No. 468, 33/[385]-42/[394] (2007).

New J. Phys.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Opt. Zh.

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. 73, No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,J. Opt. Technol. 73, 352 (2006).

Proc. SPIE

N. D. Tolstoba, “Gram-Schmidt technique for aberration analysis in telescope mirror testing,” Proc. SPIE 3785, 140 (1999).

K. Reimer, H. J. Quenzer, M. Jurss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

Pure Appl. Opt.

Th. Hessler, M. Rossi, J. Pedersen, M. T. Gale, M. Wegner, D. Steudle, and H. J. Tiziani, “Microlens arrays with spatial variation of the optical function,” Pure Appl. Opt. 6, 673 (1997).
[CrossRef]

X. X. Shen, X. Q. Yu, X. L. Yang, L. Z. Cai, Y. R. Wang, G. Y. Dong, X. F. Meng, and X. F. Xu, “Fabrication of periodic microstructures by holographic photopolymerization with a low-power continuous-wave laser of 532nm,” Pure Appl. Opt. 8, 672 (2006).

C. Berkel, B. McGarvey, and J. Clarke, “Microlens arrays for 2D large-area image sensors,” Pure Appl. Opt. 3, 177 (1994).

Other

T. N. Khatsevich and I. O. Mikhaĭlov, Endoscopy. A Textbook (SGGA, Novosibirsk, 2002).

A. S. Berezkina, “The effect of the type and concentration of dye on the formation of a microelement at the end of an optical fiber,” in Collection of the Articles of the Fourth Interindustry Conference of Young Scientists of St. Petersburg, St. Petersburg, SPbGU ITMO, 2007, pp. 12-16.

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