Abstract

This paper presents the results of studies of the process of forming microstructures in UV-hardenable monomeric composites. The main effects that determine the parameters of the resulting structures are investigated: the self-focusing of light in a material with a positive sign of the refractive-index change during photopolymerization, shrinkage during photopolymerization, and the photoradical-diffusion rate. The conditions are determined for obtaining microstructures with a format ratio up to 1:50.

© 2008 Optical Society of America

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  1. T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
    [CrossRef]
  2. G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
    [CrossRef]
  3. T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].
  4. E. Andrzejewska, “Photopolymerization kinetics of multifunctional monomers,” Prog. Polym. Sci. 26, 605 (2001).
    [CrossRef]
  5. M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].
  6. K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
    [CrossRef]
  7. T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
    [CrossRef]
  8. T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
    [CrossRef]
  9. M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. Liq. Cryst. 468, 385 (2007).
  10. M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

2007

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. Liq. Cryst. 468, 385 (2007).

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

2006

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

2005

G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
[CrossRef]

2001

E. Andrzejewska, “Photopolymerization kinetics of multifunctional monomers,” Prog. Polym. Sci. 26, 605 (2001).
[CrossRef]

T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
[CrossRef]

1998

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

1997

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Andrzejewska, E.

E. Andrzejewska, “Photopolymerization kinetics of multifunctional monomers,” Prog. Polym. Sci. 26, 605 (2001).
[CrossRef]

Bazylenko, C.

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

Burunkova, J. E.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

Burunkova, Yu. É.

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

de Sterke, C. M.

T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
[CrossRef]

Denisuk, I. Yu.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

Denisyuk, I. Yu.

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

Fokina, M.

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. Liq. Cryst. 468, 385 (2007).

Fokina, M. I.

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

Juodkazis, S.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Jürss, M.

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Kan, Y.

G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
[CrossRef]

Kondo, T.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Liu, G.

G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
[CrossRef]

Matsuo, S.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Mizawa, H.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Mizeikis, V.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Monro, T. M.

T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
[CrossRef]

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

Moss, D.

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

Poladian, L.

T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
[CrossRef]

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

Quenzer, H. J.

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Reimer, K.

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Smirnova, T. V.

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

Tian, Y.

G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
[CrossRef]

Wagner, B.

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

J. Mod. Opt.

T. M. Monro, C. M. de Sterke, and L. Poladian, “Catching light in its own trap,” J. Mod. Opt. 48, 191 (2001).
[CrossRef]

Microsyst. Technol.

G. Liu, Y. Tian, and Y. Kan, “Fabrication of high-aspect-ratio microstructures using SU8 photoresist,” Microsyst. Technol. 11, 343 (2005).
[CrossRef]

Mol. Cryst. Liq. Cryst.

M. Fokina, “Optical surface making by UV-curing of monomeric compositions in near field of coherent light source,” Mol. Cryst. Liq. Cryst. 468, 385 (2007).

New J. Phys.

T. Kondo, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Mizawa, “Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography,” New J. Phys. 8, 250 (2006).
[CrossRef]

Opt. Zh.

T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk, “Measuring the shrinkage of UV-hardenable composites based on acrylates and diacrylates,” Opt. Zh. No. 5, 57 (2006) T. V. Smirnova, Yu. É. Burunkova, and I. Yu. Denisyuk,[J. Opt. Technol. 73, 352 (2006)].

M. I. Fokina and I. Yu. Denisyuk, “Forming lattices of microlenses by the method of dosed photopolymerization of UV-hardened optical composites,” Opt. Zh. No. 11, 90 (2006) M. I. Fokina and I. Yu. Denisyuk,[J. Opt. Technol. 73, 815 (2006)].

Phys. Rev. Lett.

T. M. Monro, D. Moss, C. Bazylenko, and L. Poladian, “Observation of self-trapping of light in a self-written channel in a photosensitive glass,” Phys. Rev. Lett. 80, 4072 (1998).
[CrossRef]

Proc. SPIE

M. I. Fokina, J. E. Burunkova, and I. Yu. Denisuk, “Influence of photoactive additive on growth of polymer microelements on the top of optical fiber,” Proc. SPIE 6732, 673215 (2007).

K. Reimer, H. J. Quenzer, M. Jürss, and B. Wagner, “Micro-optic fabrication using one-level gray-tone lithography,” Proc. SPIE 3008, 279 (1997).
[CrossRef]

Prog. Polym. Sci.

E. Andrzejewska, “Photopolymerization kinetics of multifunctional monomers,” Prog. Polym. Sci. 26, 605 (2001).
[CrossRef]

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